FR3029685B1 - Procede d’installation d’un joint elastomere dans un equipement de traitement de semi-conducteur et feuille de guidage et gabarit utilises dans l’installation d’un joint elastomere - Google Patents

Procede d’installation d’un joint elastomere dans un equipement de traitement de semi-conducteur et feuille de guidage et gabarit utilises dans l’installation d’un joint elastomere Download PDF

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Publication number
FR3029685B1
FR3029685B1 FR1561947A FR1561947A FR3029685B1 FR 3029685 B1 FR3029685 B1 FR 3029685B1 FR 1561947 A FR1561947 A FR 1561947A FR 1561947 A FR1561947 A FR 1561947A FR 3029685 B1 FR3029685 B1 FR 3029685B1
Authority
FR
France
Prior art keywords
elastomeric seal
elastomeric joint
processing equipment
semiconductor processing
installing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1561947A
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English (en)
Other versions
FR3029685A1 (fr
Inventor
Yo-Yu CHANG
Chun-Yao Huang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MFC Sealing Technology Co Ltd
Original Assignee
MFC Sealing Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MFC Sealing Technology Co Ltd filed Critical MFC Sealing Technology Co Ltd
Publication of FR3029685A1 publication Critical patent/FR3029685A1/fr
Application granted granted Critical
Publication of FR3029685B1 publication Critical patent/FR3029685B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32807—Construction (includes replacing parts of the apparatus)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
    • B25B27/0028—Tools for removing or installing seals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
    • B25B27/0092—Tools moving along strips, e.g. decorating or sealing strips, to insert them in, or remove them from, grooves or profiles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B27/00—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for
    • B25B27/02—Hand tools, specially adapted for fitting together or separating parts or objects whether or not involving some deformation, not otherwise provided for for connecting objects by press fit or detaching same
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Automatic Assembly (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Gasket Seals (AREA)
  • Credit Cards Or The Like (AREA)
  • Weting (AREA)

Abstract

L'invention concerne un procédé, une feuille de guidage (40), un gabarit de remplissage partiel (50) et un gabarit de remplissage complet (70) pour installer un joint élastomère (30) dans un équipement de traitement de semi-conducteur. Ils permettent de disposer le joint élastomère (30) dans la rainure (221) dudit équipement sans difficultés et de façon uniforme. En outre, la surface du joint élastomère (30) peut être divisée en de multiples parties d'arcs, chacune pouvant être pressée avec un gabarit (50, 70) suivant une séquence particulière. Lorsque la rainure (221) est remplie par le joint élastomère (30) de manière précise et complète, le joint élastomère (30) peut bloquer le fluide et le gaz de gravure de manière efficace. Le joint élastomère peut aider l'équipement de traitement de semi-conducteur à fonctionner de manière continue et maintenir les qualités des tranches de gravure.
FR1561947A 2014-12-09 2015-12-07 Procede d’installation d’un joint elastomere dans un equipement de traitement de semi-conducteur et feuille de guidage et gabarit utilises dans l’installation d’un joint elastomere Active FR3029685B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
TW103142914 2014-12-09
TW103142914 2014-12-09
TW104126947A TWI553149B (zh) 2014-12-09 2015-08-19 The installation method of O-ring for semiconductor process equipment and the guide and fixture used in its installation
TW104126947 2015-08-19

Publications (2)

Publication Number Publication Date
FR3029685A1 FR3029685A1 (fr) 2016-06-10
FR3029685B1 true FR3029685B1 (fr) 2019-05-17

Family

ID=55974297

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1561947A Active FR3029685B1 (fr) 2014-12-09 2015-12-07 Procede d’installation d’un joint elastomere dans un equipement de traitement de semi-conducteur et feuille de guidage et gabarit utilises dans l’installation d’un joint elastomere

Country Status (7)

Country Link
US (1) US10153140B2 (fr)
JP (1) JP6180493B2 (fr)
CN (1) CN105666403B (fr)
DE (1) DE102015120198B4 (fr)
FR (1) FR3029685B1 (fr)
SG (1) SG10201509974QA (fr)
TW (1) TWI553149B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108747952B (zh) * 2018-07-19 2023-10-20 济南市半导体元件实验所 一种用于贴片稳压二极管中的玻壳的装填装置及装填方法
CN108942787A (zh) * 2018-09-30 2018-12-07 上海索达传动机械有限公司 一种变速箱主轴压盖安装工装
DE102020216176A1 (de) * 2020-12-17 2022-06-23 Mahle International Gmbh Verfahren zur Montage einer Welle, insbesondere einer Nockenwelle, in einer Lagergasse einer Brennkraftmaschine

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817709Y2 (ja) * 1979-01-11 1983-04-11 シチズン時計株式会社 可撓性リングを外嵌する装置
JPS5946679U (ja) * 1982-09-20 1984-03-28 昭和電線電纜株式会社 環状パツキング装着具
JPH0711866Y2 (ja) * 1989-03-30 1995-03-22 岩井機械工業株式会社 プレート式熱交換器用熱交換板に対するガスケットの装着装置
JPH0329269U (fr) * 1989-07-28 1991-03-22
JP3702917B2 (ja) * 1996-04-05 2005-10-05 トヨタ自動車株式会社 リング組付方法及び装置
US6845984B2 (en) * 2000-11-27 2005-01-25 Michael Doyle Keeper for positioning ring seals
US6526640B1 (en) * 2001-09-17 2003-03-04 Taiwan Semiconductor Manufacturing Co., Ltd Tool for installing seal ring
US7043811B2 (en) * 2004-03-22 2006-05-16 General Electric Company Method of removing studs
DE102006004459B3 (de) 2006-01-30 2007-06-21 Fleissner Gmbh Vorrichtung zum Montieren einer länglichen Dichtung oder eines O-Rings in ein Aufnahmeteil eines Düsenbalkens
DE202006010534U1 (de) * 2006-07-07 2006-09-07 Lehnhoff Hartstahl Gmbh & Co. Kg Aufnahme für zumindest einen Dichtring
JP2010076037A (ja) * 2008-09-25 2010-04-08 Toyota Motor Corp Ｏリング取付け装置およびｏリング取付け方法
TWI503920B (zh) 2009-03-19 2015-10-11 Taiwan Semiconductor Mfg Co Ltd 半導體製程設備及其ｏ形環
CN101840849A (zh) * 2009-03-19 2010-09-22 台湾积体电路制造股份有限公司 半导体工艺设备及其o形环
US9074686B2 (en) 2010-12-06 2015-07-07 Microflex Technologies Llc Ring seal retainer assembly and methods
JP2013151953A (ja) * 2012-01-24 2013-08-08 Nok Corp リング状ワークの組付け方法及び組付け治具
US20140290020A1 (en) * 2014-06-18 2014-10-02 Caterpillar Inc. Ring seal installation tool

Also Published As

Publication number Publication date
DE102015120198B4 (de) 2020-08-13
CN105666403B (zh) 2017-08-11
CN105666403A (zh) 2016-06-15
TW201621082A (zh) 2016-06-16
TWI553149B (zh) 2016-10-11
FR3029685A1 (fr) 2016-06-10
US10153140B2 (en) 2018-12-11
JP2016107399A (ja) 2016-06-20
DE102015120198A1 (de) 2016-06-09
SG10201509974QA (en) 2016-07-28
JP6180493B2 (ja) 2017-08-16
US20160163518A1 (en) 2016-06-09

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