FR3061548B1 - Dispositif de mesure de degres de dissociation de gaz comprenant un spectrometre optique - Google Patents

Dispositif de mesure de degres de dissociation de gaz comprenant un spectrometre optique Download PDF

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Publication number
FR3061548B1
FR3061548B1 FR1760907A FR1760907A FR3061548B1 FR 3061548 B1 FR3061548 B1 FR 3061548B1 FR 1760907 A FR1760907 A FR 1760907A FR 1760907 A FR1760907 A FR 1760907A FR 3061548 B1 FR3061548 B1 FR 3061548B1
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gas
dissociation
gas path
measuring
optical
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FR3061548A1 (fr
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Jui-Pao Pan
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FAIRTECH CORP
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FAIRTECH CORP
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene
    • H01J37/32862—In situ cleaning of vessels and/or internal parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32972—Spectral analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N2021/258—Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • G01N2021/8416—Application to online plant, process monitoring and process controlling, not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

DISPOSITIF DE MESURE DE DEGRES DE DISSOCIATION DE GAZ COMPRENANT UN SPECTROMETRE OPTIQUE Ce dispositif comprend : un chemin principal de gaz (1) pour mettre en œuvre les processus de dépôt assisté par plasma, de gravure de membrane et de modification de surface de matériau afin d'obtenir des fonctions et des effets spéciaux dans la fabrication de circuits intégrés à semi-conducteurs ; un deuxième chemin de gaz (6) relié au chemin principal de gaz (1) pour stocker du gaz réactif (A) ; un organe de détection (8) et un dispositif optique (9) de mesure de dissociation de gaz plasmatique par spectre optique disposé entre le chemin principal de gaz (1) et le deuxième chemin de gaz (6), l'organe de détection (8) détectant un degré de dissociation de gaz dans un corps de tube (7) et le dispositif (9) de mesure de dissociation de gaz plasmatique par spectre optique calcule une valeur relative de quantité de dissociation. Figure pour l’abrégé : figure 4
FR1760907A 2017-01-05 2017-11-20 Dispositif de mesure de degres de dissociation de gaz comprenant un spectrometre optique Active FR3061548B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW106100285 2017-01-05
TW106100285A TWI636253B (zh) 2017-01-05 2017-01-05 一種應用光譜儀來量測氣體解離狀態的量測裝置

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FR3061548A1 FR3061548A1 (fr) 2018-07-06
FR3061548B1 true FR3061548B1 (fr) 2022-03-25

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US (1) US10204840B2 (fr)
JP (2) JP6601779B2 (fr)
KR (1) KR102088084B1 (fr)
CN (2) CN107290287B (fr)
DE (1) DE102017129785B4 (fr)
FR (1) FR3061548B1 (fr)
GB (1) GB2559245B (fr)
SG (1) SG10201706295QA (fr)
TW (1) TWI636253B (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI636253B (zh) * 2017-01-05 2018-09-21 富蘭登科技股份有限公司 一種應用光譜儀來量測氣體解離狀態的量測裝置
TWI792161B (zh) * 2021-01-26 2023-02-11 富蘭登科技股份有限公司 以光譜量測物質的物理狀態之裝置及其方法

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Also Published As

Publication number Publication date
FR3061548A1 (fr) 2018-07-06
GB2559245B (en) 2020-05-20
KR102088084B1 (ko) 2020-03-12
JP3213290U (ja) 2017-11-02
CN107290287A (zh) 2017-10-24
TW201825893A (zh) 2018-07-16
CN107290287B (zh) 2019-09-24
US20180190548A1 (en) 2018-07-05
DE102017129785B4 (de) 2023-03-16
JP2018109598A (ja) 2018-07-12
SG10201706295QA (en) 2018-08-30
US10204840B2 (en) 2019-02-12
JP6601779B2 (ja) 2019-11-06
GB2559245A (en) 2018-08-01
GB201719832D0 (en) 2018-01-10
CN207300868U (zh) 2018-05-01
DE102017129785A1 (de) 2018-07-05
TWI636253B (zh) 2018-09-21

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