FR2907110A1 - Procede de fabrication de nitrure d'aluminium - Google Patents

Procede de fabrication de nitrure d'aluminium Download PDF

Info

Publication number
FR2907110A1
FR2907110A1 FR0609040A FR0609040A FR2907110A1 FR 2907110 A1 FR2907110 A1 FR 2907110A1 FR 0609040 A FR0609040 A FR 0609040A FR 0609040 A FR0609040 A FR 0609040A FR 2907110 A1 FR2907110 A1 FR 2907110A1
Authority
FR
France
Prior art keywords
aluminum
aluminum nitride
multilayer structure
temperature
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR0609040A
Other languages
English (en)
French (fr)
Inventor
Matthieu Boehm
Alexandre Dessainjean
Jean Remi Butruille
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rio Tinto Alcan International Ltd
Original Assignee
Alcan International Ltd Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcan International Ltd Canada filed Critical Alcan International Ltd Canada
Priority to FR0609040A priority Critical patent/FR2907110A1/fr
Priority to EP07823395A priority patent/EP2081868A1/de
Priority to US12/444,022 priority patent/US20100092748A1/en
Priority to PCT/FR2007/001342 priority patent/WO2008046974A1/fr
Priority to KR1020097008773A priority patent/KR20090085040A/ko
Priority to JP2009532836A priority patent/JP2010506815A/ja
Priority to CN200780038331.2A priority patent/CN101522563A/zh
Priority to CA002666410A priority patent/CA2666410A1/fr
Publication of FR2907110A1 publication Critical patent/FR2907110A1/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/30—Particle morphology extending in three dimensions
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/30—Particle morphology extending in three dimensions
    • C01P2004/45—Aggregated particles or particles with an intergrown morphology
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Ceramic Products (AREA)
FR0609040A 2006-10-16 2006-10-16 Procede de fabrication de nitrure d'aluminium Pending FR2907110A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0609040A FR2907110A1 (fr) 2006-10-16 2006-10-16 Procede de fabrication de nitrure d'aluminium
EP07823395A EP2081868A1 (de) 2006-10-16 2007-08-03 Verfahren zur herstellung von aluminiumnitrid und aluminiumnitridscheibe und pulver
US12/444,022 US20100092748A1 (en) 2006-10-16 2007-08-03 Method of manufacturing aluminium nitride
PCT/FR2007/001342 WO2008046974A1 (fr) 2006-10-16 2007-08-03 Procede de fabrication de nitrure d'aluminium, plaquette et poudre de nitrure d'aluminium
KR1020097008773A KR20090085040A (ko) 2006-10-16 2007-08-03 질화알루미늄의 제조 방법, 질화알루미늄 웨이퍼 및 질화알루미늄 분말
JP2009532836A JP2010506815A (ja) 2006-10-16 2007-08-03 窒化アルミニウム、窒化アルミニウムのウェハーおよび粉末の製造方法
CN200780038331.2A CN101522563A (zh) 2006-10-16 2007-08-03 制造氮化铝的方法以及氮化铝薄片和粉末
CA002666410A CA2666410A1 (fr) 2006-10-16 2007-08-03 Procede de fabrication de nitrure d'aluminium, plaquette et poudre de nitrure d'aluminium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0609040A FR2907110A1 (fr) 2006-10-16 2006-10-16 Procede de fabrication de nitrure d'aluminium

Publications (1)

Publication Number Publication Date
FR2907110A1 true FR2907110A1 (fr) 2008-04-18

Family

ID=38091752

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0609040A Pending FR2907110A1 (fr) 2006-10-16 2006-10-16 Procede de fabrication de nitrure d'aluminium

Country Status (8)

Country Link
US (1) US20100092748A1 (de)
EP (1) EP2081868A1 (de)
JP (1) JP2010506815A (de)
KR (1) KR20090085040A (de)
CN (1) CN101522563A (de)
CA (1) CA2666410A1 (de)
FR (1) FR2907110A1 (de)
WO (1) WO2008046974A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101323111B1 (ko) * 2011-05-24 2013-10-30 한국세라믹기술원 박판형 질화알루미늄의 제조방법
CN102795606A (zh) * 2011-05-25 2012-11-28 华广光电股份有限公司 制造氮化铝片的方法
CN102925851B (zh) * 2012-10-30 2015-07-08 江苏大学 铝及铝合金表面二段气体氮化方法
TWI629237B (zh) * 2016-11-28 2018-07-11 國立清華大學 氮化鋁製備方法
WO2021131407A1 (ja) * 2019-12-23 2021-07-01 日本碍子株式会社 窒化アルミニウム粒子

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183607A (ja) * 1984-09-29 1986-04-28 Denki Kagaku Kogyo Kk 窒化アルミニウムの製造方法
FR2715169A1 (fr) * 1994-01-14 1995-07-21 Atochem Elf Sa Macrocristaux renfermant du nitrure d'aluminium sous forme de plaquettes, leur procédé de préparation et leurs utilisations.
JPH0912308A (ja) * 1995-06-28 1997-01-14 Toyota Motor Corp アルミニウムの窒化処理法
US5710382A (en) * 1995-09-26 1998-01-20 The Dow Chemical Company Aluminum nitride, aluminum nitride containing solid solutions and aluminum nitride composites prepared by combustion synthesis and sintered bodies prepared therefrom
EP0887308A1 (de) * 1996-12-26 1998-12-30 Toyota Jidosha Kabushiki Kaisha Verfahren zur herstellung von aluminiumnitrid

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63221842A (ja) * 1987-03-11 1988-09-14 Nippon Steel Corp 金属粉体、金属化合物粉体およびセラミツクス粉体の製造方法および装置
WO1996020127A1 (en) * 1994-12-23 1996-07-04 The Dow Chemical Company Aluminum nitride powders having high green density, and process for making same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183607A (ja) * 1984-09-29 1986-04-28 Denki Kagaku Kogyo Kk 窒化アルミニウムの製造方法
FR2715169A1 (fr) * 1994-01-14 1995-07-21 Atochem Elf Sa Macrocristaux renfermant du nitrure d'aluminium sous forme de plaquettes, leur procédé de préparation et leurs utilisations.
JPH0912308A (ja) * 1995-06-28 1997-01-14 Toyota Motor Corp アルミニウムの窒化処理法
US5710382A (en) * 1995-09-26 1998-01-20 The Dow Chemical Company Aluminum nitride, aluminum nitride containing solid solutions and aluminum nitride composites prepared by combustion synthesis and sintered bodies prepared therefrom
EP0887308A1 (de) * 1996-12-26 1998-12-30 Toyota Jidosha Kabushiki Kaisha Verfahren zur herstellung von aluminiumnitrid

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
B.J. HALL ET AL.: "Al/AlN layered composites by direct nitridation of aluminium", JOURNAL OF MATERIALS LETTERS, vol. 22, 2003, pages 1627 - 1630, XP002437189 *
DATABASE WPI Week 199712, Derwent World Patents Index; AN 1997-128519, XP002437390 *

Also Published As

Publication number Publication date
CN101522563A (zh) 2009-09-02
US20100092748A1 (en) 2010-04-15
CA2666410A1 (fr) 2008-04-24
KR20090085040A (ko) 2009-08-06
EP2081868A1 (de) 2009-07-29
JP2010506815A (ja) 2010-03-04
WO2008046974A1 (fr) 2008-04-24

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