GB1232747A - - Google Patents
Info
- Publication number
- GB1232747A GB1232747A GB1232747DA GB1232747A GB 1232747 A GB1232747 A GB 1232747A GB 1232747D A GB1232747D A GB 1232747DA GB 1232747 A GB1232747 A GB 1232747A
- Authority
- GB
- United Kingdom
- Prior art keywords
- scanning
- work
- window
- windows
- april
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1992169 | 1969-04-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1232747A true GB1232747A (xx) | 1971-05-19 |
Family
ID=10137360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1232747D Expired GB1232747A (xx) | 1969-04-18 | 1969-04-18 |
Country Status (5)
Country | Link |
---|---|
CH (1) | CH508981A (xx) |
DE (1) | DE2018320A1 (xx) |
FR (1) | FR2043428A5 (xx) |
GB (1) | GB1232747A (xx) |
NL (1) | NL7005618A (xx) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19642116C2 (de) * | 1996-10-12 | 2000-12-07 | Fraunhofer Ges Forschung | Verfahren zur strukturierten Energieübertragung mit Elektronenstrahlen |
-
1969
- 1969-04-18 GB GB1232747D patent/GB1232747A/en not_active Expired
-
1970
- 1970-04-16 DE DE19702018320 patent/DE2018320A1/de active Pending
- 1970-04-16 FR FR7013731A patent/FR2043428A5/fr not_active Expired
- 1970-04-17 NL NL7005618A patent/NL7005618A/xx unknown
- 1970-04-17 CH CH578870A patent/CH508981A/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE2018320A1 (de) | 1970-10-22 |
FR2043428A5 (xx) | 1971-02-12 |
NL7005618A (xx) | 1970-10-20 |
CH508981A (de) | 1971-06-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA1024246A (en) | Apparatus and method for generating radiation | |
ATE227884T1 (de) | Ionenstrahlabtastverfahren und vorrichtung | |
GB1454817A (en) | Irradiation apparatus | |
CA1005173A (en) | Method and apparatus for electron beam alignment with a member | |
CA1005176A (en) | Method and apparatus for electron beam alignment with a semiconductor member | |
GB1232747A (xx) | ||
GB2041639B (en) | Electron beam lithography | |
DE2706792A1 (de) | Einrichtung zum abtasten eines ziels mit einem strahl von geladenen teilchen | |
CA943617A (en) | Cylindrical electrode system for focusing and deflecting an electron beam | |
GB1182920A (en) | Method and Apparatus for Electron Beam Control. | |
DE3062881D1 (en) | Electron beam irradiation apparatus | |
CA1005172A (en) | Method and apparatus for electron beam alignment with a member by detecting cathodoluminescence from oxide layers | |
CA961175A (en) | Induced electron emission spectrometer using plural radiation sources | |
JPS5235977A (en) | Scanning particle beam microscope | |
JPS5326192A (en) | Compound analyzer | |
AU458279B2 (en) | Scanning beam guidance method and apparatus | |
GB1318273A (en) | Apparatus for tracing the contour of a pattern | |
AT381600B (de) | Elektromagnetische anordnung zum fokussieren und ablenken von elektronenstrahlen | |
JPS51116400A (en) | An electron beam radiation apparatus | |
GB1355973A (en) | Method of esuring a reproducible adjustment of dose homogeneity in the radiation field of a particle accelerator | |
GB1316901A (en) | System for energy selection of charged particles | |
JPS5227995A (en) | Rotating device for electron beam irradiation | |
JPS5588328A (en) | Exposing method to electron beam | |
CA921107A (en) | Apparatus for treating a web with a corpuscular beam | |
JPS5710932A (en) | Beam blanking method in electron beam exposure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |