GB1031766A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- GB1031766A GB1031766A GB1147763A GB1147763A GB1031766A GB 1031766 A GB1031766 A GB 1031766A GB 1147763 A GB1147763 A GB 1147763A GB 1147763 A GB1147763 A GB 1147763A GB 1031766 A GB1031766 A GB 1031766A
- Authority
- GB
- United Kingdom
- Prior art keywords
- potential
- cathodes
- pump
- region
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108010083687 Ion Pumps Proteins 0.000 abstract 4
- 150000002500 ions Chemical class 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- 102000006391 Ion Pumps Human genes 0.000 abstract 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 229910052702 rhenium Inorganic materials 0.000 abstract 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 abstract 1
- 230000002000 scavenging effect Effects 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
Landscapes
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US183440A US3181028A (en) | 1962-03-29 | 1962-03-29 | Ion transport vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1031766A true GB1031766A (en) | 1966-06-02 |
Family
ID=22672800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1147763A Expired GB1031766A (en) | 1962-03-29 | 1963-03-22 | Vacuum pump |
Country Status (5)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009106543A1 (de) * | 2008-02-28 | 2009-09-03 | Inficon Gmbh | Heliumsensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1246669A (fr) * | 1959-02-17 | 1960-11-18 | Whitehall Rand Inc | Pompe à fluides |
-
0
- BE BE630302D patent/BE630302A/xx unknown
- NL NL290849D patent/NL290849A/xx unknown
-
1963
- 1963-03-22 GB GB1147763A patent/GB1031766A/en not_active Expired
- 1963-03-28 DE DE1963J0023449 patent/DE1231844B/de active Pending
- 1963-03-29 CH CH401163A patent/CH439571A/de unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009106543A1 (de) * | 2008-02-28 | 2009-09-03 | Inficon Gmbh | Heliumsensor |
| CN101960278B (zh) * | 2008-02-28 | 2012-08-29 | 因菲康有限公司 | 氦传感器 |
| US8633704B2 (en) | 2008-02-28 | 2014-01-21 | Inficon Gmbh | Helium sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| BE630302A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
| DE1231844B (de) | 1967-01-05 |
| CH439571A (de) | 1967-07-15 |
| NL290849A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
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