FR3098341B1 - Generateur pulse de particules chargees electriquement et procede d’utilisation d’un generateur pulse de particules chargees electriquement - Google Patents

Generateur pulse de particules chargees electriquement et procede d’utilisation d’un generateur pulse de particules chargees electriquement Download PDF

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Publication number
FR3098341B1
FR3098341B1 FR1907324A FR1907324A FR3098341B1 FR 3098341 B1 FR3098341 B1 FR 3098341B1 FR 1907324 A FR1907324 A FR 1907324A FR 1907324 A FR1907324 A FR 1907324A FR 3098341 B1 FR3098341 B1 FR 3098341B1
Authority
FR
France
Prior art keywords
charged particles
electrically charged
generator
photocathode
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1907324A
Other languages
English (en)
French (fr)
Other versions
FR3098341A1 (fr
Inventor
Marie Geleoc
Jean-Philippe Renault
Thomas Oksenhendler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1907324A priority Critical patent/FR3098341B1/fr
Priority to US17/623,941 priority patent/US12278082B2/en
Priority to EP20734958.0A priority patent/EP3994714A1/fr
Priority to JP2021578031A priority patent/JP2022539216A/ja
Priority to CA3145386A priority patent/CA3145386A1/fr
Priority to PCT/EP2020/068427 priority patent/WO2021001383A1/fr
Publication of FR3098341A1 publication Critical patent/FR3098341A1/fr
Application granted granted Critical
Publication of FR3098341B1 publication Critical patent/FR3098341B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2203/00—Electron or ion optical arrangements common to discharge tubes or lamps
    • H01J2203/02—Electron guns
    • H01J2203/0204—Electron guns using cold cathodes, e.g. field emission cathodes
    • H01J2203/0292—Potentials applied to the electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2203/00—Electron or ion optical arrangements common to discharge tubes or lamps
    • H01J2203/04—Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H01J2237/062—Reducing size of gun
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06333—Photo emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Secondary Cells (AREA)
FR1907324A 2019-07-02 2019-07-02 Generateur pulse de particules chargees electriquement et procede d’utilisation d’un generateur pulse de particules chargees electriquement Active FR3098341B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1907324A FR3098341B1 (fr) 2019-07-02 2019-07-02 Generateur pulse de particules chargees electriquement et procede d’utilisation d’un generateur pulse de particules chargees electriquement
US17/623,941 US12278082B2 (en) 2019-07-02 2020-06-30 Pulsed generator of electrically charged particles and method for using a pulsed generator of electrically charged particles
EP20734958.0A EP3994714A1 (fr) 2019-07-02 2020-06-30 Generateur pulse de particules chargees electriquement et procede d'utilisation d'un generateur pulse de particules chargees electriquement
JP2021578031A JP2022539216A (ja) 2019-07-02 2020-06-30 荷電粒子のパルス発生器および荷電粒子のパルス発生器を使用するための方法
CA3145386A CA3145386A1 (fr) 2019-07-02 2020-06-30 Generateur pulse de particules chargees electriquement et procede d'utilisation d'un generateur pulse de particules chargees electriquement
PCT/EP2020/068427 WO2021001383A1 (fr) 2019-07-02 2020-06-30 Generateur pulse de particules chargees electriquement et procede d'utilisation d'un generateur pulse de particules chargees electriquement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1907324A FR3098341B1 (fr) 2019-07-02 2019-07-02 Generateur pulse de particules chargees electriquement et procede d’utilisation d’un generateur pulse de particules chargees electriquement
FR1907324 2019-07-02

Publications (2)

Publication Number Publication Date
FR3098341A1 FR3098341A1 (fr) 2021-01-08
FR3098341B1 true FR3098341B1 (fr) 2025-04-11

Family

ID=69375384

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1907324A Active FR3098341B1 (fr) 2019-07-02 2019-07-02 Generateur pulse de particules chargees electriquement et procede d’utilisation d’un generateur pulse de particules chargees electriquement

Country Status (6)

Country Link
US (1) US12278082B2 (https=)
EP (1) EP3994714A1 (https=)
JP (1) JP2022539216A (https=)
CA (1) CA3145386A1 (https=)
FR (1) FR3098341B1 (https=)
WO (1) WO2021001383A1 (https=)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2075379A (en) 1935-03-13 1937-03-30 Farnsworth Television Inc Time delay oscillator
JPS5842136A (ja) 1981-09-08 1983-03-11 Nec Corp 電子ビ−ム発生装置
US4703228A (en) * 1985-08-28 1987-10-27 Ga Technologies Inc. Apparatus and method for providing a modulated electron beam
JP2954963B2 (ja) 1990-02-16 1999-09-27 浜松ホトニクス株式会社 光電面利用電子源装置
JPH05128990A (ja) 1991-11-05 1993-05-25 Hitachi Ltd 荷電粒子銃
JPH06231724A (ja) * 1993-02-02 1994-08-19 Nissin Electric Co Ltd イオン注入装置
JPH09161660A (ja) * 1995-12-06 1997-06-20 Hitachi Ltd 電子線源および電子線装置
DE19627621C2 (de) 1996-07-09 1998-05-20 Bruker Saxonia Analytik Gmbh Ionenmobilitätsspektrometer
DE10245052A1 (de) 2002-09-26 2004-04-08 Leo Elektronenmikroskopie Gmbh Elektronenstrahlquelle und elektronenoptischer Apparat mit einer solchen
US8203120B2 (en) 2008-10-09 2012-06-19 California Institute Of Technology 4D imaging in an ultrafast electron microscope
JP6192097B2 (ja) * 2013-05-31 2017-09-06 国立研究開発法人物質・材料研究機構 フォトカソード型電子線源、その作成方法及びフォトカソード型電子線源システム
JP6401600B2 (ja) 2014-12-18 2018-10-10 浜松ホトニクス株式会社 ストリーク管及びそれを含むストリーク装置
JP2017130334A (ja) * 2016-01-20 2017-07-27 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置及び荷電粒子ビーム装置の画像形成方法
CN107449792B (zh) 2017-08-30 2023-05-26 中国科学院西安光学精密机械研究所 一种超紧凑型飞秒电子衍射装置
JP6500143B2 (ja) 2018-03-23 2019-04-10 株式会社日立ハイテクノロジーズ 試料観察方法

Also Published As

Publication number Publication date
JP2022539216A (ja) 2022-09-07
FR3098341A1 (fr) 2021-01-08
EP3994714A1 (fr) 2022-05-11
CA3145386A1 (fr) 2021-01-07
US20220367139A1 (en) 2022-11-17
WO2021001383A1 (fr) 2021-01-07
US12278082B2 (en) 2025-04-15

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