FR2904690B1 - Dispositif de caracterisation d'objets uniques - Google Patents
Dispositif de caracterisation d'objets uniquesInfo
- Publication number
- FR2904690B1 FR2904690B1 FR0653248A FR0653248A FR2904690B1 FR 2904690 B1 FR2904690 B1 FR 2904690B1 FR 0653248 A FR0653248 A FR 0653248A FR 0653248 A FR0653248 A FR 0653248A FR 2904690 B1 FR2904690 B1 FR 2904690B1
- Authority
- FR
- France
- Prior art keywords
- unique objects
- characterizing
- characterizing unique
- objects
- unique
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Holo Graphy (AREA)
- Character Input (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0653248A FR2904690B1 (fr) | 2006-08-02 | 2006-08-02 | Dispositif de caracterisation d'objets uniques |
EP07788125A EP2047209A1 (fr) | 2006-08-02 | 2007-08-01 | Dispositif de caracterisation d'objets uniques |
PCT/EP2007/057956 WO2008015230A1 (fr) | 2006-08-02 | 2007-08-01 | Dispositif de caracterisation d'objets uniques |
US12/375,983 US8306306B2 (en) | 2006-08-02 | 2007-08-01 | Device for characterizing unique objects |
JP2009522270A JP2009545734A (ja) | 2006-08-02 | 2007-08-01 | ユニークオブジェクトの特徴解析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0653248A FR2904690B1 (fr) | 2006-08-02 | 2006-08-02 | Dispositif de caracterisation d'objets uniques |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2904690A1 FR2904690A1 (fr) | 2008-02-08 |
FR2904690B1 true FR2904690B1 (fr) | 2009-04-03 |
Family
ID=37635668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0653248A Expired - Fee Related FR2904690B1 (fr) | 2006-08-02 | 2006-08-02 | Dispositif de caracterisation d'objets uniques |
Country Status (5)
Country | Link |
---|---|
US (1) | US8306306B2 (fr) |
EP (1) | EP2047209A1 (fr) |
JP (1) | JP2009545734A (fr) |
FR (1) | FR2904690B1 (fr) |
WO (1) | WO2008015230A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1036886A1 (nl) | 2008-05-12 | 2009-11-16 | Asml Netherlands Bv | A method of measuring a target, an inspection apparatus, a scatterometer, a lithographic apparatus and a data processor. |
WO2016030227A1 (fr) | 2014-08-29 | 2016-03-03 | Asml Netherlands B.V. | Procédé de contrôle d'une distance entre deux objets, appareil et procédé d'inspection |
KR102030100B1 (ko) * | 2015-03-05 | 2019-10-08 | 에이에스엠엘 네델란즈 비.브이. | 검사와 계측을 위한 방법 및 장치 |
WO2016142214A2 (fr) * | 2015-03-11 | 2016-09-15 | Asml Netherlands B.V. | Procédé et appareil d'inspection et de métrologie |
CN109690412B (zh) | 2016-09-12 | 2021-11-19 | Asml荷兰有限公司 | 确定结构的特性的方法、检查设备以及器件制造方法 |
KR102326190B1 (ko) | 2016-09-12 | 2021-11-15 | 에이에스엠엘 네델란즈 비.브이. | 정정 유도 방법 및 장치, 구조체의 속성을 결정하는 방법 및 장치, 디바이스 제조 방법 |
US11092902B2 (en) | 2017-06-21 | 2021-08-17 | Asml Netherlands B.V. | Method and apparatus for detecting substrate surface variations |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3782827A (en) * | 1971-08-04 | 1974-01-01 | Itek Corp | Optical device for characterizing the surface or other properties of a sample |
US4828392A (en) * | 1985-03-13 | 1989-05-09 | Matsushita Electric Industrial Co., Ltd. | Exposure apparatus |
US5463459A (en) * | 1991-04-02 | 1995-10-31 | Hitachi, Ltd. | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process |
US5471066A (en) * | 1993-08-26 | 1995-11-28 | Nikon Corporation | Defect inspection apparatus of rotary type |
US5428442A (en) * | 1993-09-30 | 1995-06-27 | Optical Specialties, Inc. | Inspection system with in-lens, off-axis illuminator |
US5880838A (en) * | 1996-06-05 | 1999-03-09 | California Institute Of California | System and method for optically measuring a structure |
US6750968B2 (en) * | 2000-10-03 | 2004-06-15 | Accent Optical Technologies, Inc. | Differential numerical aperture methods and device |
US6934024B2 (en) * | 2000-10-18 | 2005-08-23 | Regents Of The University Of Minnesota | Ellipsometry methods and apparatus using solid immersion tunneling |
US7046376B2 (en) * | 2002-07-05 | 2006-05-16 | Therma-Wave, Inc. | Overlay targets with isolated, critical-dimension features and apparatus to measure overlay |
US8081792B2 (en) * | 2003-08-20 | 2011-12-20 | Illumina, Inc. | Fourier scattering methods for encoding microbeads and methods and apparatus for reading the same |
FR2859781B1 (fr) * | 2003-09-17 | 2007-07-06 | Commissariat Energie Atomique | Utilisation de la transformee de fourier optique pour le controle dimensionnel en microelectronique |
US7791727B2 (en) * | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
-
2006
- 2006-08-02 FR FR0653248A patent/FR2904690B1/fr not_active Expired - Fee Related
-
2007
- 2007-08-01 US US12/375,983 patent/US8306306B2/en not_active Expired - Fee Related
- 2007-08-01 JP JP2009522270A patent/JP2009545734A/ja active Pending
- 2007-08-01 WO PCT/EP2007/057956 patent/WO2008015230A1/fr active Search and Examination
- 2007-08-01 EP EP07788125A patent/EP2047209A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2008015230A1 (fr) | 2008-02-07 |
FR2904690A1 (fr) | 2008-02-08 |
JP2009545734A (ja) | 2009-12-24 |
EP2047209A1 (fr) | 2009-04-15 |
US20090316979A1 (en) | 2009-12-24 |
US8306306B2 (en) | 2012-11-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2925961B1 (fr) | Dispositif de detection d'impact | |
FR2897245B1 (fr) | Dispositif de conditionnement et d'application. | |
FR2900550B1 (fr) | Dispositif de conditionnement et d'application. | |
FR2907321B1 (fr) | Dispositif de conditionnement et d'application | |
BRPI0717912A2 (pt) | "dispositivo de vigilância" | |
FR2907637B1 (fr) | "dispositif debroussailleur-broyeur de vegetaux" | |
FR2904690B1 (fr) | Dispositif de caracterisation d'objets uniques | |
FR2883374B1 (fr) | Dispositif d'etalonnage de couplemetre | |
FR2922040B1 (fr) | Dispositif de suspension d'affiche | |
FR2921150B1 (fr) | Dispositif d'arpentage | |
FR2891474B1 (fr) | Dispositif de brumisation | |
FR2925382B1 (fr) | Dispositif de suspension d'outils | |
FR2895046B1 (fr) | Dispositif d'amortissement | |
FR2934399B1 (fr) | Dispositif de traitement de l'information | |
FR2914382B1 (fr) | Dispositif d'embrayage | |
FR2898286B1 (fr) | Dispositif pour le broyage et le calibrage d'objets | |
FR2902088B1 (fr) | Dispositif de distribution | |
FR2899076B1 (fr) | Dispositif de conditionnement et d'application | |
FR2885575B1 (fr) | Dispositif d'arret de charges | |
FR2909151B1 (fr) | Dispositif de masse d'equilibrage | |
FR2922474B1 (fr) | Dispositif de suspension d'outils | |
FR2910425B1 (fr) | Dispositif d'ajout d'angle de braquage | |
FR2885975B1 (fr) | Dispositif d'embrayage multiple | |
FR2896848B1 (fr) | "dispositif formant support reglable"' | |
FR2886192B1 (fr) | Dispositif de suspension d'outils |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 11 |
|
ST | Notification of lapse |
Effective date: 20180430 |