GB1174727A - A Method of Fabricating a Memory Device - Google Patents
A Method of Fabricating a Memory DeviceInfo
- Publication number
- GB1174727A GB1174727A GB3410668A GB3410668A GB1174727A GB 1174727 A GB1174727 A GB 1174727A GB 3410668 A GB3410668 A GB 3410668A GB 3410668 A GB3410668 A GB 3410668A GB 1174727 A GB1174727 A GB 1174727A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lines
- photoresist
- over
- metal
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 7
- 239000002184 metal Substances 0.000 abstract 7
- 229920002120 photoresistant polymer Polymers 0.000 abstract 6
- 239000011248 coating agent Substances 0.000 abstract 5
- 238000000576 coating method Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 abstract 3
- 238000005530 etching Methods 0.000 abstract 3
- 238000010894 electron beam technology Methods 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000009987 spinning Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
Landscapes
- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66142567A | 1967-08-17 | 1967-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1174727A true GB1174727A (en) | 1969-12-17 |
Family
ID=24653540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3410668A Expired GB1174727A (en) | 1967-08-17 | 1968-07-17 | A Method of Fabricating a Memory Device |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR1575366A (enrdf_load_stackoverflow) |
| GB (1) | GB1174727A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2207815A (en) * | 1987-07-16 | 1989-02-08 | Crystalate Electronics | Process for producing a programmed matrix |
| WO2010042965A1 (de) | 2008-10-17 | 2010-04-22 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Markierung zum markieren bzw. codieren eines gegenstands sowie verfahren zur herstellung einer derartigen markierung und verwendung |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2167621B (en) * | 1984-11-27 | 1988-03-02 | Crystalate Electronics | Programmed matrix device |
| DE3810486A1 (de) * | 1988-03-28 | 1989-10-19 | Kaleto Ag | Verfahren zum herstellen kundenspezifischer elektrischer schaltungen, insbesondere gedruckter schaltungen |
-
1968
- 1968-07-17 GB GB3410668A patent/GB1174727A/en not_active Expired
- 1968-07-29 FR FR1575366D patent/FR1575366A/fr not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2207815A (en) * | 1987-07-16 | 1989-02-08 | Crystalate Electronics | Process for producing a programmed matrix |
| WO2010042965A1 (de) | 2008-10-17 | 2010-04-22 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Markierung zum markieren bzw. codieren eines gegenstands sowie verfahren zur herstellung einer derartigen markierung und verwendung |
| DE202009018996U1 (de) | 2008-10-17 | 2015-04-01 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Markierung zum Markieren bzw. Codieren eines Gegenstands |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1575366A (enrdf_load_stackoverflow) | 1969-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4153855A (en) | Method of making a plate having a pattern of microchannels | |
| GB1532349A (en) | Forming holes through dielectric material | |
| CA1161967A (en) | Process for the preparation of large area tft arrays | |
| GB1174727A (en) | A Method of Fabricating a Memory Device | |
| GB2059679A (en) | Method of making composite bodies | |
| JPS58185445A (ja) | マイクロレンズアレイの製造方法 | |
| US4902646A (en) | MESFET process employing dummy electrodes and resist reflow | |
| JPS60230650A (ja) | 微細パタ−ンの製作法 | |
| US3383758A (en) | Cryogenic circuit fabrication | |
| DE3521891C2 (enrdf_load_stackoverflow) | ||
| CA2168172A1 (en) | Method for fabricating multisegment ridge waveguides | |
| JPS5941872B2 (ja) | サ−マルヘツドの製造方法 | |
| JPS61198106A (ja) | 光導波路形成方法 | |
| DE2512115A1 (de) | Verfahren zur herstellung mikroskopisch kleiner metall- oder metallegierungs- strukturen | |
| JPS61107516A (ja) | レジスト膜のパタ−ン形成方法 | |
| GB1190554A (en) | Improvements in or relating to Electrical Circuit Structures. | |
| JPS5887846A (ja) | 半導体装置の製造方法 | |
| DE2637652A1 (de) | Verfahren zur herstellung mikroskopisch kleiner metall- oder metallegierungsstrukturen, insbesondere fuer zylinderdomaenenspeicher | |
| US3819341A (en) | Method of manufacturing integrated magnetic memories | |
| US3878063A (en) | Method for making a thin film dielectric storage target | |
| JPS6140004A (ja) | 抵抗器のパタ−ン形成方法 | |
| JPS6019095B2 (ja) | 螢光表示管用陽極基板の製造方法 | |
| JPS61113285A (ja) | 光起電力素子の製造方法 | |
| GB1079898A (en) | Prewoven bit-wire memory matrix apparatus and methods of fabrication | |
| JPS592351A (ja) | 半導体装置の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |