GB1077320A - Improvements in and relating to semiconductors - Google Patents

Improvements in and relating to semiconductors

Info

Publication number
GB1077320A
GB1077320A GB51352/65A GB5135265A GB1077320A GB 1077320 A GB1077320 A GB 1077320A GB 51352/65 A GB51352/65 A GB 51352/65A GB 5135265 A GB5135265 A GB 5135265A GB 1077320 A GB1077320 A GB 1077320A
Authority
GB
United Kingdom
Prior art keywords
silicon
cathode
substrate
conductivity type
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB51352/65A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1077320A publication Critical patent/GB1077320A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • H10P14/22—
    • H10P14/2905—
    • H10P14/3411—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
GB51352/65A 1965-04-21 1965-12-03 Improvements in and relating to semiconductors Expired GB1077320A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US44985565A 1965-04-21 1965-04-21

Publications (1)

Publication Number Publication Date
GB1077320A true GB1077320A (en) 1967-07-26

Family

ID=23785755

Family Applications (1)

Application Number Title Priority Date Filing Date
GB51352/65A Expired GB1077320A (en) 1965-04-21 1965-12-03 Improvements in and relating to semiconductors

Country Status (3)

Country Link
DE (1) DE1544322A1 (cg-RX-API-DMAC10.html)
GB (1) GB1077320A (cg-RX-API-DMAC10.html)
NL (1) NL6602553A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2142045A (en) * 1983-06-15 1985-01-09 British Telecomm Growth of semiconductors
US4664743A (en) * 1984-08-21 1987-05-12 British Telecommunications Plc Growth of semi-conductors and apparatus for use therein

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2142045A (en) * 1983-06-15 1985-01-09 British Telecomm Growth of semiconductors
US4664743A (en) * 1984-08-21 1987-05-12 British Telecommunications Plc Growth of semi-conductors and apparatus for use therein

Also Published As

Publication number Publication date
NL6602553A (cg-RX-API-DMAC10.html) 1966-10-24
DE1544322A1 (de) 1970-02-26

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