FR3112894B1 - Procédé de formation d’une tranchée capacitive d’isolation et substrat comprenant une telle tranchée - Google Patents
Procédé de formation d’une tranchée capacitive d’isolation et substrat comprenant une telle tranchée Download PDFInfo
- Publication number
- FR3112894B1 FR3112894B1 FR2007905A FR2007905A FR3112894B1 FR 3112894 B1 FR3112894 B1 FR 3112894B1 FR 2007905 A FR2007905 A FR 2007905A FR 2007905 A FR2007905 A FR 2007905A FR 3112894 B1 FR3112894 B1 FR 3112894B1
- Authority
- FR
- France
- Prior art keywords
- trench
- forming
- substrate
- depositing
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000009413 insulation Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 238000000151 deposition Methods 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 239000012777 electrically insulating material Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Element Separation (AREA)
- Drying Of Semiconductors (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Le texte concerne un procédé de formation d’une tranchée d’isolation capacitive dans un substrat semi-conducteur, comprenant les étapes successives suivantes :- le creusement d’une tranchée (10) à partir d’une surface principale du substrat (1), ladite tranchée comprenant une portion supérieure (10a) s’élargissant progressivement à partir d’un col (102) en direction d’une portion inférieure (10b) de la tranchée ;- la formation d’un revêtement en un premier matériau électriquement isolant (14) sur les parois de la tranchée ;- le dépôt d’un premier matériau semi-conducteur (15) sur ledit revêtement, ledit dépôt étant interrompu de sorte à ménager un espace libre entre les parois (100, 101) de la tranchée, ledit espace libre présentant une ouverture (150) au niveau du col (102) ;- le dépôt d’un second matériau électriquement isolant (16) dans la tranchée, ledit dépôt résultant en la formation d’un bouchon (160) obturant ladite ouverture (150) pour former une cavité (17) fermée ;- la gravure du bouchon (16) de sorte à ouvrir la cavité (17) ;- le dépôt d’un second matériau semi-conducteur ou d’un métal de sorte à remplir la cavité (17). Figure pour l’abrégé : Fig 2I
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2007905A FR3112894B1 (fr) | 2020-07-27 | 2020-07-27 | Procédé de formation d’une tranchée capacitive d’isolation et substrat comprenant une telle tranchée |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2007905A FR3112894B1 (fr) | 2020-07-27 | 2020-07-27 | Procédé de formation d’une tranchée capacitive d’isolation et substrat comprenant une telle tranchée |
FR2007905 | 2020-07-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3112894A1 FR3112894A1 (fr) | 2022-01-28 |
FR3112894B1 true FR3112894B1 (fr) | 2023-04-21 |
Family
ID=72885785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2007905A Active FR3112894B1 (fr) | 2020-07-27 | 2020-07-27 | Procédé de formation d’une tranchée capacitive d’isolation et substrat comprenant une telle tranchée |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3112894B1 (fr) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2826179A1 (fr) * | 2001-06-14 | 2002-12-20 | St Microelectronics Sa | Tranchee d'isolement profonde et procede de realisation |
KR102209097B1 (ko) * | 2014-02-27 | 2021-01-28 | 삼성전자주식회사 | 이미지 센서 및 이의 제조 방법 |
KR102318197B1 (ko) * | 2014-09-22 | 2021-10-26 | 삼성전자주식회사 | 씨모스 이미지 센서의 픽셀 및 이를 포함하는 이미지 센서 |
FR3026891A1 (fr) * | 2014-10-06 | 2016-04-08 | St Microelectronics Crolles 2 Sas | Dispositif d'imagerie integre a illumination face arriere avec routage d'interconnexion simplifie |
US11302734B2 (en) * | 2018-06-29 | 2022-04-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Deep trench isolation structures resistant to cracking |
-
2020
- 2020-07-27 FR FR2007905A patent/FR3112894B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
FR3112894A1 (fr) | 2022-01-28 |
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Legal Events
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20220128 |
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PLFP | Fee payment |
Year of fee payment: 3 |
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PLFP | Fee payment |
Year of fee payment: 4 |