FR2024594A1 - - Google Patents

Info

Publication number
FR2024594A1
FR2024594A1 FR6941281A FR6941281A FR2024594A1 FR 2024594 A1 FR2024594 A1 FR 2024594A1 FR 6941281 A FR6941281 A FR 6941281A FR 6941281 A FR6941281 A FR 6941281A FR 2024594 A1 FR2024594 A1 FR 2024594A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6941281A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2024594A1 publication Critical patent/FR2024594A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Beam Exposure (AREA)
FR6941281A 1968-11-29 1969-11-28 Withdrawn FR2024594A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8747868A JPS4735711B1 (enrdf_load_stackoverflow) 1968-11-29 1968-11-29

Publications (1)

Publication Number Publication Date
FR2024594A1 true FR2024594A1 (enrdf_load_stackoverflow) 1970-08-28

Family

ID=13916017

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6941281A Withdrawn FR2024594A1 (enrdf_load_stackoverflow) 1968-11-29 1969-11-28

Country Status (4)

Country Link
US (1) US3612863A (enrdf_load_stackoverflow)
JP (1) JPS4735711B1 (enrdf_load_stackoverflow)
FR (1) FR2024594A1 (enrdf_load_stackoverflow)
GB (1) GB1230039A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054151A (ja) * 1983-09-02 1985-03-28 Internatl Precision Inc 電子線装置の試料移動装置
US4762996A (en) * 1987-04-20 1988-08-09 International Business Machines Corporation Coarse approach positioning device
JPH0614460B2 (ja) * 1987-05-22 1994-02-23 日本電子株式会社 電子顕微鏡等における試料装置
EP3699948A1 (en) * 2019-02-21 2020-08-26 FEI Company Sample holder for a charged particle microscope

Also Published As

Publication number Publication date
JPS4735711B1 (enrdf_load_stackoverflow) 1972-09-07
US3612863A (en) 1971-10-12
DE1959424B2 (de) 1976-01-29
GB1230039A (enrdf_load_stackoverflow) 1971-04-28
DE1959424A1 (de) 1970-06-11

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Legal Events

Date Code Title Description
ST Notification of lapse