FR2966595B1 - Dispositif de detection d'un rayonnement electromagnetique. - Google Patents

Dispositif de detection d'un rayonnement electromagnetique.

Info

Publication number
FR2966595B1
FR2966595B1 FR1004203A FR1004203A FR2966595B1 FR 2966595 B1 FR2966595 B1 FR 2966595B1 FR 1004203 A FR1004203 A FR 1004203A FR 1004203 A FR1004203 A FR 1004203A FR 2966595 B1 FR2966595 B1 FR 2966595B1
Authority
FR
France
Prior art keywords
electromagnetic radiation
detecting electromagnetic
detecting
radiation
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1004203A
Other languages
English (en)
Other versions
FR2966595A1 (fr
Inventor
Jean Jacques Yon
Pierre Imperinetti
Alexandre Mary
Wilfried Rabaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1004203A priority Critical patent/FR2966595B1/fr
Priority to EP11787697.9A priority patent/EP2633279A1/fr
Priority to US13/881,324 priority patent/US8816283B2/en
Priority to PCT/FR2011/000573 priority patent/WO2012056124A1/fr
Priority to JP2013535479A priority patent/JP5940551B2/ja
Publication of FR2966595A1 publication Critical patent/FR2966595A1/fr
Application granted granted Critical
Publication of FR2966595B1 publication Critical patent/FR2966595B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/068—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling parameters other than temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
FR1004203A 2010-10-26 2010-10-26 Dispositif de detection d'un rayonnement electromagnetique. Expired - Fee Related FR2966595B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1004203A FR2966595B1 (fr) 2010-10-26 2010-10-26 Dispositif de detection d'un rayonnement electromagnetique.
EP11787697.9A EP2633279A1 (fr) 2010-10-26 2011-10-25 Dispositif de détection d'un rayonnement électromagnétique
US13/881,324 US8816283B2 (en) 2010-10-26 2011-10-25 Device for detecting an electromagnetic radiation
PCT/FR2011/000573 WO2012056124A1 (fr) 2010-10-26 2011-10-25 Dispositif de détection d'un rayonnement électromagnétique
JP2013535479A JP5940551B2 (ja) 2010-10-26 2011-10-25 電磁放射線を検出するための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1004203A FR2966595B1 (fr) 2010-10-26 2010-10-26 Dispositif de detection d'un rayonnement electromagnetique.

Publications (2)

Publication Number Publication Date
FR2966595A1 FR2966595A1 (fr) 2012-04-27
FR2966595B1 true FR2966595B1 (fr) 2013-01-25

Family

ID=43971080

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1004203A Expired - Fee Related FR2966595B1 (fr) 2010-10-26 2010-10-26 Dispositif de detection d'un rayonnement electromagnetique.

Country Status (5)

Country Link
US (1) US8816283B2 (fr)
EP (1) EP2633279A1 (fr)
JP (1) JP5940551B2 (fr)
FR (1) FR2966595B1 (fr)
WO (1) WO2012056124A1 (fr)

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Publication number Priority date Publication date Assignee Title
FR2994596B1 (fr) * 2012-08-20 2015-01-02 Commissariat Energie Atomique Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs
US20140091220A1 (en) * 2012-10-01 2014-04-03 Teledyne Dalsa Inc. Microbolometer architecture
FR3009865B1 (fr) * 2013-08-22 2015-07-31 Commissariat Energie Atomique Detecteur bolometrique a bolometre de compensation a thermalisation renforcee
US20150226613A1 (en) * 2014-02-07 2015-08-13 Raytheon Company Imaging device with shutterless non-uniformity correction
KR101570445B1 (ko) * 2014-02-27 2015-11-20 한국과학기술원 적외선 검출기
FR3042272B1 (fr) * 2015-10-09 2017-12-15 Commissariat Energie Atomique Bolometre a forte sensibilite spectrale.
DE102015220310A1 (de) * 2015-10-19 2017-04-20 Robert Bosch Gmbh Strahlungssensoranordnung und Gasdetektoranordnung
FR3054318B1 (fr) * 2016-07-21 2018-08-31 Commissariat Energie Atomique Detecteur bolometrique avec matrice de filtres a mode guide.
US9933312B2 (en) * 2016-09-08 2018-04-03 Robert Bosch Gmbh Bolometer fluid flow and temperature sensor
FR3066044B1 (fr) 2017-05-02 2020-02-21 Commissariat A L'energie Atomique Et Aux Energies Alternatives Detecteur de rayonnement electromagnetique, encapsule par report de couche mince.
JP2020532713A (ja) * 2017-08-25 2020-11-12 ザ ガバメント オブ ザ ユナイテッド ステイツ オブ アメリカ，アズ リプレゼンテッド バイ ザ セクレタリー オブ ザ ネイビー 高速酸化グラフェンボロメータおよびその製造方法
FR3073941B1 (fr) * 2017-11-21 2021-01-15 Commissariat Energie Atomique Dispositif de detection d’un rayonnement electromagnetique a diaphotie reduite
FR3081989B1 (fr) * 2018-05-30 2020-08-21 Commissariat Energie Atomique Systeme de detection a pixel sensible comportant un detecteur thermique et un dispositif de compensation
US10451487B1 (en) 2018-08-23 2019-10-22 Raytheon Company Per-pixel dark reference bolometer
KR102164930B1 (ko) * 2020-04-07 2020-10-13 주식회사 트루윈 반사판 구조의 블라인드 셀, 이를 포함하는 마이크로 볼로미터 및 그 제조방법
FR3118663A1 (fr) 2021-01-04 2022-07-08 Commissariat à l'Energie Atomique et aux Energies Alternatives Procédé de fabrication d’un dispositif de détection comportant une structure d’encapsulation comportant une couche mince opaque reposant sur une paroi périphérique minérale
FR3125876A1 (fr) * 2021-07-30 2023-02-03 Lynred Micro-bolometre aveugle d’imagerie infrarouge et procedes de realisation associes
FR3125877B1 (fr) * 2021-07-30 2023-06-30 Lynred Procede de realisation d’un micro-bolometre d’imagerie infrarouge aveugle et micro-bolometre associe
WO2023111000A1 (fr) 2021-12-15 2023-06-22 Trinamix Gmbh Photodétecteur pour mesure de rayonnement optique
FR3138517A1 (fr) * 2022-07-28 2024-02-02 Lynred Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation

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JPS61286722A (ja) * 1985-06-12 1986-12-17 Canon Inc 受光素子シ−ルド構体
JPH01105134A (ja) * 1987-10-19 1989-04-21 Komatsugawa Kakoki Kk 測光装置
JP3274881B2 (ja) * 1992-04-14 2002-04-15 テルモ株式会社 赤外線センサおよびその製造方法
JPH09126883A (ja) * 1995-10-27 1997-05-16 Daishinku Co 赤外線検出器
JP3805039B2 (ja) 1996-11-14 2006-08-02 シチズン時計株式会社 放射体温計
EP0942270B1 (fr) * 1997-09-22 2006-04-19 Citizen Watch Co. Ltd. Thermometre de mesure du rayonnement et procede de reglage
JP3147856B2 (ja) * 1998-06-02 2001-03-19 日本電気株式会社 リニア型赤外線検出素子
JP3268300B2 (ja) * 1999-09-27 2002-03-25 独立行政法人通信総合研究所 多段ハーメチックシール
JP2001215152A (ja) * 2000-02-03 2001-08-10 Mitsubishi Electric Corp 赤外線固体撮像素子
FR2822541B1 (fr) 2001-03-21 2003-10-03 Commissariat Energie Atomique Procedes et dispositifs de fabrication de detecteurs de rayonnement
JP2003315148A (ja) * 2002-04-24 2003-11-06 Kyocera Corp 赤外線センサ素子収納用パッケージおよび赤外線センサ装置
JP3944465B2 (ja) * 2003-04-11 2007-07-11 三菱電機株式会社 熱型赤外線検出器及び赤外線フォーカルプレーンアレイ
US8487260B2 (en) 2005-01-26 2013-07-16 Analog Devices, Inc. Sensor
US7435964B2 (en) * 2005-01-26 2008-10-14 Analog Devices, Inc. Thermal sensor with increased sensitivity
US7807972B2 (en) * 2005-01-26 2010-10-05 Analog Devices, Inc. Radiation sensor with cap and optical elements
US7692148B2 (en) * 2005-01-26 2010-04-06 Analog Devices, Inc. Thermal sensor with thermal barrier
US7718967B2 (en) * 2005-01-26 2010-05-18 Analog Devices, Inc. Die temperature sensors
JP2008241339A (ja) * 2007-03-26 2008-10-09 Mitsubishi Electric Corp 赤外線固体撮像素子

Also Published As

Publication number Publication date
WO2012056124A1 (fr) 2012-05-03
FR2966595A1 (fr) 2012-04-27
US20130240738A1 (en) 2013-09-19
EP2633279A1 (fr) 2013-09-04
JP5940551B2 (ja) 2016-06-29
JP2013542437A (ja) 2013-11-21
US8816283B2 (en) 2014-08-26

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