CN101353222B - 悬臂石英桨的制作方法及产品 - Google Patents
悬臂石英桨的制作方法及产品 Download PDFInfo
- Publication number
- CN101353222B CN101353222B CN2007102011778A CN200710201177A CN101353222B CN 101353222 B CN101353222 B CN 101353222B CN 2007102011778 A CN2007102011778 A CN 2007102011778A CN 200710201177 A CN200710201177 A CN 200710201177A CN 101353222 B CN101353222 B CN 101353222B
- Authority
- CN
- China
- Prior art keywords
- quartz
- oar
- cantilever
- cantalever
- anneal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 49
- 239000010453 quartz Substances 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title description 2
- 238000000137 annealing Methods 0.000 claims abstract description 17
- 238000005245 sintering Methods 0.000 claims abstract description 10
- 239000005350 fused silica glass Substances 0.000 claims description 12
- 230000002035 prolonged effect Effects 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000003245 working effect Effects 0.000 description 4
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007102011778A CN101353222B (zh) | 2007-07-26 | 2007-07-26 | 悬臂石英桨的制作方法及产品 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007102011778A CN101353222B (zh) | 2007-07-26 | 2007-07-26 | 悬臂石英桨的制作方法及产品 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101353222A CN101353222A (zh) | 2009-01-28 |
CN101353222B true CN101353222B (zh) | 2010-12-01 |
Family
ID=40306280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007102011778A Expired - Fee Related CN101353222B (zh) | 2007-07-26 | 2007-07-26 | 悬臂石英桨的制作方法及产品 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101353222B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110127993A (zh) * | 2019-05-17 | 2019-08-16 | 湖州东科电子石英有限公司 | 不透明石英板与透明石英棒的焊接工艺 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN88211587U (zh) * | 1988-04-01 | 1988-12-28 | 上海市交通大学 | 半导体密封磁力传动快速退火装置 |
CN2295273Y (zh) * | 1996-06-21 | 1998-10-21 | 北京大学 | 在线淀积lpcvd多晶硅石英系统保护层装置 |
US6190113B1 (en) * | 1997-04-30 | 2001-02-20 | Applied Materials, Inc. | Quartz pin lift for single wafer chemical vapor deposition/etch process chamber |
CN1524286A (zh) * | 2001-05-14 | 2004-08-25 | ��ķ�ƹ��̹ɷ�����˾ | 用于把硅片从多盒站装载及卸入炉子的装置 |
-
2007
- 2007-07-26 CN CN2007102011778A patent/CN101353222B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN88211587U (zh) * | 1988-04-01 | 1988-12-28 | 上海市交通大学 | 半导体密封磁力传动快速退火装置 |
CN2295273Y (zh) * | 1996-06-21 | 1998-10-21 | 北京大学 | 在线淀积lpcvd多晶硅石英系统保护层装置 |
US6190113B1 (en) * | 1997-04-30 | 2001-02-20 | Applied Materials, Inc. | Quartz pin lift for single wafer chemical vapor deposition/etch process chamber |
CN1524286A (zh) * | 2001-05-14 | 2004-08-25 | ��ķ�ƹ��̹ɷ�����˾ | 用于把硅片从多盒站装载及卸入炉子的装置 |
Non-Patent Citations (2)
Title |
---|
JP特开平11-150074A 1999.06.02 |
JP特开平9-64158A 1997.03.07 |
Also Published As
Publication number | Publication date |
---|---|
CN101353222A (zh) | 2009-01-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1939333A1 (en) | Ferroelectric single crystal, surface acoustic filter making use of the same and process for producing the filter | |
JP5720499B2 (ja) | 基板用ガラスおよびガラス基板 | |
CN1109636A (zh) | 半导体衬底及其制造方法 | |
CN100560475C (zh) | 谐振型压力传感器芯片的局部真空封装方法 | |
JP6143283B2 (ja) | 陽極酸化を援用した形状創成エッチング方法及び高精度形状創成方法 | |
CN101353222B (zh) | 悬臂石英桨的制作方法及产品 | |
CN101108432A (zh) | 滚齿刀及其成型方法 | |
US12052921B2 (en) | Method for manufacturing a film on a flexible sheet | |
TWI277474B (en) | Electrolytic processing apparatus | |
JPWO2006134779A1 (ja) | シリコンウェーハ熱処理用石英ガラス治具及びその製造方法 | |
CN1258791C (zh) | 真空断路器和电极 | |
US20210237164A1 (en) | Diamond joined body and method for manufacturing diamond joined body | |
CN108037319A (zh) | 一种镍铬铝铁合金透射电镜样品的制备方法 | |
CN105190838B (zh) | 半导体用复合基板的操作基板以及半导体用复合基板 | |
US20060201205A1 (en) | Mold for molding optical lenses | |
US20060162388A1 (en) | Composite mold and method for making the same | |
TW201200643A (en) | Vitreous silica crucible and method of manufacturing silicon ingot | |
JP5570047B2 (ja) | 光学ガラス素子成形用金型およびその製造方法 | |
CN101556924A (zh) | 硅片键合分离方法 | |
TWI261890B (en) | Micro contact device and fabricating method thereof | |
JP2005226083A (ja) | 固体酸化物型燃料電池セパレータ用フェライト系ステンレス鋼 | |
CN103762099B (zh) | 一种银基复合氧化物电触点材料及其应用 | |
JP3775151B2 (ja) | ガラス成形治工具用Ni−W合金 | |
CN218427760U (zh) | 砂轮修复装置 | |
CN103714981B (zh) | 一种继电器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Huzhou Dongke Electronics Quartz Co., Ltd. Assignor: Zhang Caigen Contract record no.: 2011330000973 Denomination of invention: Method for manufacturing cantalever quartz oar and products Granted publication date: 20101201 License type: Exclusive License Open date: 20090128 Record date: 20110718 |
|
ASS | Succession or assignment of patent right |
Owner name: HUZHOU DONGKE ELECTRONICS QUARTZ CO., LTD. Free format text: FORMER OWNER: ZHANG CAIGEN Effective date: 20120109 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120109 Address after: 313009, Nanxun District, Huzhou Economic Development Zone on the west side of Feng Lu (Huzhou East Branch electronic quartz Co., Ltd.) Patentee after: Huzhou Dongke Electronics Quartz Co., Ltd. Address before: 313009 west side of Feng Lu, Nanxun Economic Development Zone, Huzhou, Zhejiang Patentee before: Zhang Caigen |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101201 Termination date: 20160726 |
|
CF01 | Termination of patent right due to non-payment of annual fee |