FR2859016B1 - Dispositif de mesure interferometrique pour saisir les donnees geometriques de surfaces d'objets - Google Patents

Dispositif de mesure interferometrique pour saisir les donnees geometriques de surfaces d'objets

Info

Publication number
FR2859016B1
FR2859016B1 FR0451852A FR0451852A FR2859016B1 FR 2859016 B1 FR2859016 B1 FR 2859016B1 FR 0451852 A FR0451852 A FR 0451852A FR 0451852 A FR0451852 A FR 0451852A FR 2859016 B1 FR2859016 B1 FR 2859016B1
Authority
FR
France
Prior art keywords
seizing
measuring device
geometric data
object surfaces
interferometric measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0451852A
Other languages
English (en)
Other versions
FR2859016A1 (fr
Inventor
Michael Lindner
Bernd Schmidtke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2859016A1 publication Critical patent/FR2859016A1/fr
Application granted granted Critical
Publication of FR2859016B1 publication Critical patent/FR2859016B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02057Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02027Two or more interferometric channels or interferometers
    • G01B9/02028Two or more reference or object arms in one interferometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/0209Low-coherence interferometers
FR0451852A 2003-08-18 2004-08-16 Dispositif de mesure interferometrique pour saisir les donnees geometriques de surfaces d'objets Expired - Fee Related FR2859016B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10337896A DE10337896A1 (de) 2003-08-18 2003-08-18 Interferometrische Messvorrichtung zum Erfassen von Geometriedaten von Oberflächen

Publications (2)

Publication Number Publication Date
FR2859016A1 FR2859016A1 (fr) 2005-02-25
FR2859016B1 true FR2859016B1 (fr) 2006-11-24

Family

ID=34112133

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0451852A Expired - Fee Related FR2859016B1 (fr) 2003-08-18 2004-08-16 Dispositif de mesure interferometrique pour saisir les donnees geometriques de surfaces d'objets

Country Status (4)

Country Link
US (1) US7576864B2 (fr)
JP (1) JP2005062193A (fr)
DE (1) DE10337896A1 (fr)
FR (1) FR2859016B1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005061464C5 (de) * 2005-12-22 2013-08-29 Carl Mahr Holding Gmbh Verfahren und Vorrichtungen zur optischen Abstandsmessung
US20070247688A1 (en) * 2006-01-18 2007-10-25 Turner Mark A Variable-beamwidth angle encoding laser scanner
US7894042B2 (en) 2006-01-18 2011-02-22 Lockheed Martin Corporation Omni-directional imaging sensor
JP5558005B2 (ja) * 2006-01-23 2014-07-23 ザイゴ コーポレーション 物体をモニタする干渉計システム
JP2007205918A (ja) * 2006-02-02 2007-08-16 Olympus Corp 計測内視鏡
DE102007061305B4 (de) * 2007-12-19 2012-04-26 Continental Automotive Gmbh Mehrteilige Antenne mit zirkularer Polarisation und Funkstation
JP6162137B2 (ja) * 2011-11-09 2017-07-12 ザイゴ コーポレーションZygo Corporation エンコーダシステムを使用する低コヒーレンス干渉法
WO2014011621A1 (fr) * 2012-07-10 2014-01-16 Massachusetts Institute Of Technology Spectroscopie d'absorption à large bande directe et quantitative avec des sondes en porte-à-faux multi-couches
EP2690395A1 (fr) 2012-07-24 2014-01-29 Hexagon Technology Center GmbH Dispositif de mesure de distance interférométrique et procédé associé
EP2690396A1 (fr) 2012-07-24 2014-01-29 Hexagon Technology Center GmbH Dispositif de mesure de distance interférométrique et procédé associé
JP5704150B2 (ja) * 2012-11-21 2015-04-22 株式会社東京精密 白色干渉装置及び白色干渉装置の位置及び変位測定方法
US20180149468A1 (en) * 2016-11-30 2018-05-31 Apre Instruments, Llc True heterodyne spectrally controlled interferometry
DE102021207980A1 (de) 2021-07-23 2023-01-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren und vorrichtung zur synchronisation von multiplex-messungen mit optischen sensoren

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2632404B1 (fr) * 1988-06-03 1990-09-21 Elf Aquitaine Capteur interferometrique et son utilisation dans un dispositif interferometrique
AT396179B (de) * 1989-06-07 1993-06-25 Tabarelli Werner Interferometeranordnung
JPH08304203A (ja) * 1995-05-02 1996-11-22 Hitachi Ltd 光式圧力検出方法とそのセンサ及び光式圧力センサの波長板、偏光選択装置とビーム分配器、並びに、かかる方法による多点計測光式圧力センサシステムとそのセンシングプローブ
FR2765964A1 (fr) * 1997-07-08 1999-01-15 Bertin & Cie Dispositif optique de mesure de distance avec une grande precision
JPH11148897A (ja) * 1997-11-14 1999-06-02 Olympus Optical Co Ltd 光イメージング装置
JPH11183263A (ja) * 1997-12-25 1999-07-09 Mitsubishi Heavy Ind Ltd 多点レーザ干渉計
DE19808273A1 (de) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
DE19819762A1 (de) * 1998-05-04 1999-11-25 Bosch Gmbh Robert Interferometrische Meßeinrichtung
EP1272812B1 (fr) * 2000-03-30 2004-11-24 Robert Bosch Gmbh Dispositif de mesure interferometrique
DE10039239A1 (de) 2000-08-11 2002-03-07 Bosch Gmbh Robert Optische Messvorrichtung
DE10057539B4 (de) 2000-11-20 2008-06-12 Robert Bosch Gmbh Interferometrische Messvorrichtung
JP2002336186A (ja) * 2001-05-21 2002-11-26 Olympus Optical Co Ltd 手術用システム
US6678055B2 (en) * 2001-11-26 2004-01-13 Tevet Process Control Technologies Ltd. Method and apparatus for measuring stress in semiconductor wafers
US7417740B2 (en) * 2004-11-12 2008-08-26 Medeikon Corporation Single trace multi-channel low coherence interferometric sensor

Also Published As

Publication number Publication date
JP2005062193A (ja) 2005-03-10
DE10337896A1 (de) 2005-03-17
US7576864B2 (en) 2009-08-18
US20050052656A1 (en) 2005-03-10
FR2859016A1 (fr) 2005-02-25

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120430