GB1153485A - Thin-Film Resistive Elements - Google Patents

Thin-Film Resistive Elements

Info

Publication number
GB1153485A
GB1153485A GB30536/66A GB3053666A GB1153485A GB 1153485 A GB1153485 A GB 1153485A GB 30536/66 A GB30536/66 A GB 30536/66A GB 3053666 A GB3053666 A GB 3053666A GB 1153485 A GB1153485 A GB 1153485A
Authority
GB
United Kingdom
Prior art keywords
thin
resistive elements
film resistive
july
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB30536/66A
Inventor
Carl Altman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1153485A publication Critical patent/GB1153485A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Electron Beam Exposure (AREA)
  • Liquid Crystal (AREA)
  • Electronic Switches (AREA)

Abstract

1,153,485. Etching. WESTERN ELECTRIC CO. Inc. 7 July, 1966 [12 July, 1965], No. 30536/66. Addition to 1,141,684. Heading B6J. [Also in Divisions C7 and H1] A film of #-tantalum (see Specification 1,141,684) or an insulating substrate is photoetched by application of a resist which is polymerized in a desired pattern by exposure to ultra-violet light through a mask, followed by removal of the unexposed resist by soaking in a solvent and etching of the metal so exposed, suitably by a mixture of nitric and hydrofluoric acids.
GB30536/66A 1965-07-12 1966-07-07 Thin-Film Resistive Elements Expired GB1153485A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US470981A US3391373A (en) 1965-07-12 1965-07-12 Beta tantalum resistors

Publications (1)

Publication Number Publication Date
GB1153485A true GB1153485A (en) 1969-05-29

Family

ID=23869822

Family Applications (1)

Application Number Title Priority Date Filing Date
GB30536/66A Expired GB1153485A (en) 1965-07-12 1966-07-07 Thin-Film Resistive Elements

Country Status (10)

Country Link
US (1) US3391373A (en)
AT (1) AT263942B (en)
BE (1) BE683045A (en)
CH (1) CH511501A (en)
DE (1) DE1615051A1 (en)
ES (1) ES328726A1 (en)
FR (1) FR1484134A (en)
GB (1) GB1153485A (en)
NL (1) NL6609533A (en)
SE (1) SE341422B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3473146A (en) * 1967-10-10 1969-10-14 Trw Inc Electrical resistor having low resistance values
US3805210A (en) * 1969-12-04 1974-04-16 M Croset Integrated circuit resistor and a method for the manufacture thereof
JPS5535843B2 (en) * 1972-12-28 1980-09-17
US4713529A (en) * 1986-09-15 1987-12-15 Gte Products Corporation Electroceramic heating devices with welded leads
JP4207951B2 (en) * 2005-12-06 2009-01-14 Ｔｄｋ株式会社 β-phase Ta thin film resistor and thin film magnetic head provided with the thin film resistor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275915A (en) * 1966-09-27 Beta tantalum thin-film capacitors
NL286998A (en) * 1961-12-27

Also Published As

Publication number Publication date
ES328726A1 (en) 1967-04-01
FR1484134A (en) 1967-06-09
DE1615051A1 (en) 1970-05-27
NL6609533A (en) 1967-01-13
BE683045A (en) 1966-12-01
CH511501A (en) 1971-08-15
AT263942B (en) 1968-08-12
SE341422B (en) 1971-12-27
US3391373A (en) 1968-07-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE Patent expired