CN101960278B - 氦传感器 - Google Patents
氦传感器 Download PDFInfo
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- CN101960278B CN101960278B CN2009801068070A CN200980106807A CN101960278B CN 101960278 B CN101960278 B CN 101960278B CN 2009801068070 A CN2009801068070 A CN 2009801068070A CN 200980106807 A CN200980106807 A CN 200980106807A CN 101960278 B CN101960278 B CN 101960278B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
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Abstract
氦传感器具有:壳体(10),该壳体包围检测室(11)。壳体的一侧用对于氦气可选择性透过的壁(12)封闭。在检测室(11)中存在离子吸气泵,其带有阳极(14)、阴极(15)和磁场(16)。根据本发明,阴极(15)或者阴极腿部(15a)由铍构成。铍具有小的原子量,由此更好地将同样重量轻的氦离子结合进阴极材料中。
Description
技术领域
本发明涉及一种氦传感器,具有:检测室,其具有对于测试气体可选择性透过的壁;离子吸气泵,其带有至少一个阴极和至少一个阳极,它们连接到电源上;以及磁场生成器,其产生横越检测室的磁场。
背景技术
这种氦传感器在DE 10031882A1(Leybold Vacuum GmbH)中进行了描述。检测室由玻璃构成并且对于测试气体可选择性透过的壁是硅片,该硅片设置有通孔,这些通孔分别用薄的石英膜封闭并且具有特殊的加热装置。这种气体传感器由于可选择性透过的壁的特性也称为石英窗传感器。穿过可选择性透过的壁的气体原子在检测室中被离子化并且通过电场引导至阴极并且在那里结合。
类似的气体传感器在DE 102004034381A1(Inficon GmbH)中进行了描述。
在这里讨论的类型的气体传感器的情况下,通过如下方式进行测试气体检测:在离子化的气体原子放电并且在阴极中吸收时,在电流回路中产生电流,该电流可以被检测到。基于石英窗技术的氦传感器的探测极限由于存在具有漂移和噪声形式的不稳定性的基本电流而受限。噪声通过在冷阴极系统的阴极上的吸附-脱附过程而形成,因为不能保证过去吸附的粒子被持久地抓住。根据阴极温度和入射的原子的作用,粒子也会又离开阴极并且产生基本电流的一定的不稳定性,并且因此产生噪声。漂移基本上与温度有关地通过如下方式形成:在温度改变时由于不充分的结合力在阴极材料中形成覆盖和分解的新平衡。
发明内容
本发明基于的任务是提出一种开头所述类型的具有改进的探测极限的氦传感器。
本发明的氦传感器具有:检测室,其具有对于氦气可选择性透过的壁;离子吸气泵,其带有至少一个阴极和至少一个阳极,它们连接到电源上;以及磁场生成器,其产生横越检测室的磁场。其特征在于,冷阴极系统的至少一个阴极包含铍。
在现有技术中,冷阴极系统的阴极由钛或者钽构成。钛具有48amu的原子量而钽具有181amu的原子量。氦的原子量为4amu。“amu”表示核原子质量(atomar mass unit,原子质量单位)。本发明基于如下思想:在阴极材料的高原子量的情况下,碰到阴极的轻的氦原子以高的能量作为中性粒子被反射。当将具有类似氦原子量的原子量的金属用作阴极材料时,可以实现更好地将氦原子结合进阴极中。可以比较良好地以工业方式处理的最轻的金属是具有9amu的原子量的铍。本发明提出了完全或者部分由铍制造冷阴极系统的至少一个阴极。
通过本发明,实现了不仅降低了电信号的噪声不稳定性,而且将说明氦剩余压力的基本电流降低一到两个数量级,因为明显的是所抽吸的氦原子明显更好地持久结合。通过低的基本电流也将热漂移降低相同的量,因为其按百分比与基本电流有关。
这种传感器的定义为偏移(每分钟)和噪声(峰值-峰值)之和的探测极限于是相应地被改进。
在根据本发明的氦传感器的情况下,冷阴极系统可以以潘宁(Penning)几何结构来实施或者磁控管几何结构来实施。两种几何结构都在DE 10031882A1中进行了描述,其内容通过引用结合于本说明书中。
附图说明
以下参照唯一的附图更为详细地阐述了本发明的实施例。
该图示意性地示出了石英窗氦传感器的结构。
具体实施方式
氦传感器具有由玻璃构成的壳体10,该壳体包围被排空的检测室11。壳体10形成了具有封闭的底部壁的方形或者圆柱形的本体。与底部壁对置的开口用可选择性透过的壁12封闭。壁12由石英窗膜构成,如其在DE 10031882A1中所描述的那样。壳体10的壁对于气体是不可透过的,而壁12对于测试气体(在此为氦气)是可选择性透过的。
检测室11包含离子吸气泵13。该离子吸气泵在潘宁几何结构中具有环形的阳极14和带有两个平行的阴极腿部15a、15b的阴极15。阳极14环形地构建,其中环平面平行于阴极腿部15a、15b的平面走向,阳极设置在阴极腿部之间。磁场16与该平面正交地走向,该磁场通过设置在壳体10外部的(未示出的)磁场生成器生成。在此其例如是永磁体。可替选地,该布置也可以以磁控管几何结构来实施,其中阴极(在反磁控管的情况下为阳极)棒状地设置在管的中轴线中。该管在磁控管的情况下形成阳极(在反磁控管的情况下为阴极),磁场在管中轴向地走向并且通过环形磁体在管外部以已知的方式生成。
在阳极14和阴极15之间施加大约3000V的高电压,其由电源20产生。电源20设置在壳体10外部并且通过穿过壳体壁的电流穿通引导部与阳极和阴极相连。电路包含电流测量器21,其测量阴极电流并且其测量值形成对通过壁12的氦的量的定量的尺度。
在附图中所示的离子吸气泵的几何结构是潘宁几何结构。
根据本发明,阴极15的腿部15a由铍构成。阴极的对置的腿部15b由钛或者其他重金属(例如钽)构成,如连接两个腿部15a和15b的阴极板15c那样。具有带有由铍构成的阴极的磁控管几何结构或者两个阴极腿部的实施形式也具有相同效果,如测量所显示的那样。
在氦原子进入检测室11时,氦原子被离子化并且通过电场朝着阴极15的方向加速。在此,氦离子嵌入并且结合到铍阴极的重量轻的结构中。当两个阴极腿部之一由“重”金属构成时,中性化的离子作为中性粒子被反射并且由此可以容易地侵入由“轻”金属构成的对置的阴极中并且被吸附。结果,所反射的或者未被结合的氦离子的部分被减少。由此,基本电流(通过中性化“被抽吸的”离子)被降低并且改进了噪声信号。由于降低的基本电流,该电流的漂移也相应地更小。结果是改进了探测极限,即改进了最小可探测的氦部分压力(其由漂移和噪声之和得到)。
Claims (6)
1.一种氦传感器,具有:检测室,其具有对于氦气可选择性透过的壁;离子吸气泵,其带有至少一个阴极和至少一个阳极,它们连接到电源上;以及磁场生成器,其产生横越检测室的磁场,其特征在于,至少一个阴极包含铍。
2.根据权利要求1所述的氦传感器,其特征在于,在具有两个阴极腿部的离子吸气泵的情况下,其中一个阴极腿部包含铍而另一阴极腿部包含重金属,其中在所述两个阴极腿部之间设置有阳极。
3.根据权利要求2所述的氦传感器,其特征在于,所述重金属是Ta或者Ti。
4.根据权利要求1所述的氦传感器,其特征在于,所述至少一个阴极在其朝着阳极的侧上完全由铍构成。
5.根据权利要求1所述的氦传感器,其特征在于,离子吸气泵以潘宁几何结构实施。
6.根据权利要求1所述的氦传感器,其特征在于,离子吸气泵以磁控管几何结构或者反磁控管几何结构来实施。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008011686.6 | 2008-02-28 | ||
DE102008011686A DE102008011686A1 (de) | 2008-02-28 | 2008-02-28 | Heliumsensor |
PCT/EP2009/052225 WO2009106543A1 (de) | 2008-02-28 | 2009-02-25 | Heliumsensor |
Publications (2)
Publication Number | Publication Date |
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CN101960278A CN101960278A (zh) | 2011-01-26 |
CN101960278B true CN101960278B (zh) | 2012-08-29 |
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Application Number | Title | Priority Date | Filing Date |
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CN2009801068070A Active CN101960278B (zh) | 2008-02-28 | 2009-02-25 | 氦传感器 |
Country Status (7)
Country | Link |
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US (1) | US8633704B2 (zh) |
EP (1) | EP2247932B1 (zh) |
JP (1) | JP5231580B2 (zh) |
CN (1) | CN101960278B (zh) |
AT (1) | ATE537430T1 (zh) |
DE (1) | DE102008011686A1 (zh) |
WO (1) | WO2009106543A1 (zh) |
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DK3517921T3 (da) * | 2008-09-19 | 2021-01-18 | Mks Instr Inc | Ioniseringsmåler med styring af emissionsstrøm og forspændingspotential |
GB2516801A (en) | 2012-05-24 | 2015-02-04 | Douglas H Lundy | Threat detection system and method |
DE102018101446A1 (de) | 2018-01-23 | 2018-03-08 | Agilent Technologies Inc. | Helium-selektive Membran, Verfahren zu deren Herstellung und diese enthaltender Helium-Sensor und Helium-Leck-Detektor |
DE102019103062A1 (de) | 2019-02-07 | 2019-03-21 | Agilent Technologies, Inc. - A Delaware Corporation - | Helium-selektive Membran, Verfahren zu deren Herstellung und diese enthaltender Helium-Sensor und Helium-Leck-Detektor |
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- 2009-02-25 EP EP09714850A patent/EP2247932B1/de active Active
- 2009-02-25 AT AT09714850T patent/ATE537430T1/de active
- 2009-02-25 WO PCT/EP2009/052225 patent/WO2009106543A1/de active Application Filing
- 2009-02-25 US US12/918,948 patent/US8633704B2/en active Active
- 2009-02-25 CN CN2009801068070A patent/CN101960278B/zh active Active
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Also Published As
Publication number | Publication date |
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EP2247932B1 (de) | 2011-12-14 |
CN101960278A (zh) | 2011-01-26 |
WO2009106543A1 (de) | 2009-09-03 |
EP2247932A1 (de) | 2010-11-10 |
US20110018545A1 (en) | 2011-01-27 |
DE102008011686A1 (de) | 2009-09-03 |
JP5231580B2 (ja) | 2013-07-10 |
ATE537430T1 (de) | 2011-12-15 |
JP2011514523A (ja) | 2011-05-06 |
US8633704B2 (en) | 2014-01-21 |
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