GB1230039A - - Google Patents

Info

Publication number
GB1230039A
GB1230039A GB1230039DA GB1230039A GB 1230039 A GB1230039 A GB 1230039A GB 1230039D A GB1230039D A GB 1230039DA GB 1230039 A GB1230039 A GB 1230039A
Authority
GB
United Kingdom
Prior art keywords
axis
along
holder
lever
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1230039A publication Critical patent/GB1230039A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Beam Exposure (AREA)
GB1230039D 1968-11-29 1969-11-24 Expired GB1230039A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8747868A JPS4735711B1 (enrdf_load_stackoverflow) 1968-11-29 1968-11-29

Publications (1)

Publication Number Publication Date
GB1230039A true GB1230039A (enrdf_load_stackoverflow) 1971-04-28

Family

ID=13916017

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1230039D Expired GB1230039A (enrdf_load_stackoverflow) 1968-11-29 1969-11-24

Country Status (4)

Country Link
US (1) US3612863A (enrdf_load_stackoverflow)
JP (1) JPS4735711B1 (enrdf_load_stackoverflow)
FR (1) FR2024594A1 (enrdf_load_stackoverflow)
GB (1) GB1230039A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054151A (ja) * 1983-09-02 1985-03-28 Internatl Precision Inc 電子線装置の試料移動装置
US4762996A (en) * 1987-04-20 1988-08-09 International Business Machines Corporation Coarse approach positioning device
JPH0614460B2 (ja) * 1987-05-22 1994-02-23 日本電子株式会社 電子顕微鏡等における試料装置
EP3699948A1 (en) * 2019-02-21 2020-08-26 FEI Company Sample holder for a charged particle microscope

Also Published As

Publication number Publication date
FR2024594A1 (enrdf_load_stackoverflow) 1970-08-28
JPS4735711B1 (enrdf_load_stackoverflow) 1972-09-07
US3612863A (en) 1971-10-12
DE1959424B2 (de) 1976-01-29
DE1959424A1 (de) 1970-06-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee