CH391128A - Elektrostatisches Immersionsobjektiv - Google Patents

Elektrostatisches Immersionsobjektiv

Info

Publication number
CH391128A
CH391128A CH1359961A CH1359961A CH391128A CH 391128 A CH391128 A CH 391128A CH 1359961 A CH1359961 A CH 1359961A CH 1359961 A CH1359961 A CH 1359961A CH 391128 A CH391128 A CH 391128A
Authority
CH
Switzerland
Prior art keywords
immersion lens
electrostatic immersion
electrostatic
lens
immersion
Prior art date
Application number
CH1359961A
Other languages
English (en)
Inventor
Heinrich Dr Dueker
Original Assignee
Trueb Taeuber & Co Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trueb Taeuber & Co Ag filed Critical Trueb Taeuber & Co Ag
Priority to CH1359961A priority Critical patent/CH391128A/de
Priority to DET22969A priority patent/DE1188742B/de
Priority to GB42812/62A priority patent/GB1025674A/en
Priority to US238239A priority patent/US3201588A/en
Priority to FR916135A priority patent/FR1339891A/fr
Publication of CH391128A publication Critical patent/CH391128A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
CH1359961A 1961-11-22 1961-11-22 Elektrostatisches Immersionsobjektiv CH391128A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1359961A CH391128A (de) 1961-11-22 1961-11-22 Elektrostatisches Immersionsobjektiv
DET22969A DE1188742B (de) 1961-11-22 1962-11-05 Elektrostatisches Immersions-Objektiv fuer ein Emissionsmikroskop
GB42812/62A GB1025674A (en) 1961-11-22 1962-11-13 Electrostatic immersion objective lens
US238239A US3201588A (en) 1961-11-22 1962-11-16 Electrostatic immersion objective comprising an improved intermediate electrode
FR916135A FR1339891A (fr) 1961-11-22 1962-11-21 Objectif électrostatique à immersion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1359961A CH391128A (de) 1961-11-22 1961-11-22 Elektrostatisches Immersionsobjektiv

Publications (1)

Publication Number Publication Date
CH391128A true CH391128A (de) 1965-04-30

Family

ID=4393764

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1359961A CH391128A (de) 1961-11-22 1961-11-22 Elektrostatisches Immersionsobjektiv

Country Status (5)

Country Link
US (1) US3201588A (de)
CH (1) CH391128A (de)
DE (1) DE1188742B (de)
FR (1) FR1339891A (de)
GB (1) GB1025674A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2842527C3 (de) * 1978-09-29 1981-12-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Elektrostatische Emissionslinse
GB9016567D0 (en) * 1990-07-27 1990-09-12 Marconi Space Systems Limited Ion thruster vector control

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2410658A (en) * 1943-07-16 1946-11-05 Rca Corp Limiting aperture for electron image devices
US2536878A (en) * 1948-12-03 1951-01-02 Farrand Optical Co Inc Electron lens
US2759117A (en) * 1952-05-16 1956-08-14 Farrand Optical Co Inc Electron lens
US2814729A (en) * 1956-10-01 1957-11-26 Gen Electric X-ray microscope

Also Published As

Publication number Publication date
DE1188742B (de) 1965-03-11
FR1339891A (fr) 1963-10-11
GB1025674A (en) 1966-04-14
US3201588A (en) 1965-08-17

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