FR2839152B1 - Capteur de presion avec une membrane resistant a la corrosion - Google Patents

Capteur de presion avec une membrane resistant a la corrosion

Info

Publication number
FR2839152B1
FR2839152B1 FR0304964A FR0304964A FR2839152B1 FR 2839152 B1 FR2839152 B1 FR 2839152B1 FR 0304964 A FR0304964 A FR 0304964A FR 0304964 A FR0304964 A FR 0304964A FR 2839152 B1 FR2839152 B1 FR 2839152B1
Authority
FR
France
Prior art keywords
corrosion
pressure sensor
resistant membrane
membrane
resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0304964A
Other languages
English (en)
Other versions
FR2839152A1 (fr
Inventor
Hironobu Baba
Yukihiro Kato
Hiroshi Nomura
Haruhisa Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2839152A1 publication Critical patent/FR2839152A1/fr
Application granted granted Critical
Publication of FR2839152B1 publication Critical patent/FR2839152B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR0304964A 2002-04-24 2003-04-23 Capteur de presion avec une membrane resistant a la corrosion Expired - Fee Related FR2839152B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002122335A JP2003315193A (ja) 2002-04-24 2002-04-24 圧力センサ

Publications (2)

Publication Number Publication Date
FR2839152A1 FR2839152A1 (fr) 2003-10-31
FR2839152B1 true FR2839152B1 (fr) 2005-09-30

Family

ID=29208086

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0304964A Expired - Fee Related FR2839152B1 (fr) 2002-04-24 2003-04-23 Capteur de presion avec une membrane resistant a la corrosion

Country Status (5)

Country Link
US (1) US6813953B2 (fr)
JP (1) JP2003315193A (fr)
CN (1) CN1207543C (fr)
DE (1) DE10318660A1 (fr)
FR (1) FR2839152B1 (fr)

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DE10223357A1 (de) * 2002-05-25 2003-12-04 Bosch Gmbh Robert Vorrichtung zur Druckmessung
US7243550B2 (en) * 2002-11-05 2007-07-17 Endress + Hauser Gmbh + Co. Kg Relative pressure sensor having an atmosphere-side damper
JP2004198147A (ja) * 2002-12-16 2004-07-15 Toyoda Mach Works Ltd 圧力センサ
US20050081638A1 (en) * 2003-09-05 2005-04-21 Couch Philip R. Sensing diaphragm for a differential pressure sensor with over-pressure protection and methods
JP2005257498A (ja) * 2004-03-12 2005-09-22 Denso Corp 圧力センサ
JP4301048B2 (ja) * 2004-03-19 2009-07-22 株式会社デンソー 圧力センサおよびその製造方法
JP4111158B2 (ja) * 2004-03-19 2008-07-02 株式会社デンソー 圧力センサ
JP2005308397A (ja) * 2004-04-16 2005-11-04 Saginomiya Seisakusho Inc 圧力センサ
US7073375B2 (en) * 2004-07-02 2006-07-11 Honeywell International Inc. Exhaust back pressure sensor using absolute micromachined pressure sense die
US7302855B2 (en) * 2004-10-28 2007-12-04 Denso Corporation Pressure detection device
JP4556784B2 (ja) * 2005-06-27 2010-10-06 株式会社デンソー 圧力センサ
JP2007017223A (ja) * 2005-07-06 2007-01-25 Denso Corp 圧力センサ
US20070052047A1 (en) * 2005-09-01 2007-03-08 Costas Hadjiloucas Metal contact systems for semiconductor-based pressure sensors exposed to harsh chemical and thermal environments
US7421903B2 (en) * 2005-10-27 2008-09-09 Amnon Brosh Internal pressure simulator for pressure sensors
JP4867440B2 (ja) * 2006-04-07 2012-02-01 株式会社デンソー 圧力センサ
JP4848904B2 (ja) * 2006-09-13 2011-12-28 株式会社デンソー 圧力センサ
JP4835353B2 (ja) * 2006-09-27 2011-12-14 株式会社デンソー 圧力センサ
US7723625B1 (en) * 2006-11-01 2010-05-25 Mold-A-Matic Ultra low pressure switch system
JP5142742B2 (ja) * 2007-02-16 2013-02-13 株式会社デンソー 圧力センサおよびその製造方法
KR101391925B1 (ko) * 2007-02-28 2014-05-07 페어차일드코리아반도체 주식회사 반도체 패키지 및 이를 제조하기 위한 반도체 패키지 금형
US7661317B2 (en) * 2007-07-03 2010-02-16 Kulite Semiconductor Products,Inc. High pressure transducer having an H shaped cross-section
US7578194B1 (en) * 2008-02-11 2009-08-25 Sensata Technologies, Inc. Differential fluid pressure measurement apparatus
US8191424B2 (en) * 2008-02-14 2012-06-05 Kulite Semiconductor Products, Inc. Low differential pressure transducer
US7743662B2 (en) * 2008-02-14 2010-06-29 Kulite Semiconductor Products, Inc. Low differential pressure transducer
US7866216B2 (en) * 2008-02-14 2011-01-11 Kulite Semiconductor Products, Inc. Low differential pressure transducer
DE102008021091A1 (de) * 2008-04-28 2009-10-29 Epcos Ag Drucksensor
DE102008002671A1 (de) * 2008-06-26 2009-12-31 Robert Bosch Gmbh Drucksensoranordnung
DE102008043644A1 (de) * 2008-11-11 2010-05-12 Robert Bosch Gmbh Drucksensor
SG173129A1 (en) * 2009-03-06 2011-08-29 Dwyer Instr Pressure gage with magnetically coupled diaphragm
DE102010043043A1 (de) * 2010-10-28 2012-05-03 Endress + Hauser Gmbh + Co. Kg Druckmesswandler
KR101305198B1 (ko) 2011-12-09 2013-09-26 현대자동차주식회사 입자상물질 센서유닛
US20140102210A1 (en) * 2012-10-11 2014-04-17 Continental Automotive Systems, Inc. Pressure Sensor With Robustness Against Mounting Stress
EP2910918B1 (fr) * 2012-10-17 2018-07-25 Kabushiki Kaisha Saginomiya Seisakusho Capteur de pression, et unité de détection le comportant
US8701496B1 (en) * 2013-02-27 2014-04-22 Honeywell International Inc. Systems and methods for a pressure sensor having a two layer die structure
DE102015210113A1 (de) * 2015-06-02 2016-12-29 BSH Hausgeräte GmbH Haushaltsgerät mit Differenzdrucksensor
US10215655B2 (en) * 2015-12-31 2019-02-26 Honeywell International Inc. Pressure sensor assembly
US10996127B2 (en) 2016-02-25 2021-05-04 Citizen Finedevice Co., Ltd. Pressure detection device and pressure detection system having first and second housings electrically insulated from each other
EP3211394B1 (fr) 2016-02-29 2021-03-31 Melexis Technologies NV Capteur de pression à semi-conducteurs pour application de milieux hostiles
US10466125B2 (en) * 2016-11-11 2019-11-05 Measurement Specialties Inc. Pressure sensor sub assembly and fabrication
JP7130358B2 (ja) * 2017-08-23 2022-09-05 セイコーインスツル株式会社 金属弾性素子およびそれを用いたダイヤフラム
CN107655618A (zh) * 2017-09-23 2018-02-02 南京律智诚专利技术开发有限公司 一种耐腐蚀压力变送器的生产方法
CN114764039A (zh) * 2020-12-31 2022-07-19 杭州三花研究院有限公司 传感器装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177147U (fr) 1981-05-06 1982-11-09
JPH0629821B2 (ja) * 1983-09-16 1994-04-20 株式会社日立製作所 複合機能形差圧センサ
JPS6183930A (ja) * 1984-09-29 1986-04-28 Toshiba Corp 圧力・差圧伝送器
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
JP3084304B2 (ja) * 1991-07-04 2000-09-04 長野計器株式会社 圧力センサの金属製ダイヤフラム
JP2984420B2 (ja) * 1991-07-09 1999-11-29 日立建機株式会社 差圧センサ
JPH084918A (ja) 1994-06-17 1996-01-12 Hitachi Metals Ltd ダイアフラムシール弁及びその金属ダイアフラム
JPH10122995A (ja) 1996-10-24 1998-05-15 Yokogawa Electric Corp 差圧測定装置
US6550337B1 (en) * 2000-01-19 2003-04-22 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
JP2001272296A (ja) * 2000-03-23 2001-10-05 Denso Corp 圧力センサ
JP3410711B2 (ja) * 2000-07-10 2003-05-26 株式会社テムテック研究所 耐腐食性のダイヤフラム圧力センサ
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) * 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
JP4320963B2 (ja) * 2000-11-27 2009-08-26 株式会社デンソー 圧力センサ

Also Published As

Publication number Publication date
CN1207543C (zh) 2005-06-22
DE10318660A1 (de) 2003-11-06
JP2003315193A (ja) 2003-11-06
US20030200813A1 (en) 2003-10-30
FR2839152A1 (fr) 2003-10-31
CN1453566A (zh) 2003-11-05
US6813953B2 (en) 2004-11-09

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ST Notification of lapse

Effective date: 20081231