FR2829507B1 - Appareil et procede de depot en phase gazeuse par processus chimique - Google Patents

Appareil et procede de depot en phase gazeuse par processus chimique

Info

Publication number
FR2829507B1
FR2829507B1 FR0211137A FR0211137A FR2829507B1 FR 2829507 B1 FR2829507 B1 FR 2829507B1 FR 0211137 A FR0211137 A FR 0211137A FR 0211137 A FR0211137 A FR 0211137A FR 2829507 B1 FR2829507 B1 FR 2829507B1
Authority
FR
France
Prior art keywords
gas phase
chemical process
phase deposition
deposition
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0211137A
Other languages
English (en)
Other versions
FR2829507A1 (fr
Inventor
Bruce M Warnes
Andrew L Purvis
Daniel L Near
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Howmet Corp
Original Assignee
Howmet Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Howmet Research Corp filed Critical Howmet Research Corp
Publication of FR2829507A1 publication Critical patent/FR2829507A1/fr
Application granted granted Critical
Publication of FR2829507B1 publication Critical patent/FR2829507B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/4557—Heated nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR0211137A 2001-09-10 2002-09-09 Appareil et procede de depot en phase gazeuse par processus chimique Expired - Lifetime FR2829507B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/950,013 US6793966B2 (en) 2001-09-10 2001-09-10 Chemical vapor deposition apparatus and method

Publications (2)

Publication Number Publication Date
FR2829507A1 FR2829507A1 (fr) 2003-03-14
FR2829507B1 true FR2829507B1 (fr) 2006-06-09

Family

ID=25489831

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0211137A Expired - Lifetime FR2829507B1 (fr) 2001-09-10 2002-09-09 Appareil et procede de depot en phase gazeuse par processus chimique

Country Status (6)

Country Link
US (2) US6793966B2 (fr)
JP (1) JP4327427B2 (fr)
CA (1) CA2402040C (fr)
DE (1) DE10241964B4 (fr)
FR (1) FR2829507B1 (fr)
GB (1) GB2379450B (fr)

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Also Published As

Publication number Publication date
CA2402040A1 (fr) 2003-03-10
US20030049374A1 (en) 2003-03-13
GB0220898D0 (en) 2002-10-16
GB2379450B (en) 2005-06-15
DE10241964A1 (de) 2003-03-27
US6793966B2 (en) 2004-09-21
JP4327427B2 (ja) 2009-09-09
CA2402040C (fr) 2011-05-10
DE10241964B4 (de) 2019-06-27
US20050000439A1 (en) 2005-01-06
US6911234B2 (en) 2005-06-28
JP2003113473A (ja) 2003-04-18
FR2829507A1 (fr) 2003-03-14
GB2379450A (en) 2003-03-12

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