GB1105377A - Improvements in or relating to the manufacture of doped semiconductor crystals - Google Patents

Improvements in or relating to the manufacture of doped semiconductor crystals

Info

Publication number
GB1105377A
GB1105377A GB46419/66A GB4641966A GB1105377A GB 1105377 A GB1105377 A GB 1105377A GB 46419/66 A GB46419/66 A GB 46419/66A GB 4641966 A GB4641966 A GB 4641966A GB 1105377 A GB1105377 A GB 1105377A
Authority
GB
United Kingdom
Prior art keywords
carrier gas
semi
gas
source
passing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB46419/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1105377A publication Critical patent/GB1105377A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P95/00—
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • H10P32/00—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB46419/66A 1965-10-19 1966-10-18 Improvements in or relating to the manufacture of doped semiconductor crystals Expired GB1105377A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0100103 1965-10-19

Publications (1)

Publication Number Publication Date
GB1105377A true GB1105377A (en) 1968-03-06

Family

ID=7522825

Family Applications (1)

Application Number Title Priority Date Filing Date
GB46419/66A Expired GB1105377A (en) 1965-10-19 1966-10-18 Improvements in or relating to the manufacture of doped semiconductor crystals

Country Status (3)

Country Link
DE (1) DE1544270A1 (enExample)
GB (1) GB1105377A (enExample)
NL (1) NL6614041A (enExample)

Also Published As

Publication number Publication date
NL6614041A (enExample) 1967-04-20
DE1544270A1 (de) 1970-02-26

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