FR3010413B1 - Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs - Google Patents

Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs

Info

Publication number
FR3010413B1
FR3010413B1 FR1451491A FR1451491A FR3010413B1 FR 3010413 B1 FR3010413 B1 FR 3010413B1 FR 1451491 A FR1451491 A FR 1451491A FR 1451491 A FR1451491 A FR 1451491A FR 3010413 B1 FR3010413 B1 FR 3010413B1
Authority
FR
France
Prior art keywords
nano
mixture
period
controlling
block copolymers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1451491A
Other languages
English (en)
Other versions
FR3010413A1 (fr
Inventor
Christophe Navarro
Xavier Chevalier
Celia Nicolet
Ilias Iliopoulos
Raluca Tiron
Guillaume Fleury
Georges Hadziioannou
Christophe Couderc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arkema France SA
Original Assignee
Arkema France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR1358625A external-priority patent/FR3010411B1/fr
Application filed by Arkema France SA filed Critical Arkema France SA
Priority to FR1451491A priority Critical patent/FR3010413B1/fr
Priority to EP14183681.7A priority patent/EP2845887B1/fr
Priority to CN201480049611.3A priority patent/CN105722927B/zh
Priority to SG11201601694XA priority patent/SG11201601694XA/en
Priority to PCT/EP2014/068928 priority patent/WO2015032890A1/fr
Priority to ES14183681T priority patent/ES2894835T3/es
Priority to JP2014181964A priority patent/JP6419494B2/ja
Priority to US14/481,410 priority patent/US20150073096A1/en
Priority to TW103131001A priority patent/TWI622610B/zh
Priority to KR20140120324A priority patent/KR20150029600A/ko
Publication of FR3010413A1 publication Critical patent/FR3010413A1/fr
Publication of FR3010413B1 publication Critical patent/FR3010413B1/fr
Application granted granted Critical
Priority to KR1020160057779A priority patent/KR20160058738A/ko
Priority to JP2017212869A priority patent/JP2018066005A/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/007—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/003—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor characterised by the choice of material
    • B29C39/006—Monomers or prepolymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2025/00—Use of polymers of vinyl-aromatic compounds or derivatives thereof as moulding material
    • B29K2025/04—Polymers of styrene
    • B29K2025/08—Copolymers of styrene, e.g. AS or SAN, i.e. acrylonitrile styrene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
    • B29K2033/04—Polymers of esters
    • B29K2033/12—Polymers of methacrylic acid esters, e.g. PMMA, i.e. polymethylmethacrylate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2096/00—Use of specified macromolecular materials not provided for in a single one of main groups B29K2001/00 - B29K2095/00, as moulding material
    • B29K2096/04—Block polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/0085—Copolymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0037—Other properties
    • B29K2995/0088—Molecular weight
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2007/00—Flat articles, e.g. films or sheets
    • B29L2007/008—Wide strips, e.g. films, webs
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2205/00—Polymer mixtures characterised by other features
    • C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
    • C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2205/00—Polymer mixtures characterised by other features
    • C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Graft Or Block Polymers (AREA)
FR1451491A 2013-09-09 2014-02-25 Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs Expired - Fee Related FR3010413B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR1451491A FR3010413B1 (fr) 2013-09-09 2014-02-25 Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs
EP14183681.7A EP2845887B1 (fr) 2013-09-09 2014-09-05 Procédé de contrôle de la période d'un assemblage nanostructuré comprenant un mélange de copolymères à blocs
CN201480049611.3A CN105722927B (zh) 2013-09-09 2014-09-05 用于控制包括嵌段共聚物的共混物的纳米结构化组合体的周期的方法
SG11201601694XA SG11201601694XA (en) 2013-09-09 2014-09-05 Process for controlling the period of a nanostructured assemblage comprising a blend of block copolymers
PCT/EP2014/068928 WO2015032890A1 (fr) 2013-09-09 2014-09-05 Procédé pour contrôler la période d'un assemblage nanostructuré comprenant un mélange de copolymères séquencés
ES14183681T ES2894835T3 (es) 2013-09-09 2014-09-05 Procedimiento para controlar el periodo de un ensamblaje nanoestructurado que comprende una mezcla de copolímeros de bloques
JP2014181964A JP6419494B2 (ja) 2013-09-09 2014-09-08 ブロックコポリマーのブレンドを含むナノ構造化組織体の周期を制御する方法
US14/481,410 US20150073096A1 (en) 2013-09-09 2014-09-09 Process for controlling the period of a nanostructured assemblage comprising a blend of block copolymers
TW103131001A TWI622610B (zh) 2013-09-09 2014-09-09 控制含嵌段共聚物摻合物之奈米結構化組合體的周期之方法
KR20140120324A KR20150029600A (ko) 2013-09-09 2014-09-11 블록 공중합체의 혼련물을 포함하는 나노구조의 집합체의 간격 조절 방법
KR1020160057779A KR20160058738A (ko) 2013-09-09 2016-05-11 블록 공중합체의 혼련물을 포함하는 나노구조의 집합체의 간격 조절 방법
JP2017212869A JP2018066005A (ja) 2013-09-09 2017-11-02 ブロックコポリマーのブレンドを含むナノ構造化組織体の周期を制御する方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1358625A FR3010411B1 (fr) 2013-09-09 2013-09-09 Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs
FR1451491A FR3010413B1 (fr) 2013-09-09 2014-02-25 Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs

Publications (2)

Publication Number Publication Date
FR3010413A1 FR3010413A1 (fr) 2015-03-13
FR3010413B1 true FR3010413B1 (fr) 2015-09-25

Family

ID=51483329

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1451491A Expired - Fee Related FR3010413B1 (fr) 2013-09-09 2014-02-25 Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs

Country Status (10)

Country Link
US (1) US20150073096A1 (fr)
EP (1) EP2845887B1 (fr)
JP (2) JP6419494B2 (fr)
KR (1) KR20150029600A (fr)
CN (1) CN105722927B (fr)
ES (1) ES2894835T3 (fr)
FR (1) FR3010413B1 (fr)
SG (1) SG11201601694XA (fr)
TW (1) TWI622610B (fr)
WO (1) WO2015032890A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3032714A1 (fr) * 2015-02-18 2016-08-19 Arkema France Procede de reduction du temps d'assemblage des films ordonnes de copolymeres a blocs
FR3032713A1 (fr) * 2015-02-18 2016-08-19 Arkema France Procede de reduction des defauts dans un film ordonne de copolymeres a blocs
FR3032712A1 (fr) * 2015-02-18 2016-08-19 Arkema France Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs
US11654399B2 (en) * 2015-03-17 2023-05-23 President And Fellows Of Harvard College Method for micromolding a polymeric membrane having a pore array
WO2018101741A1 (fr) 2016-11-30 2018-06-07 주식회사 엘지화학 Stratifié
KR102088444B1 (ko) 2016-11-30 2020-03-12 주식회사 엘지화학 고분자 조성물
CN109996840B (zh) * 2016-11-30 2022-03-29 株式会社Lg化学 聚合物组合物
CN111341658A (zh) * 2020-02-05 2020-06-26 中国科学院微电子研究所 一种层图案化方法和半导体器件、集成电路和电子设备
CN113736207B (zh) * 2021-08-17 2023-05-02 复旦大学 多组份表面化有机-无机复合纳米粒子及制备方法和应用

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2679237B1 (fr) 1991-07-19 1994-07-22 Atochem Systeme d'amorcage pour la polymerisation anionique de monomeres (meth) acryliques.
FR2735480B1 (fr) 1995-06-15 1997-07-18 Atochem Elf Sa Procede de polymerisation anionique en continu d'au moins un monomere (meth)acrylique pour l'obtention de polymeres a haut taux de solide
FR2773158B1 (fr) * 1997-12-30 2000-02-04 Atochem Elf Sa Procede de polymerisation radicalaire controlee faisant intervenir une faible quantite de radical libre stable
US20110097559A1 (en) * 1999-03-30 2011-04-28 Hawker Craig J Supramolecular block copolymer compositions for sub-micron lithography
WO2009151834A2 (fr) * 2008-05-08 2009-12-17 The Regents Of The University Of California Compositions de copolymères séquencés supramoléculaires pour lithographie submicronique
WO2004009605A2 (fr) * 2001-11-30 2004-01-29 University Of Maryland, College Park Synthese, a temperature ambiante regulee, de nanoagregats d'oxydes metalliques magnetiques dans une matrice de copolymeres bisequences
US8287957B2 (en) * 2004-11-22 2012-10-16 Wisconsin Alumni Research Foundation Methods and compositions for forming aperiodic patterned copolymer films
JP2009520074A (ja) * 2005-12-16 2009-05-21 アーケマ・インコーポレイテッド 低表面エネルギーブロック共重合体の製造方法及び用途
US7964107B2 (en) * 2007-02-08 2011-06-21 Micron Technology, Inc. Methods using block copolymer self-assembly for sub-lithographic patterning
US7732533B2 (en) * 2007-08-31 2010-06-08 Micron Technology, Inc. Zwitterionic block copolymers and methods
US7521094B1 (en) * 2008-01-14 2009-04-21 International Business Machines Corporation Method of forming polymer features by directed self-assembly of block copolymers
JP5281386B2 (ja) * 2008-12-22 2013-09-04 株式会社日立製作所 高分子薄膜及びパターン媒体並びにこれらの製造方法
US9299381B2 (en) * 2011-02-07 2016-03-29 Wisconsin Alumni Research Foundation Solvent annealing block copolymers on patterned substrates
FR2974072B1 (fr) 2011-04-15 2014-06-13 Oreal Dispositif de stockage et de distribution de produits a plusieurs compartiments
US8961918B2 (en) * 2012-02-10 2015-02-24 Rohm And Haas Electronic Materials Llc Thermal annealing process
US8513356B1 (en) * 2012-02-10 2013-08-20 Dow Global Technologies Llc Diblock copolymer blend composition
US8710150B2 (en) * 2012-02-10 2014-04-29 Rohm And Haas Electronic Materials Llc Blended block copolymer composition

Also Published As

Publication number Publication date
FR3010413A1 (fr) 2015-03-13
WO2015032890A1 (fr) 2015-03-12
ES2894835T3 (es) 2022-02-16
CN105722927B (zh) 2020-12-22
TW201522441A (zh) 2015-06-16
JP2018066005A (ja) 2018-04-26
US20150073096A1 (en) 2015-03-12
JP2015061905A (ja) 2015-04-02
JP6419494B2 (ja) 2018-11-07
EP2845887B1 (fr) 2021-07-28
EP2845887A1 (fr) 2015-03-11
SG11201601694XA (en) 2016-04-28
CN105722927A (zh) 2016-06-29
TWI622610B (zh) 2018-05-01
KR20150029600A (ko) 2015-03-18

Similar Documents

Publication Publication Date Title
FR3010413B1 (fr) Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs
FR3027508B1 (fr) Procede de controle de la dentition
FR3002657B1 (fr) Procede d elaboration d un profil vertical de trajectoire comprenant des niveaux d altitude multiples
FR3027505B1 (fr) Procede de controle du positionnement de dents
FR3011587B1 (fr) Procede d'optimisation de la consommation specifique d'un helicoptere bimoteur
FR3028872B1 (fr) Procede de fractionnement
PT2948424T (pt) Processo de purificação da vanilina natural
FR2990528B1 (fr) Procede de commande de pilotage d'un aeronef
EP3363443A4 (fr) Méthode de production de plaquettes purifiées
FR3039063B1 (fr) Procede d'enrichissement en pongamol d'huile de karanja
FR3001642B1 (fr) Procede de recouvrement de surfaces
DK3341380T3 (da) Hjernegennemtrængelig chromonoximderivat til terapien af levodopa-induceret dyskinesi
FR3025925B1 (fr) Procede de controle de modes de presentation de sous-titres
FR2993975B1 (fr) Procede d'affichage de la situation geographique d'un aeronef
FR3019750B1 (fr) Procede de controle de l'alimentation en gaz respiratoire
FR3010411B1 (fr) Procede de controle de la periode d'un assemblage nano-structure comprenant un melange de copolymeres a blocs
FR3004301B1 (fr) Procede et systeme de controle de la qualite d'un dispositif photovoltaique
FR2985715B1 (fr) Installation motrice d'un aeronef, aeronef, et procede de pilotage dudit aeronef
DK3071389T3 (da) Fremgangsmåde til regulering af påfyldningen af mindst en kavitet
FR3029352B1 (fr) Procede d'assemblage de deux substrats
FR3016366B1 (fr) Bitume solide et son procede d'obtention
EP3333155A4 (fr) Procédé de production de pitavastatine calcique
FR3025926B1 (fr) Procede de controle de la vitesse d'affichage des sous-titres
FR3029155B1 (fr) Procede de controle des changements etat d'une chaine cinematique
EP3248958A4 (fr) Procédé de production de fluoropropène

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

ST Notification of lapse

Effective date: 20221005