SG10201706295QA - A Method and A Device for Measuring Gas Dissociation Degrees with an Optical Spectrometer - Google Patents

A Method and A Device for Measuring Gas Dissociation Degrees with an Optical Spectrometer

Info

Publication number
SG10201706295QA
SG10201706295QA SG10201706295QA SG10201706295QA SG10201706295QA SG 10201706295Q A SG10201706295Q A SG 10201706295QA SG 10201706295Q A SG10201706295Q A SG 10201706295QA SG 10201706295Q A SG10201706295Q A SG 10201706295QA SG 10201706295Q A SG10201706295Q A SG 10201706295QA
Authority
SG
Singapore
Prior art keywords
present application
gas dissociation
degrees
industries
measuring gas
Prior art date
Application number
SG10201706295QA
Inventor
Jui-Pao Pan
Original Assignee
Fairtech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairtech Corp filed Critical Fairtech Corp
Publication of SG10201706295QA publication Critical patent/SG10201706295QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene
    • H01J37/32862—In situ cleaning of vessels and/or internal parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32972—Spectral analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N2021/258—Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • G01N2021/8416—Application to online plant, process monitoring and process controlling, not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Abstract

P00353C01 FRT-SGI 2 15 A METHOD AND A DEVICE FOR MEASURING GAS DISSOCIATION DEGREES WITH AN OPTICAL SPECTROMETER 5 A primary objective of the present application is to provide a method and a device for measuring gas dissociation degrees. The principle of the present application is to detect the gas dissociation degree in a tube body and to calculate the relative dissociation quantity value by means of a device according to the present application. When the contamination value in a primary path. 10 The present application may be applied to any device and/or any apparatus that requires measuring of gas dissociation degrees, including but not limited to physical vapor deposition device, chemical vapor deposition device, etching device and any other relevant device in the semiconductor, photoelectric, panel industries and any 15 other relevant industry. The present application may also be directly disposed in a remote plasma source device. Further, the present application may be applied in any inspection examination device in the biotechnology, chemistry, applied physics industries and any other relevant industry. Still further, the present application may be applied to any inspection apparatus or testing platform in the equipment maintenance 20 industry for any of the foregoing industries. [Figure 3]
SG10201706295QA 2017-01-05 2017-08-02 A Method and A Device for Measuring Gas Dissociation Degrees with an Optical Spectrometer SG10201706295QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW106100285A TWI636253B (en) 2017-01-05 2017-01-05 Measuring device using spectrometer to measure gas dissociation state
JP2017141027A JP6601779B2 (en) 2017-01-05 2017-07-20 Method and apparatus for measuring gas dissociation state using a spectrometer

Publications (1)

Publication Number Publication Date
SG10201706295QA true SG10201706295QA (en) 2018-08-30

Family

ID=60094642

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201706295QA SG10201706295QA (en) 2017-01-05 2017-08-02 A Method and A Device for Measuring Gas Dissociation Degrees with an Optical Spectrometer

Country Status (9)

Country Link
US (1) US10204840B2 (en)
JP (2) JP6601779B2 (en)
KR (1) KR102088084B1 (en)
CN (2) CN207300868U (en)
DE (1) DE102017129785B4 (en)
FR (1) FR3061548B1 (en)
GB (1) GB2559245B (en)
SG (1) SG10201706295QA (en)
TW (1) TWI636253B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI636253B (en) * 2017-01-05 2018-09-21 富蘭登科技股份有限公司 Measuring device using spectrometer to measure gas dissociation state
TWI792161B (en) * 2021-01-26 2023-02-11 富蘭登科技股份有限公司 Apparatus and method for measuring physical state of matter by spectroscopy

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Also Published As

Publication number Publication date
JP6601779B2 (en) 2019-11-06
TW201825893A (en) 2018-07-16
DE102017129785B4 (en) 2023-03-16
GB2559245B (en) 2020-05-20
FR3061548B1 (en) 2022-03-25
GB2559245A (en) 2018-08-01
DE102017129785A1 (en) 2018-07-05
GB201719832D0 (en) 2018-01-10
FR3061548A1 (en) 2018-07-06
JP2018109598A (en) 2018-07-12
US10204840B2 (en) 2019-02-12
CN107290287A (en) 2017-10-24
CN107290287B (en) 2019-09-24
US20180190548A1 (en) 2018-07-05
JP3213290U (en) 2017-11-02
TWI636253B (en) 2018-09-21
CN207300868U (en) 2018-05-01
KR102088084B1 (en) 2020-03-12

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