ATA205492A - Interferometrische einrichtung zur messung der lage eines reflektierenden objektes - Google Patents

Interferometrische einrichtung zur messung der lage eines reflektierenden objektes

Info

Publication number
ATA205492A
ATA205492A AT0205492A AT205492A ATA205492A AT A205492 A ATA205492 A AT A205492A AT 0205492 A AT0205492 A AT 0205492A AT 205492 A AT205492 A AT 205492A AT A205492 A ATA205492 A AT A205492A
Authority
AT
Austria
Prior art keywords
measuring
reflective object
interferometric device
interferometric
reflective
Prior art date
Application number
AT0205492A
Other languages
English (en)
Other versions
AT399222B (de
Original Assignee
Tabarelli Werner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabarelli Werner filed Critical Tabarelli Werner
Priority to AT0205492A priority Critical patent/AT399222B/de
Priority to DE4335036A priority patent/DE4335036C2/de
Priority to GB9321426A priority patent/GB2271632B/en
Publication of ATA205492A publication Critical patent/ATA205492A/de
Priority to US08/335,596 priority patent/US5539520A/en
Application granted granted Critical
Publication of AT399222B publication Critical patent/AT399222B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT0205492A 1992-10-19 1992-10-19 Interferometrische einrichtung zur messung der lage eines reflektierenden objektes AT399222B (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT0205492A AT399222B (de) 1992-10-19 1992-10-19 Interferometrische einrichtung zur messung der lage eines reflektierenden objektes
DE4335036A DE4335036C2 (de) 1992-10-19 1993-10-14 Interferometrische Einrichtung zur Messung der Lage eines reflektierenden Objektes
GB9321426A GB2271632B (en) 1992-10-19 1993-10-18 Interferometric device
US08/335,596 US5539520A (en) 1992-10-19 1994-11-08 Interferometer using frequency modulation of the carrier frequency

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0205492A AT399222B (de) 1992-10-19 1992-10-19 Interferometrische einrichtung zur messung der lage eines reflektierenden objektes

Publications (2)

Publication Number Publication Date
ATA205492A true ATA205492A (de) 1994-08-15
AT399222B AT399222B (de) 1995-04-25

Family

ID=3526790

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0205492A AT399222B (de) 1992-10-19 1992-10-19 Interferometrische einrichtung zur messung der lage eines reflektierenden objektes

Country Status (4)

Country Link
US (1) US5539520A (de)
AT (1) AT399222B (de)
DE (1) DE4335036C2 (de)
GB (1) GB2271632B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5645351A (en) * 1992-05-20 1997-07-08 Hitachi, Ltd. Temperature measuring method using thermal expansion and an apparatus for carrying out the same
US5706084A (en) * 1995-09-14 1998-01-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Modulated source interferometry with combined amputude & frequency modulation
DE10247882B4 (de) * 2002-10-14 2005-03-10 Deutsch Zentr Luft & Raumfahrt Verfahren zum Verringern von bei optischer Freiraum-Kommunikation auftretenden Fading
JP2005051245A (ja) 2003-07-30 2005-02-24 Asml Netherlands Bv リソグラフィ装置
CZ304138B6 (cs) * 2012-05-19 2013-11-13 Ústav prístrojové techniky Akademie ved CR, v.v.i. Zpusob detekce interferencní fáze dvou interferujících laserových paprsku a zarízení pro provádení tohoto zpusobu
CN103162631A (zh) * 2013-03-21 2013-06-19 上海理工大学 光学测位移装置
CN103322926B (zh) * 2013-06-09 2016-04-27 中国科学院长春光学精密机械与物理研究所 信号传输过程中的周期性非线性误差或干扰消除法
CN103322922B (zh) * 2013-06-09 2016-01-13 中国科学院长春光学精密机械与物理研究所 基于fft算法消除非线性误差的光外差干涉法
CN103322923B (zh) * 2013-06-09 2016-04-27 中国科学院长春光学精密机械与物理研究所 基于方波均值法消除非线性误差的光外差干涉法
CN111670335A (zh) * 2018-01-31 2020-09-15 Asml荷兰有限公司 波长追踪系统、校准波长追踪系统的方法、光刻设备、确定可运动对象的绝对位置的方法、以及干涉仪系统
CN109239384B (zh) * 2018-10-23 2021-02-09 北京控制工程研究所 一种二维三维融合的非合作目标转速转轴测量方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD139760B1 (de) * 1978-11-27 1980-12-10 Werner Krieg Interferometrische einrichtung zum messen von abstaenden und abstandsaenderungen
FR2482325A1 (fr) * 1980-05-08 1981-11-13 Thomson Csf Systeme optique d'observation en temps reel a balayage
US4552457A (en) * 1983-02-01 1985-11-12 Giallorenzi Thomas G Fiber optic interferometer using two wavelengths or variable wavelength
DE3334460A1 (de) * 1983-09-23 1985-04-11 Fa. Carl Zeiss, 7920 Heidenheim Mehrkoordinaten-messmaschine
JPS61202128A (ja) * 1985-03-06 1986-09-06 Hitachi Ltd 半導体レ−ザヘテロダイン干渉計
US4688940A (en) * 1985-03-12 1987-08-25 Zygo Corporation Heterodyne interferometer system
KR900002117B1 (ko) * 1985-03-28 1990-04-02 시부야 고오교오 가부시끼가이샤 레이저 광선을 이용한 거리측정방법과 장치
US4633715A (en) * 1985-05-08 1987-01-06 Canadian Patents And Development Limited - Societe Canadienne Des Brevets Et D'exploitation Limitee Laser heterodyne interferometric method and system for measuring ultrasonic displacements
CH678108A5 (de) * 1987-04-28 1991-07-31 Wild Leitz Ag
US4978219A (en) * 1988-05-06 1990-12-18 Brother Kogyo Kabushiki Kaisha Surface roughness measuring apparatus utilizing deflectable laser beams
US4886363A (en) * 1988-09-06 1989-12-12 Eastman Kodak Company Quadratic frequency modulated absolute distance measuring interferometry
DE3906118A1 (de) * 1989-02-28 1990-08-30 Bosch Gmbh Robert Vorrichtung zur interferometrischen erfassung von oberflaechenstrukturen
DE59001953D1 (en) * 1989-06-07 1993-08-19 Tabarelli Werner Interferometeranordnung.
JP2808136B2 (ja) * 1989-06-07 1998-10-08 キヤノン株式会社 測長方法及び装置
US5298970A (en) * 1990-03-20 1994-03-29 Kabushiki Kaisha Kobe Seiko Sho Sample evaluating method by using thermal expansion displacement
US5172186A (en) * 1990-07-03 1992-12-15 Konica Corporation Laser interferometry length measuring an apparatus employing a beam slitter
IT1246572B (it) * 1991-02-27 1994-11-24 Cise Spa Procedimento e apparecchio per misure interferometriche assolute di grandezze fisiche.
JP2821817B2 (ja) * 1991-03-11 1998-11-05 コニカ株式会社 差動型干渉プリズム
US5155550A (en) * 1991-05-10 1992-10-13 Barger R L Accurate correlator of rotational and translational motions and control method and apparatus
US5412474A (en) * 1992-05-08 1995-05-02 Smithsonian Institution System for measuring distance between two points using a variable frequency coherent source

Also Published As

Publication number Publication date
AT399222B (de) 1995-04-25
DE4335036A1 (de) 1994-04-21
GB2271632A (en) 1994-04-20
DE4335036C2 (de) 1998-01-15
US5539520A (en) 1996-07-23
GB9321426D0 (en) 1993-12-08
GB2271632B (en) 1996-07-24

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Legal Events

Date Code Title Description
EIH Change in the person of patent owner
ELJ Ceased due to non-payment of the annual fee
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties