FR2824543B1 - Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes - Google Patents

Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes

Info

Publication number
FR2824543B1
FR2824543B1 FR0106756A FR0106756A FR2824543B1 FR 2824543 B1 FR2824543 B1 FR 2824543B1 FR 0106756 A FR0106756 A FR 0106756A FR 0106756 A FR0106756 A FR 0106756A FR 2824543 B1 FR2824543 B1 FR 2824543B1
Authority
FR
France
Prior art keywords
ovens
loading
silicon wafers
cassette station
unloading silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0106756A
Other languages
English (en)
Other versions
FR2824543A1 (fr
Inventor
Yvon Pellegrin
Claude Giral
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEMCO SA
Original Assignee
SEMCO SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0106756A priority Critical patent/FR2824543B1/fr
Application filed by SEMCO SA filed Critical SEMCO SA
Priority to JP2002590393A priority patent/JP2004531890A/ja
Priority to AU2002302725A priority patent/AU2002302725A1/en
Priority to CNB028135970A priority patent/CN1295744C/zh
Priority to KR10-2003-7014784A priority patent/KR20040012825A/ko
Priority to EP02730403A priority patent/EP1388163A2/fr
Priority to PCT/FR2002/001619 priority patent/WO2002093617A2/fr
Priority to US10/477,425 priority patent/US7326021B2/en
Publication of FR2824543A1 publication Critical patent/FR2824543A1/fr
Application granted granted Critical
Publication of FR2824543B1 publication Critical patent/FR2824543B1/fr
Priority to HK04110395A priority patent/HK1067787A1/xx
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR0106756A 2001-05-14 2001-05-14 Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes Expired - Fee Related FR2824543B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0106756A FR2824543B1 (fr) 2001-05-14 2001-05-14 Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes
AU2002302725A AU2002302725A1 (en) 2001-05-14 2002-05-14 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station
CNB028135970A CN1295744C (zh) 2001-05-14 2002-05-14 用于把硅片从多盒站装载及卸入炉子的装置
KR10-2003-7014784A KR20040012825A (ko) 2001-05-14 2002-05-14 다중카세트 스테이션으로부터 오븐내부로 실리콘웨이퍼를장착하고 분리하기 위한 장치
JP2002590393A JP2004531890A (ja) 2001-05-14 2002-05-14 複数カセット式ステーションから炉へのシリコンウェーハのローディングおよびアンローディング用装置
EP02730403A EP1388163A2 (fr) 2001-05-14 2002-05-14 Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes
PCT/FR2002/001619 WO2002093617A2 (fr) 2001-05-14 2002-05-14 Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes
US10/477,425 US7326021B2 (en) 2001-05-14 2002-05-14 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station
HK04110395A HK1067787A1 (en) 2001-05-14 2004-12-31 Device for loading and unloading silicon wafers inan oven from a multiplecassette station

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0106756A FR2824543B1 (fr) 2001-05-14 2001-05-14 Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes

Publications (2)

Publication Number Publication Date
FR2824543A1 FR2824543A1 (fr) 2002-11-15
FR2824543B1 true FR2824543B1 (fr) 2003-10-17

Family

ID=8863563

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0106756A Expired - Fee Related FR2824543B1 (fr) 2001-05-14 2001-05-14 Dispositif de chargement et de dechargement de plaquettes de silicium dans des fours a partir d'une station multi-cassettes

Country Status (9)

Country Link
US (1) US7326021B2 (fr)
EP (1) EP1388163A2 (fr)
JP (1) JP2004531890A (fr)
KR (1) KR20040012825A (fr)
CN (1) CN1295744C (fr)
AU (1) AU2002302725A1 (fr)
FR (1) FR2824543B1 (fr)
HK (1) HK1067787A1 (fr)
WO (1) WO2002093617A2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101353222B (zh) * 2007-07-26 2010-12-01 张彩根 悬臂石英桨的制作方法及产品
JP5050761B2 (ja) * 2007-10-03 2012-10-17 東京エレクトロン株式会社 被処理体の処理システム及び被処理体の熱処理方法
WO2012127123A1 (fr) 2011-03-18 2012-09-27 Semco Engineering Sa Support de plaquettes de silicium et procédé de traitement de ces plaquettes
CN102760676B (zh) * 2012-05-18 2015-01-21 南京华伯仪器科技有限公司 一种硅片装卸篮装置
CN104391478B (zh) * 2014-09-18 2017-02-15 上海先进半导体制造股份有限公司 水平扩散炉的进舟系统及其马达电流的监控装置
CN108190345B (zh) * 2018-03-02 2024-06-18 三和盛电子科技（东莞）有限公司 一种用于smt料盘的自动存储设备
CN109531399B (zh) * 2018-11-13 2021-02-05 杭州中为光电技术有限公司 一种用于多晶硅块不同高度检测及抓取的方法及其组件
CN112678093B (zh) * 2020-12-29 2022-02-01 中北大学 一种车载运动平台及自动对接装置
CN113394145B (zh) * 2021-05-07 2022-08-19 拉普拉斯(无锡)半导体科技有限公司 一种硅片的导片系统
CN118629923A (zh) * 2023-03-02 2024-09-10 江苏微导纳米科技股份有限公司 一种上下料系统、载料舟及吸盘组件
CN116666268B (zh) * 2023-05-18 2023-12-01 江苏亚电科技有限公司 一种槽内晶圆篮故障排除方法及装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4568234A (en) * 1983-05-23 1986-02-04 Asq Boats, Inc. Wafer transfer apparatus
US4728246A (en) * 1986-05-16 1988-03-01 Thermco Systems, Inc. Wafer boat transfer tool
US5030057A (en) * 1987-11-06 1991-07-09 Tel Sagami Limited Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer
US5193969A (en) * 1991-05-20 1993-03-16 Fortrend Engineering Corporation Wafer transfer machine
US5527390A (en) * 1993-03-19 1996-06-18 Tokyo Electron Kabushiki Treatment system including a plurality of treatment apparatus
US5544421A (en) * 1994-04-28 1996-08-13 Semitool, Inc. Semiconductor wafer processing system
JP3654684B2 (ja) * 1995-05-01 2005-06-02 東京エレクトロン株式会社 処理方法及び処理装置
JP3576346B2 (ja) * 1996-03-25 2004-10-13 信越半導体株式会社 ウェーハ移載装置及び方法
US6203582B1 (en) * 1996-07-15 2001-03-20 Semitool, Inc. Modular semiconductor workpiece processing tool
US5820266A (en) * 1996-12-10 1998-10-13 Fedak; Tibor J. Travelling thermocouple method & apparatus

Also Published As

Publication number Publication date
WO2002093617A3 (fr) 2003-02-27
WO2002093617A2 (fr) 2002-11-21
KR20040012825A (ko) 2004-02-11
US7326021B2 (en) 2008-02-05
HK1067787A1 (en) 2005-04-15
AU2002302725A1 (en) 2002-11-25
JP2004531890A (ja) 2004-10-14
CN1524286A (zh) 2004-08-25
FR2824543A1 (fr) 2002-11-15
CN1295744C (zh) 2007-01-17
US20040191027A1 (en) 2004-09-30
EP1388163A2 (fr) 2004-02-11

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Effective date: 20090119