GB1158986A - Insulator Shielded Cathode. - Google Patents
Insulator Shielded Cathode.Info
- Publication number
- GB1158986A GB1158986A GB4684166A GB4684166A GB1158986A GB 1158986 A GB1158986 A GB 1158986A GB 4684166 A GB4684166 A GB 4684166A GB 4684166 A GB4684166 A GB 4684166A GB 1158986 A GB1158986 A GB 1158986A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- insulator
- shield
- hollow
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 title abstract 4
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- 229910052582 BN Inorganic materials 0.000 abstract 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/38—Cold-cathode tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US50623765A | 1965-11-03 | 1965-11-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1158986A true GB1158986A (en) | 1969-07-23 |
Family
ID=24013764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4684166A Expired GB1158986A (en) | 1965-11-03 | 1966-10-19 | Insulator Shielded Cathode. |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE1564999A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1158986A (enrdf_load_stackoverflow) |
| SE (1) | SE317139B (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0278494A3 (en) * | 1987-02-12 | 1990-05-02 | Kawasaki Steel Corporation | Hollow cathode gun and deposition device for ion plating process |
-
1966
- 1966-10-19 GB GB4684166A patent/GB1158986A/en not_active Expired
- 1966-10-28 SE SE1485166A patent/SE317139B/xx unknown
- 1966-11-03 DE DE19661564999 patent/DE1564999A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0278494A3 (en) * | 1987-02-12 | 1990-05-02 | Kawasaki Steel Corporation | Hollow cathode gun and deposition device for ion plating process |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1564999A1 (de) | 1970-03-12 |
| SE317139B (enrdf_load_stackoverflow) | 1969-11-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |