GB1001236A - Improvements in or relating to ion getter pumps - Google Patents

Improvements in or relating to ion getter pumps

Info

Publication number
GB1001236A
GB1001236A GB1261262A GB1261262A GB1001236A GB 1001236 A GB1001236 A GB 1001236A GB 1261262 A GB1261262 A GB 1261262A GB 1261262 A GB1261262 A GB 1261262A GB 1001236 A GB1001236 A GB 1001236A
Authority
GB
United Kingdom
Prior art keywords
getter
electrodes
discharge
ion
april
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1261262A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Holding AG
Original Assignee
Leybold Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Holding AG filed Critical Leybold Holding AG
Publication of GB1001236A publication Critical patent/GB1001236A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Abstract

1,001,236. Ion-getter pumps. LEYBOLD HOLDING A.G. April 2, 1962 [April 1, 1961], No. 12612/62. Heading H1D. An ion-getter pump in which a cold cathode discharge between parts of anode and cathode surfaces causes sputtering of the electrode surfaces and deposition of the sputtered getter on a collecting surface comprises means for creating an alternating electric field which is substantially the field necessary to stabilize the electrons in closed orbits. In one form, a multi-pole field is generated by a high-frequency voltage, the electrode arrangement being preferably cylindrically or spherically symmetrical. Electrodes 3, 4 have hyperboloid surfaces, and the gap between them is at least partly concentrically surrounded by a surface 5 defined by a body of revolution generated by a rotating hyperbola, all the electrodes having apertures 25 through which gas ions pass to be collected upon getter surfaces 8 formed on the inside of the vacuum envelope by sputtering. To initiate the discharge, a supplementary system for cold cathode discharge (Penning magnetron) or a glow discharge cathode and a radio-active source may be provided. A secondary emissive coating may be provided on one of the electrodes.
GB1261262A 1961-04-01 1962-04-02 Improvements in or relating to ion getter pumps Expired GB1001236A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0003823 1961-04-01

Publications (1)

Publication Number Publication Date
GB1001236A true GB1001236A (en) 1965-08-11

Family

ID=7256334

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1261262A Expired GB1001236A (en) 1961-04-01 1962-04-02 Improvements in or relating to ion getter pumps

Country Status (1)

Country Link
GB (1) GB1001236A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2586971A (en) * 2019-09-06 2021-03-17 Edwards Vacuum Llc Reducing plasma formation in an ion pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2586971A (en) * 2019-09-06 2021-03-17 Edwards Vacuum Llc Reducing plasma formation in an ion pump
GB2586971B (en) * 2019-09-06 2023-11-01 Edwards Vacuum Llc Reducing plasma formation in an ion pump

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