AT263942B - Thin film resistor - Google Patents

Thin film resistor

Info

Publication number
AT263942B
AT263942B AT665466A AT665466A AT263942B AT 263942 B AT263942 B AT 263942B AT 665466 A AT665466 A AT 665466A AT 665466 A AT665466 A AT 665466A AT 263942 B AT263942 B AT 263942B
Authority
AT
Austria
Prior art keywords
thin film
film resistor
resistor
thin
film
Prior art date
Application number
AT665466A
Other languages
German (de)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Application granted granted Critical
Publication of AT263942B publication Critical patent/AT263942B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
AT665466A 1965-07-12 1966-07-11 Thin film resistor AT263942B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US470981A US3391373A (en) 1965-07-12 1965-07-12 Beta tantalum resistors

Publications (1)

Publication Number Publication Date
AT263942B true AT263942B (en) 1968-08-12

Family

ID=23869822

Family Applications (1)

Application Number Title Priority Date Filing Date
AT665466A AT263942B (en) 1965-07-12 1966-07-11 Thin film resistor

Country Status (10)

Country Link
US (1) US3391373A (en)
AT (1) AT263942B (en)
BE (1) BE683045A (en)
CH (1) CH511501A (en)
DE (1) DE1615051A1 (en)
ES (1) ES328726A1 (en)
FR (1) FR1484134A (en)
GB (1) GB1153485A (en)
NL (1) NL6609533A (en)
SE (1) SE341422B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3473146A (en) * 1967-10-10 1969-10-14 Trw Inc Electrical resistor having low resistance values
US3805210A (en) * 1969-12-04 1974-04-16 M Croset Integrated circuit resistor and a method for the manufacture thereof
JPS5535843B2 (en) * 1972-12-28 1980-09-17
US4713529A (en) * 1986-09-15 1987-12-15 Gte Products Corporation Electroceramic heating devices with welded leads
JP4207951B2 (en) * 2005-12-06 2009-01-14 Ｔｄｋ株式会社 β-phase Ta thin film resistor and thin film magnetic head provided with the thin film resistor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275915A (en) * 1966-09-27 Beta tantalum thin-film capacitors
NL286998A (en) * 1961-12-27

Also Published As

Publication number Publication date
DE1615051A1 (en) 1970-05-27
FR1484134A (en) 1967-06-09
GB1153485A (en) 1969-05-29
NL6609533A (en) 1967-01-13
US3391373A (en) 1968-07-02
ES328726A1 (en) 1967-04-01
BE683045A (en) 1966-12-01
CH511501A (en) 1971-08-15
SE341422B (en) 1971-12-27

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