ATA140199A - Interferometrische einrichtung zur messung der lage eines reflektierenden objektes - Google Patents
Interferometrische einrichtung zur messung der lage eines reflektierenden objektesInfo
- Publication number
- ATA140199A ATA140199A AT140199A AT140199A ATA140199A AT A140199 A ATA140199 A AT A140199A AT 140199 A AT140199 A AT 140199A AT 140199 A AT140199 A AT 140199A AT A140199 A ATA140199 A AT A140199A
- Authority
- AT
- Austria
- Prior art keywords
- measuring
- reflective object
- interferometric device
- interferometric
- reflective
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02082—Caused by speckles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
- H01S5/06213—Amplitude modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/06832—Stabilising during amplitude modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/0687—Stabilising the frequency of the laser
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT140199A AT407800B (de) | 1999-08-16 | 1999-08-16 | Interferometrische einrichtung zur messung der lage eines reflektierenden objektes |
DE2000138346 DE10038346A1 (de) | 1999-08-16 | 2000-08-05 | Interferometrische Einrichtung zur Messung der Lage eines reflektierenden Objektes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT140199A AT407800B (de) | 1999-08-16 | 1999-08-16 | Interferometrische einrichtung zur messung der lage eines reflektierenden objektes |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA140199A true ATA140199A (de) | 2000-10-15 |
AT407800B AT407800B (de) | 2001-06-25 |
Family
ID=3513100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT140199A AT407800B (de) | 1999-08-16 | 1999-08-16 | Interferometrische einrichtung zur messung der lage eines reflektierenden objektes |
Country Status (2)
Country | Link |
---|---|
AT (1) | AT407800B (de) |
DE (1) | DE10038346A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113587844A (zh) * | 2021-07-27 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | 移相干涉测量系统及测量方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005051245A (ja) | 2003-07-30 | 2005-02-24 | Asml Netherlands Bv | リソグラフィ装置 |
EP2196823B1 (de) * | 2008-12-12 | 2011-06-15 | Lambda: 4 Entwicklungen GmbH | Verfahren zur Bestimmung der Entfernung zwischen zwei Objekten |
US9215563B2 (en) | 2011-05-18 | 2015-12-15 | Lambda:4 Entwicklungen Gmbh | Method to determine the location of a receiver |
US9025141B1 (en) * | 2013-11-08 | 2015-05-05 | The Boeing Company | Position determination using synthetic wave laser ranging |
US20150131078A1 (en) * | 2013-11-08 | 2015-05-14 | The Boeing Company | Synthetic wave laser ranging sensors and methods |
EP3794307A4 (de) * | 2018-05-18 | 2022-03-16 | The Regents of The University of Michigan | Wegschwankungsüberwachung für frequenzmoduliertes interferometer |
-
1999
- 1999-08-16 AT AT140199A patent/AT407800B/de not_active IP Right Cessation
-
2000
- 2000-08-05 DE DE2000138346 patent/DE10038346A1/de not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113587844A (zh) * | 2021-07-27 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | 移相干涉测量系统及测量方法 |
Also Published As
Publication number | Publication date |
---|---|
DE10038346A1 (de) | 2001-06-13 |
AT407800B (de) | 2001-06-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |