GB1025674A - Electrostatic immersion objective lens - Google Patents

Electrostatic immersion objective lens

Info

Publication number
GB1025674A
GB1025674A GB42812/62A GB4281262A GB1025674A GB 1025674 A GB1025674 A GB 1025674A GB 42812/62 A GB42812/62 A GB 42812/62A GB 4281262 A GB4281262 A GB 4281262A GB 1025674 A GB1025674 A GB 1025674A
Authority
GB
United Kingdom
Prior art keywords
electrode
bore
cathode
anode
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB42812/62A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trub Tauber and Co AG
Original Assignee
Trub Tauber and Co AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trub Tauber and Co AG filed Critical Trub Tauber and Co AG
Publication of GB1025674A publication Critical patent/GB1025674A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
GB42812/62A 1961-11-22 1962-11-13 Electrostatic immersion objective lens Expired GB1025674A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1359961A CH391128A (de) 1961-11-22 1961-11-22 Elektrostatisches Immersionsobjektiv

Publications (1)

Publication Number Publication Date
GB1025674A true GB1025674A (en) 1966-04-14

Family

ID=4393764

Family Applications (1)

Application Number Title Priority Date Filing Date
GB42812/62A Expired GB1025674A (en) 1961-11-22 1962-11-13 Electrostatic immersion objective lens

Country Status (5)

Country Link
US (1) US3201588A (de)
CH (1) CH391128A (de)
DE (1) DE1188742B (de)
FR (1) FR1339891A (de)
GB (1) GB1025674A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248727A (en) * 1990-07-27 1992-04-15 Marconi Gec Ltd Ion thruster vector control.

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2842527C3 (de) * 1978-09-29 1981-12-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Elektrostatische Emissionslinse

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2410658A (en) * 1943-07-16 1946-11-05 Rca Corp Limiting aperture for electron image devices
US2536878A (en) * 1948-12-03 1951-01-02 Farrand Optical Co Inc Electron lens
US2759117A (en) * 1952-05-16 1956-08-14 Farrand Optical Co Inc Electron lens
US2814729A (en) * 1956-10-01 1957-11-26 Gen Electric X-ray microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248727A (en) * 1990-07-27 1992-04-15 Marconi Gec Ltd Ion thruster vector control.

Also Published As

Publication number Publication date
DE1188742B (de) 1965-03-11
FR1339891A (fr) 1963-10-11
US3201588A (en) 1965-08-17
CH391128A (de) 1965-04-30

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