JPS4735711B1 - - Google Patents
Info
- Publication number
- JPS4735711B1 JPS4735711B1 JP8747868A JP8747868A JPS4735711B1 JP S4735711 B1 JPS4735711 B1 JP S4735711B1 JP 8747868 A JP8747868 A JP 8747868A JP 8747868 A JP8747868 A JP 8747868A JP S4735711 B1 JPS4735711 B1 JP S4735711B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8747868A JPS4735711B1 (enrdf_load_stackoverflow) | 1968-11-29 | 1968-11-29 | |
| GB1230039D GB1230039A (enrdf_load_stackoverflow) | 1968-11-29 | 1969-11-24 | |
| US879887A US3612863A (en) | 1968-11-29 | 1969-11-25 | Electron microscope specimen stage which maintains specimen position when subjected to thermal fluctuations |
| DE19691959424 DE1959424C3 (de) | 1968-11-29 | 1969-11-26 | Vorrichtung zum Haltern und Ausrichten eines Objektes innerhalb eines von außen nicht zugänglichen Raumes |
| FR6941281A FR2024594A1 (enrdf_load_stackoverflow) | 1968-11-29 | 1969-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8747868A JPS4735711B1 (enrdf_load_stackoverflow) | 1968-11-29 | 1968-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4735711B1 true JPS4735711B1 (enrdf_load_stackoverflow) | 1972-09-07 |
Family
ID=13916017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8747868A Pending JPS4735711B1 (enrdf_load_stackoverflow) | 1968-11-29 | 1968-11-29 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3612863A (enrdf_load_stackoverflow) |
| JP (1) | JPS4735711B1 (enrdf_load_stackoverflow) |
| FR (1) | FR2024594A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1230039A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6054151A (ja) * | 1983-09-02 | 1985-03-28 | Internatl Precision Inc | 電子線装置の試料移動装置 |
| US4762996A (en) * | 1987-04-20 | 1988-08-09 | International Business Machines Corporation | Coarse approach positioning device |
| JPH0614460B2 (ja) * | 1987-05-22 | 1994-02-23 | 日本電子株式会社 | 電子顕微鏡等における試料装置 |
| EP3699948A1 (en) * | 2019-02-21 | 2020-08-26 | FEI Company | Sample holder for a charged particle microscope |
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1968
- 1968-11-29 JP JP8747868A patent/JPS4735711B1/ja active Pending
-
1969
- 1969-11-24 GB GB1230039D patent/GB1230039A/en not_active Expired
- 1969-11-25 US US879887A patent/US3612863A/en not_active Expired - Lifetime
- 1969-11-28 FR FR6941281A patent/FR2024594A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| FR2024594A1 (enrdf_load_stackoverflow) | 1970-08-28 |
| US3612863A (en) | 1971-10-12 |
| DE1959424B2 (de) | 1976-01-29 |
| GB1230039A (enrdf_load_stackoverflow) | 1971-04-28 |
| DE1959424A1 (de) | 1970-06-11 |