GB1031766A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- GB1031766A GB1031766A GB1147763A GB1147763A GB1031766A GB 1031766 A GB1031766 A GB 1031766A GB 1147763 A GB1147763 A GB 1147763A GB 1147763 A GB1147763 A GB 1147763A GB 1031766 A GB1031766 A GB 1031766A
- Authority
- GB
- United Kingdom
- Prior art keywords
- potential
- cathodes
- pump
- region
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
Landscapes
- Particle Accelerators (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1,031,766. Ion pumps. STANDARD TELEPHONES & CABLES Ltd. March 22, 1963 [March 29, 1962], No. 11477/63. Heading H1D. In a vacuum pump arrangement comprising an ion pump and a backing pump for scavenging gas from a low potential region of the ion pump, the ion pump has electron emissive surfaces 2 and 3 generating electrons which are accelerated and focused by anode portions 16 and 17 towards a central region in which a point 40 of minimum potential surrounded by a region of maximum potential is established. Gas entering at 26 is ionized, and ions which acquire energies sufficient to carry them over the said potential maximum pass through further positive potential electrode pairs 14 and 13 to a low potential region in a chamber 6 from which they are scavenged by a backing pump connected to outlet 27. A cold cathode of tungsten or rhenium may be used in conjunction with cathodes 2 and 3 to augment the electron current. Alternatively, the cathodes 2 and 3 may be secondary electron emissive so that a radiofrequency potential applied through a coil 37 to anode portions 16 and 17 will produce multifactor action between the cathodes 2 and 3. Electrodes 13, e.g. of platinum, are connected to a metal coating 12 in the chamber 6 if the latter is of glass or ceramic. Electrodes 14 may be bridged by a metal mesh 18. Cathodes 2 and 3 may be of stainless steel or beryllium copper which in addition to being secondary emissive will also getter any ions formed in their vicinity. Additional focusing rings 30 and 31 may be provided.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US183440A US3181028A (en) | 1962-03-29 | 1962-03-29 | Ion transport vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1031766A true GB1031766A (en) | 1966-06-02 |
Family
ID=22672800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1147763A Expired GB1031766A (en) | 1962-03-29 | 1963-03-22 | Vacuum pump |
Country Status (5)
Country | Link |
---|---|
BE (1) | BE630302A (en) |
CH (1) | CH439571A (en) |
DE (1) | DE1231844B (en) |
GB (1) | GB1031766A (en) |
NL (1) | NL290849A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009106543A1 (en) * | 2008-02-28 | 2009-09-03 | Inficon Gmbh | Helium sensor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1246669A (en) * | 1959-02-17 | 1960-11-18 | Whitehall Rand Inc | Fluid pump |
-
0
- BE BE630302D patent/BE630302A/xx unknown
- NL NL290849D patent/NL290849A/xx unknown
-
1963
- 1963-03-22 GB GB1147763A patent/GB1031766A/en not_active Expired
- 1963-03-28 DE DE1963J0023449 patent/DE1231844B/en active Pending
- 1963-03-29 CH CH401163A patent/CH439571A/en unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009106543A1 (en) * | 2008-02-28 | 2009-09-03 | Inficon Gmbh | Helium sensor |
CN101960278B (en) * | 2008-02-28 | 2012-08-29 | 因菲康有限公司 | Helium sensor |
US8633704B2 (en) | 2008-02-28 | 2014-01-21 | Inficon Gmbh | Helium sensor |
Also Published As
Publication number | Publication date |
---|---|
NL290849A (en) | |
BE630302A (en) | |
DE1231844B (en) | 1967-01-05 |
CH439571A (en) | 1967-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1060309A (en) | A source of ions or electrons | |
GB683475A (en) | Improvements in or relating to electric discharge tubes for accelerating particles | |
GB1464490A (en) | Beam-plasma type ion source | |
GB1476293A (en) | Continuous ionization injector for low pressure gas dis charge device | |
US3274436A (en) | Ion source with selective hot or cold cathode | |
GB747858A (en) | Electron gun | |
GB981743A (en) | Improvements in electron guns | |
GB1357469A (en) | Electron-beam generators for transit-time electron discharge tubes | |
GB1031766A (en) | Vacuum pump | |
GB971770A (en) | Ion source | |
GB935164A (en) | Improvements relating to methods of manufacturing electric discharge tubes | |
GB1398167A (en) | High pressure ion sources | |
GB1053215A (en) | ||
US2210816A (en) | Discharge device | |
GB1045721A (en) | Ion transport pump | |
GB1061453A (en) | Hollow gas arc discharge | |
GB629881A (en) | Improvements in electric discharge tubes comprising secondary emission electrodes | |
GB521563A (en) | Apparatus for starting an electric spark | |
GB632963A (en) | Improvements in and relating to mass spectrometers | |
US3572972A (en) | Self-starter device for penning-type ion pumps | |
JPH1064437A (en) | Ion beam generating device | |
GB1140694A (en) | Apparatus for forming electron beam | |
GB1001236A (en) | Improvements in or relating to ion getter pumps | |
Ševarac | An ion source with plasma compression | |
GB579371A (en) | Means for preventing the spreading of high density electron beams |