FR3010413B1 - Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs - Google Patents
Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocsInfo
- Publication number
- FR3010413B1 FR3010413B1 FR1451491A FR1451491A FR3010413B1 FR 3010413 B1 FR3010413 B1 FR 3010413B1 FR 1451491 A FR1451491 A FR 1451491A FR 1451491 A FR1451491 A FR 1451491A FR 3010413 B1 FR3010413 B1 FR 3010413B1
- Authority
- FR
- France
- Prior art keywords
- nano
- mixture
- period
- controlling
- block copolymers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229920001400 block copolymer Polymers 0.000 title 1
- 239000000203 mixture Substances 0.000 title 1
- 239000002086 nanomaterial Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/007—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/003—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor characterised by the choice of material
- B29C39/006—Monomers or prepolymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2025/00—Use of polymers of vinyl-aromatic compounds or derivatives thereof as moulding material
- B29K2025/04—Polymers of styrene
- B29K2025/08—Copolymers of styrene, e.g. AS or SAN, i.e. acrylonitrile styrene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
- B29K2033/04—Polymers of esters
- B29K2033/12—Polymers of methacrylic acid esters, e.g. PMMA, i.e. polymethylmethacrylate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2096/00—Use of specified macromolecular materials not provided for in a single one of main groups B29K2001/00 - B29K2095/00, as moulding material
- B29K2096/04—Block polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/0085—Copolymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0037—Other properties
- B29K2995/0088—Molecular weight
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2007/00—Flat articles, e.g. films or sheets
- B29L2007/008—Wide strips, e.g. films, webs
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Graft Or Block Polymers (AREA)
Priority Applications (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1451491A FR3010413B1 (fr) | 2013-09-09 | 2014-02-25 | Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs |
EP14183681.7A EP2845887B1 (fr) | 2013-09-09 | 2014-09-05 | Procédé de contrôle de la période d'un assemblage nanostructuré comprenant un mélange de copolymères à blocs |
CN201480049611.3A CN105722927B (zh) | 2013-09-09 | 2014-09-05 | 用于控制包括嵌段共聚物的共混物的纳米结构化组合体的周期的方法 |
SG11201601694XA SG11201601694XA (en) | 2013-09-09 | 2014-09-05 | Process for controlling the period of a nanostructured assemblage comprising a blend of block copolymers |
PCT/EP2014/068928 WO2015032890A1 (fr) | 2013-09-09 | 2014-09-05 | Procédé pour contrôler la période d'un assemblage nanostructuré comprenant un mélange de copolymères séquencés |
ES14183681T ES2894835T3 (es) | 2013-09-09 | 2014-09-05 | Procedimiento para controlar el periodo de un ensamblaje nanoestructurado que comprende una mezcla de copolímeros de bloques |
JP2014181964A JP6419494B2 (ja) | 2013-09-09 | 2014-09-08 | ブロックコポリマーのブレンドを含むナノ構造化組織体の周期を制御する方法 |
US14/481,410 US20150073096A1 (en) | 2013-09-09 | 2014-09-09 | Process for controlling the period of a nanostructured assemblage comprising a blend of block copolymers |
TW103131001A TWI622610B (zh) | 2013-09-09 | 2014-09-09 | 控制含嵌段共聚物摻合物之奈米結構化組合體的周期之方法 |
KR20140120324A KR20150029600A (ko) | 2013-09-09 | 2014-09-11 | 블록 공중합체의 혼련물을 포함하는 나노구조의 집합체의 간격 조절 방법 |
KR1020160057779A KR20160058738A (ko) | 2013-09-09 | 2016-05-11 | 블록 공중합체의 혼련물을 포함하는 나노구조의 집합체의 간격 조절 방법 |
JP2017212869A JP2018066005A (ja) | 2013-09-09 | 2017-11-02 | ブロックコポリマーのブレンドを含むナノ構造化組織体の周期を制御する方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1358625A FR3010411B1 (fr) | 2013-09-09 | 2013-09-09 | Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs |
FR1451491A FR3010413B1 (fr) | 2013-09-09 | 2014-02-25 | Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3010413A1 FR3010413A1 (fr) | 2015-03-13 |
FR3010413B1 true FR3010413B1 (fr) | 2015-09-25 |
Family
ID=51483329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1451491A Expired - Fee Related FR3010413B1 (fr) | 2013-09-09 | 2014-02-25 | Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs |
Country Status (10)
Country | Link |
---|---|
US (1) | US20150073096A1 (fr) |
EP (1) | EP2845887B1 (fr) |
JP (2) | JP6419494B2 (fr) |
KR (1) | KR20150029600A (fr) |
CN (1) | CN105722927B (fr) |
ES (1) | ES2894835T3 (fr) |
FR (1) | FR3010413B1 (fr) |
SG (1) | SG11201601694XA (fr) |
TW (1) | TWI622610B (fr) |
WO (1) | WO2015032890A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3032714A1 (fr) * | 2015-02-18 | 2016-08-19 | Arkema France | Procede de reduction du temps d'assemblage des films ordonnes de copolymeres a blocs |
FR3032713A1 (fr) * | 2015-02-18 | 2016-08-19 | Arkema France | Procede de reduction des defauts dans un film ordonne de copolymeres a blocs |
FR3032712A1 (fr) * | 2015-02-18 | 2016-08-19 | Arkema France | Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs |
US11654399B2 (en) * | 2015-03-17 | 2023-05-23 | President And Fellows Of Harvard College | Method for micromolding a polymeric membrane having a pore array |
WO2018101741A1 (fr) | 2016-11-30 | 2018-06-07 | 주식회사 엘지화학 | Stratifié |
KR102088444B1 (ko) | 2016-11-30 | 2020-03-12 | 주식회사 엘지화학 | 고분자 조성물 |
CN109996840B (zh) * | 2016-11-30 | 2022-03-29 | 株式会社Lg化学 | 聚合物组合物 |
CN111341658A (zh) * | 2020-02-05 | 2020-06-26 | 中国科学院微电子研究所 | 一种层图案化方法和半导体器件、集成电路和电子设备 |
CN113736207B (zh) * | 2021-08-17 | 2023-05-02 | 复旦大学 | 多组份表面化有机-无机复合纳米粒子及制备方法和应用 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2679237B1 (fr) | 1991-07-19 | 1994-07-22 | Atochem | Systeme d'amorcage pour la polymerisation anionique de monomeres (meth) acryliques. |
FR2735480B1 (fr) | 1995-06-15 | 1997-07-18 | Atochem Elf Sa | Procede de polymerisation anionique en continu d'au moins un monomere (meth)acrylique pour l'obtention de polymeres a haut taux de solide |
FR2773158B1 (fr) * | 1997-12-30 | 2000-02-04 | Atochem Elf Sa | Procede de polymerisation radicalaire controlee faisant intervenir une faible quantite de radical libre stable |
US20110097559A1 (en) * | 1999-03-30 | 2011-04-28 | Hawker Craig J | Supramolecular block copolymer compositions for sub-micron lithography |
WO2009151834A2 (fr) * | 2008-05-08 | 2009-12-17 | The Regents Of The University Of California | Compositions de copolymères séquencés supramoléculaires pour lithographie submicronique |
WO2004009605A2 (fr) * | 2001-11-30 | 2004-01-29 | University Of Maryland, College Park | Synthese, a temperature ambiante regulee, de nanoagregats d'oxydes metalliques magnetiques dans une matrice de copolymeres bisequences |
US8287957B2 (en) * | 2004-11-22 | 2012-10-16 | Wisconsin Alumni Research Foundation | Methods and compositions for forming aperiodic patterned copolymer films |
JP2009520074A (ja) * | 2005-12-16 | 2009-05-21 | アーケマ・インコーポレイテッド | 低表面エネルギーブロック共重合体の製造方法及び用途 |
US7964107B2 (en) * | 2007-02-08 | 2011-06-21 | Micron Technology, Inc. | Methods using block copolymer self-assembly for sub-lithographic patterning |
US7732533B2 (en) * | 2007-08-31 | 2010-06-08 | Micron Technology, Inc. | Zwitterionic block copolymers and methods |
US7521094B1 (en) * | 2008-01-14 | 2009-04-21 | International Business Machines Corporation | Method of forming polymer features by directed self-assembly of block copolymers |
JP5281386B2 (ja) * | 2008-12-22 | 2013-09-04 | 株式会社日立製作所 | 高分子薄膜及びパターン媒体並びにこれらの製造方法 |
US9299381B2 (en) * | 2011-02-07 | 2016-03-29 | Wisconsin Alumni Research Foundation | Solvent annealing block copolymers on patterned substrates |
FR2974072B1 (fr) | 2011-04-15 | 2014-06-13 | Oreal | Dispositif de stockage et de distribution de produits a plusieurs compartiments |
US8961918B2 (en) * | 2012-02-10 | 2015-02-24 | Rohm And Haas Electronic Materials Llc | Thermal annealing process |
US8513356B1 (en) * | 2012-02-10 | 2013-08-20 | Dow Global Technologies Llc | Diblock copolymer blend composition |
US8710150B2 (en) * | 2012-02-10 | 2014-04-29 | Rohm And Haas Electronic Materials Llc | Blended block copolymer composition |
-
2014
- 2014-02-25 FR FR1451491A patent/FR3010413B1/fr not_active Expired - Fee Related
- 2014-09-05 WO PCT/EP2014/068928 patent/WO2015032890A1/fr active Application Filing
- 2014-09-05 CN CN201480049611.3A patent/CN105722927B/zh active Active
- 2014-09-05 EP EP14183681.7A patent/EP2845887B1/fr active Active
- 2014-09-05 ES ES14183681T patent/ES2894835T3/es active Active
- 2014-09-05 SG SG11201601694XA patent/SG11201601694XA/en unknown
- 2014-09-08 JP JP2014181964A patent/JP6419494B2/ja active Active
- 2014-09-09 TW TW103131001A patent/TWI622610B/zh active
- 2014-09-09 US US14/481,410 patent/US20150073096A1/en not_active Abandoned
- 2014-09-11 KR KR20140120324A patent/KR20150029600A/ko active Application Filing
-
2017
- 2017-11-02 JP JP2017212869A patent/JP2018066005A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR3010413A1 (fr) | 2015-03-13 |
WO2015032890A1 (fr) | 2015-03-12 |
ES2894835T3 (es) | 2022-02-16 |
CN105722927B (zh) | 2020-12-22 |
TW201522441A (zh) | 2015-06-16 |
JP2018066005A (ja) | 2018-04-26 |
US20150073096A1 (en) | 2015-03-12 |
JP2015061905A (ja) | 2015-04-02 |
JP6419494B2 (ja) | 2018-11-07 |
EP2845887B1 (fr) | 2021-07-28 |
EP2845887A1 (fr) | 2015-03-11 |
SG11201601694XA (en) | 2016-04-28 |
CN105722927A (zh) | 2016-06-29 |
TWI622610B (zh) | 2018-05-01 |
KR20150029600A (ko) | 2015-03-18 |
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Legal Events
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Effective date: 20221005 |