JPS5638047A - Mask capable of net point etching - Google Patents

Mask capable of net point etching

Info

Publication number
JPS5638047A
JPS5638047A JP7653880A JP7653880A JPS5638047A JP S5638047 A JPS5638047 A JP S5638047A JP 7653880 A JP7653880 A JP 7653880A JP 7653880 A JP7653880 A JP 7653880A JP S5638047 A JPS5638047 A JP S5638047A
Authority
JP
Japan
Prior art keywords
net point
mask capable
point etching
etching
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7653880A
Other languages
Japanese (ja)
Inventor
Danieru Buratsuto Maachin
Baanaado Kooen Aburahamu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JPS5638047A publication Critical patent/JPS5638047A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F5/00Screening processes; Screens therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Polymerisation Methods In General (AREA)
  • Materials For Photolithography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP7653880A 1975-11-17 1980-06-06 Mask capable of net point etching Pending JPS5638047A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63272675A 1975-11-17 1975-11-17

Publications (1)

Publication Number Publication Date
JPS5638047A true JPS5638047A (en) 1981-04-13

Family

ID=24536688

Family Applications (4)

Application Number Title Priority Date Filing Date
JP51139041A Granted JPS5262427A (en) 1975-11-17 1976-11-17 Photopolymer element and method of duplicating image
JP7653880A Pending JPS5638047A (en) 1975-11-17 1980-06-06 Mask capable of net point etching
JP7653980A Pending JPS5638046A (en) 1975-11-17 1980-06-06 Colorrproof system
JP56108067A Granted JPS5762048A (en) 1975-11-17 1981-07-10 Photopolymerizable element

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP51139041A Granted JPS5262427A (en) 1975-11-17 1976-11-17 Photopolymer element and method of duplicating image

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP7653980A Pending JPS5638046A (en) 1975-11-17 1980-06-06 Colorrproof system
JP56108067A Granted JPS5762048A (en) 1975-11-17 1981-07-10 Photopolymerizable element

Country Status (8)

Country Link
JP (4) JPS5262427A (en)
AU (1) AU506292B2 (en)
BE (1) BE848409A (en)
BR (1) BR7607672A (en)
CA (1) CA1079565A (en)
DE (3) DE2651864B2 (en)
FR (1) FR2331813A1 (en)
GB (1) GB1548439A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006337996A (en) * 2005-05-04 2006-12-14 Rohm & Haas Electronic Materials Llc Coating compositions

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2651864B2 (en) * 1975-11-17 1980-02-07 E.I. Du Pont De Nemours And Co., Wilmington, Del. (V.St.A.) Photopolymerizable recording material and methods for reproducing images
US4311784A (en) 1978-05-09 1982-01-19 E. I. Du Pont De Nemours And Company Multilayer photosensitive solvent-processable litho element
JPS55114370A (en) * 1979-02-28 1980-09-03 Fuji Photo Film Co Ltd Treatment of plate
JPS5630129A (en) * 1979-08-21 1981-03-26 Agency Of Ind Science & Technol Manufacture of photomask
DE3150637C2 (en) * 1981-12-21 1983-11-10 Du Pont de Nemours (Deutschland) GmbH, 4000 Düsseldorf Etching solution for etching photopolymer films and method for point etching
US4515877A (en) * 1982-11-27 1985-05-07 Basf Aktiengesellschaft Image-recording materials and image-recording carried out using these to produce an optical mask
JPS59154442A (en) * 1983-02-22 1984-09-03 Oji Paper Co Ltd Photosensitive film for forming picture image
JPS62231245A (en) * 1986-03-31 1987-10-09 Nippon Zeon Co Ltd Photosensitive polymer composition
JPH01282543A (en) * 1988-05-09 1989-11-14 Fuji Photo Film Co Ltd Picture forming material
US5372437A (en) * 1992-04-24 1994-12-13 Citizen Watch Co., Ltd. Print head of wire-dot printer and production method thereof
JP2003107697A (en) * 2001-09-28 2003-04-09 Fuji Photo Film Co Ltd Photosensitive transfer material, photomask material, photomask and method for manufacturing the photomask
JP4820640B2 (en) * 2005-12-20 2011-11-24 富士フイルム株式会社 Preparation method of lithographic printing plate
JP4979368B2 (en) * 2005-12-27 2012-07-18 関西ペイント株式会社 Active energy ray-curable resin composition and resist pattern forming method
TWI717193B (en) * 2015-03-30 2021-01-21 日商富士軟片股份有限公司 Colored photosensitive composition, cured film, pattern forming method, infrared cut filter with light shielding film, solid-state imaging element, image display device, and infrared sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139041A (en) * 1975-05-23 1976-12-01 Kayaba Industry Co Ltd Disk brake for eccentric retention suspension mechanism
JPS5262427A (en) * 1975-11-17 1977-05-23 Du Pont Photopolymer element and method of duplicating image

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL87862C (en) * 1951-08-20
US3149975A (en) * 1962-07-06 1964-09-22 Du Pont Photopolymerizable compositions and elements
US3380831A (en) * 1964-05-26 1968-04-30 Du Pont Photopolymerizable compositions and elements
US3353955A (en) * 1964-06-16 1967-11-21 Du Pont Stratum transfer process based on adhesive properties of photopolymerizable layer
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists
US3698904A (en) * 1969-07-23 1972-10-17 Asahi Chemical Ind Composition for developing photopolymerizable lithographic plate elements comprising a developer base agent,an ink-receptivity-affording agent and a desensitizer
BE759041A (en) * 1969-11-18 1971-05-17 Du Pont PHOTOPOLYMERISABLE COMPOSITIONS CONTAINING AMINOPHENYLCETONES AND ADJUVANTS
CA993709A (en) * 1971-01-21 1976-07-27 Leo Roos Composite, mask-forming photohardenable elements
BE787932A (en) * 1971-09-13 1973-02-26 Bristol Myers Co PRODUCTS SUCH AS BUFFERS, FOR CLEANING OR OTHER USES AND LIQUID COMPOSITIONS FOR PREPARING THESE PRODUCTS
JPS4877438A (en) * 1972-01-19 1973-10-18
JPS4893337A (en) * 1972-03-11 1973-12-03
BE788560A (en) * 1972-06-09 1973-03-08 Du Pont PROTECTION AGAINST HALO IN IMAGE FORMING IN MULTI-LAYER PHOTOPOLYMERS

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139041A (en) * 1975-05-23 1976-12-01 Kayaba Industry Co Ltd Disk brake for eccentric retention suspension mechanism
JPS5262427A (en) * 1975-11-17 1977-05-23 Du Pont Photopolymer element and method of duplicating image

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006337996A (en) * 2005-05-04 2006-12-14 Rohm & Haas Electronic Materials Llc Coating compositions

Also Published As

Publication number Publication date
BR7607672A (en) 1977-09-27
JPS5762048A (en) 1982-04-14
JPS5722372B2 (en) 1982-05-12
DE2660921A1 (en) 1984-07-19
DE2651864A1 (en) 1977-05-18
AU1966676A (en) 1978-05-25
FR2331813B1 (en) 1981-10-02
JPS6132661B2 (en) 1986-07-28
AU506292B2 (en) 1979-12-20
FR2331813A1 (en) 1977-06-10
DE2651864B2 (en) 1980-02-07
CA1079565A (en) 1980-06-17
GB1548439A (en) 1979-07-18
BE848409A (en) 1977-05-17
DE2651864C3 (en) 1987-09-10
JPS5638046A (en) 1981-04-13
DE2660921C3 (en) 1987-07-30
DE2660103C3 (en) 1987-10-22
JPS5262427A (en) 1977-05-23
DE2660103B1 (en) 1981-02-12

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