GB1171141A - Asymmetric Ion Pump - Google Patents
Asymmetric Ion PumpInfo
- Publication number
- GB1171141A GB1171141A GB5330766A GB5330766A GB1171141A GB 1171141 A GB1171141 A GB 1171141A GB 5330766 A GB5330766 A GB 5330766A GB 5330766 A GB5330766 A GB 5330766A GB 1171141 A GB1171141 A GB 1171141A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathodes
- anode
- cathode
- chamber
- alloys
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108010083687 Ion Pumps Proteins 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 238000005086 pumping Methods 0.000 abstract 2
- 229910052715 tantalum Inorganic materials 0.000 abstract 2
- 102000006391 Ion Pumps Human genes 0.000 abstract 1
- 229910052779 Neodymium Inorganic materials 0.000 abstract 1
- 229910052776 Thorium Inorganic materials 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052793 cadmium Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
- 229910000859 α-Fe Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US51151665A | 1965-12-03 | 1965-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1171141A true GB1171141A (en) | 1969-11-19 |
Family
ID=24035232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5330766A Expired GB1171141A (en) | 1965-12-03 | 1966-11-29 | Asymmetric Ion Pump |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE690567A (enrdf_load_html_response) |
| DE (1) | DE1539139A1 (enrdf_load_html_response) |
| FR (1) | FR1503209A (enrdf_load_html_response) |
| GB (1) | GB1171141A (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITUB20160885A1 (it) * | 2016-02-19 | 2017-08-19 | Getters Spa | Catodi sinterizzati non porosi e pompe a vuoto ioniche contenenti gli stessi |
| GB2623794A (en) * | 2022-10-27 | 2024-05-01 | Edwards Vacuum Llc | Sputter ion pump |
-
1966
- 1966-11-29 GB GB5330766A patent/GB1171141A/en not_active Expired
- 1966-12-01 BE BE690567D patent/BE690567A/xx unknown
- 1966-12-01 DE DE19661539139 patent/DE1539139A1/de active Pending
- 1966-12-02 FR FR86063A patent/FR1503209A/fr not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITUB20160885A1 (it) * | 2016-02-19 | 2017-08-19 | Getters Spa | Catodi sinterizzati non porosi e pompe a vuoto ioniche contenenti gli stessi |
| WO2017140730A1 (en) * | 2016-02-19 | 2017-08-24 | Saes Getters S.P.A. | Sintered non-porous cathode and sputter ion vacuum pump containing the same |
| CN108475613A (zh) * | 2016-02-19 | 2018-08-31 | 工程吸气公司 | 烧结的非孔性阴极和包括其的溅射离子真空泵 |
| JP2019517094A (ja) * | 2016-02-19 | 2019-06-20 | サエス・ゲッターズ・エッセ・ピ・ア | 焼結非多孔質カソードおよびこれを含むスパッタイオン真空ポンプ |
| CN108475613B (zh) * | 2016-02-19 | 2020-06-23 | 工程吸气公司 | 烧结的非孔性阴极和包括其的溅射离子真空泵 |
| US11056326B2 (en) | 2016-02-19 | 2021-07-06 | Saes Getters S.P.A. | Sintered non-porous cathode and sputter ion vacuum pump containing the same |
| GB2623794A (en) * | 2022-10-27 | 2024-05-01 | Edwards Vacuum Llc | Sputter ion pump |
| GB2623856A (en) * | 2022-10-27 | 2024-05-01 | Edwards Vacuum Llc | Sputter ion pump |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1503209A (fr) | 1967-11-24 |
| DE1539139A1 (de) | 1970-01-22 |
| BE690567A (enrdf_load_html_response) | 1967-06-01 |
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