FR2837217B1 - Revetement composite de mosi2-si3n4 et son procede de fabrication - Google Patents

Revetement composite de mosi2-si3n4 et son procede de fabrication

Info

Publication number
FR2837217B1
FR2837217B1 FR0302002A FR0302002A FR2837217B1 FR 2837217 B1 FR2837217 B1 FR 2837217B1 FR 0302002 A FR0302002 A FR 0302002A FR 0302002 A FR0302002 A FR 0302002A FR 2837217 B1 FR2837217 B1 FR 2837217B1
Authority
FR
France
Prior art keywords
mosi2
manufacturing
same
composite coating
si3n4 composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0302002A
Other languages
English (en)
Other versions
FR2837217A1 (fr
Inventor
Jae Soo Kim
Kyeung Ho Kim
Ji Young Byun
Jin Kook Yoon
Doo Yong Kim
Jong Kown Lee
Jong Chul Shin
Dae Ho Rho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Advanced Institute of Science and Technology KAIST
Korea Institute of Science and Technology KIST
Original Assignee
Korea Advanced Institute of Science and Technology KAIST
Korea Institute of Science and Technology KIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Advanced Institute of Science and Technology KAIST, Korea Institute of Science and Technology KIST filed Critical Korea Advanced Institute of Science and Technology KAIST
Publication of FR2837217A1 publication Critical patent/FR2837217A1/fr
Application granted granted Critical
Publication of FR2837217B1 publication Critical patent/FR2837217B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C12/00—Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
FR0302002A 2002-03-14 2003-02-19 Revetement composite de mosi2-si3n4 et son procede de fabrication Expired - Fee Related FR2837217B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2002-0013914A KR100454715B1 (ko) 2002-03-14 2002-03-14 ＭｏＳｉ₂―Ｓｉ₃Ｎ₄복합피복층 및 그 제조방법

Publications (2)

Publication Number Publication Date
FR2837217A1 FR2837217A1 (fr) 2003-09-19
FR2837217B1 true FR2837217B1 (fr) 2006-11-24

Family

ID=27786029

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0302002A Expired - Fee Related FR2837217B1 (fr) 2002-03-14 2003-02-19 Revetement composite de mosi2-si3n4 et son procede de fabrication

Country Status (4)

Country Link
US (2) US20030175558A1 (fr)
JP (1) JP3793157B2 (fr)
KR (1) KR100454715B1 (fr)
FR (1) FR2837217B1 (fr)

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KR100603020B1 (ko) * 2004-07-01 2006-07-24 한국과학기술연구원 ＭｏＳｉ₂―ＳｉＣ 나노 복합 피복층 및 그 제조방법
EP1951924A4 (fr) * 2005-11-07 2011-01-05 Micropyretics Heaters Int Materiaux ayant une emissivite amelioree et procedes de fabrication de ceux-ci
US7763356B2 (en) * 2006-03-13 2010-07-27 United Technologies Corporation Bond coating and thermal barrier compositions, processes for applying both, and their coated articles
US20070231595A1 (en) * 2006-03-28 2007-10-04 Siemens Power Generation, Inc. Coatings for molybdenum-based substrates
CN100540744C (zh) * 2007-12-18 2009-09-16 中南大学 铌合金高温抗氧化硅化物涂层的制备方法
FR2965568B1 (fr) * 2010-09-30 2012-10-19 Onera (Off Nat Aerospatiale) Procede pour former un revetement protecteur contre l'oxydation a haute temperature sur un materiau composite refractaire a base de silicium et de niobium
CN102534469B (zh) * 2011-11-25 2013-11-27 厦门虹鹭钨钼工业有限公司 一种高温抗氧化涂层钼材料的制备方法
CN102644054B (zh) * 2012-04-28 2013-12-18 南京航空航天大学 钛合金表面制备非晶-纳米晶二硅化钼基耐磨耐蚀涂层的复合表面处理工艺
US10093810B2 (en) 2013-03-15 2018-10-09 General Electric Company Composite coatings and methods therefor
CN105631148B (zh) * 2015-12-31 2019-05-14 南京航空航天大学 应力氧化环境下单向陶瓷基复合材料力学性能分析方法
CN107675122B (zh) * 2017-11-20 2019-11-12 北京金轮坤天特种机械有限公司 一种锆铌合金表面非化学计量比氧化膜及其制备方法
RU2705185C1 (ru) * 2018-12-05 2019-11-05 Вячеслав Максимович Бушуев Способ силицирования крупногабаритных изделий и реторта устройства для его осуществления со стыками низкой проницаемости
CN109321865B (zh) * 2018-12-06 2020-12-15 江苏丰东热技术有限公司 一种在钛合金表面形成MoSi2抗氧化涂层的方法
CN109722665B (zh) * 2018-12-28 2021-07-20 河南科技大学 一种钼基材料表面防护涂层的制备方法
CN112225567B (zh) * 2020-10-29 2023-01-17 西北工业大学 一种通过料浆烧结制备硅化钼涂层的方法
CN113086985B (zh) * 2021-03-25 2022-04-15 北京科技大学 一种无含硫气体排放的低成本制备硅化钼的方法
CN113213973B (zh) * 2021-05-25 2022-03-11 哈尔滨工业大学 一种控制高发射率热防护涂层烧结气氛的方法
CN115321541B (zh) * 2022-07-27 2023-06-09 南昌航空大学 一种MoSi2@Nb核壳结构材料及其制备方法
CN116332654B (zh) * 2023-03-23 2024-02-09 西安理工大学 一种具有类洋葱微结构的BN/SiBN/Si3N4/Si2N2O/Si3N4复合材料的制备方法

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Publication number Priority date Publication date Assignee Title
US2865088A (en) 1952-10-16 1958-12-23 Fansteel Metallurgical Corp Refractory metal bodies
DE1960836A1 (de) 1969-12-04 1971-06-09 Erich Prof Dr Fitzer Oxydische Deckschicht
US4699801A (en) * 1985-02-28 1987-10-13 Kabuskiki Kaisha Toshiba Semiconductor device
US5472487A (en) * 1991-01-18 1995-12-05 United Technologies Corporation Molybdenum disilicide based materials with reduced coefficients of thermal expansion
US5292692A (en) * 1992-01-13 1994-03-08 United Technologies Corporation Method for improving ceramic fiber reinforced molybdenum disilicide composites
US5281565A (en) * 1992-01-13 1994-01-25 United Technologies Corporation Molybdenum disilicide matrix composites reinforced with refractory metal fibers
US5300322A (en) * 1992-03-10 1994-04-05 Martin Marietta Energy Systems, Inc. Molybdenum enhanced low-temperature deposition of crystalline silicon nitride
US5429997A (en) * 1993-04-07 1995-07-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Pest resistant MoSi2 materials and method of making
DE69706587T2 (de) * 1996-03-29 2002-07-11 Kabushiki Kaisha Toshiba, Kawasaki Keramikmatrix-Verbundwerkstoff und Verfahren zur Herstellung desselben
JP3657800B2 (ja) * 1998-02-20 2005-06-08 株式会社リケン 二珪化モリブデン系複合セラミックス発熱体及びその製造方法
US6200691B1 (en) * 1998-04-20 2001-03-13 Colorado School Of Mines Oxidation resistance coating system for refractory metals
US6265080B1 (en) * 1999-12-22 2001-07-24 United Technologies Corporation Pest resistant molybdenum disilicide type materials
US6288000B1 (en) * 2000-02-09 2001-09-11 Ohio Aerospace Institute Pest resistant MoSi2-based materials containing in-situ grown β-Si3N4whiskers
JP2002020160A (ja) * 2000-06-30 2002-01-23 Isuzu Ceramics Res Inst Co Ltd 耐摩耗性セラミツクス複合材料とその製造方法

Also Published As

Publication number Publication date
KR100454715B1 (ko) 2004-11-05
US7622152B2 (en) 2009-11-24
US20060251912A1 (en) 2006-11-09
JP2003268529A (ja) 2003-09-25
JP3793157B2 (ja) 2006-07-05
FR2837217A1 (fr) 2003-09-19
KR20030074918A (ko) 2003-09-22
US20030175558A1 (en) 2003-09-18

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20131031