FR2750354B1 - Support de disque de polissage et procede de polissage - Google Patents

Support de disque de polissage et procede de polissage

Info

Publication number
FR2750354B1
FR2750354B1 FR9608076A FR9608076A FR2750354B1 FR 2750354 B1 FR2750354 B1 FR 2750354B1 FR 9608076 A FR9608076 A FR 9608076A FR 9608076 A FR9608076 A FR 9608076A FR 2750354 B1 FR2750354 B1 FR 2750354B1
Authority
FR
France
Prior art keywords
layer
polishing
disc
softer
disc holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9608076A
Other languages
English (en)
Other versions
FR2750354A1 (fr
Inventor
George Henri Broido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Plan SA
Original Assignee
Lam Plan SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9608076A priority Critical patent/FR2750354B1/fr
Application filed by Lam Plan SA filed Critical Lam Plan SA
Priority to DE69700374T priority patent/DE69700374T4/de
Priority to AT97401394T priority patent/ATE182829T1/de
Priority to DK97401394T priority patent/DK0816018T3/da
Priority to EP97401394A priority patent/EP0816018B1/fr
Priority to DE69700374A priority patent/DE69700374D1/de
Priority to ES97401394T priority patent/ES2136460T3/es
Priority to CA002208430A priority patent/CA2208430A1/fr
Priority to ZA975747A priority patent/ZA975747B/xx
Priority to JP9187357A priority patent/JPH1076471A/ja
Priority to US08/885,421 priority patent/US6048261A/en
Publication of FR2750354A1 publication Critical patent/FR2750354A1/fr
Application granted granted Critical
Publication of FR2750354B1 publication Critical patent/FR2750354B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
FR9608076A 1996-06-28 1996-06-28 Support de disque de polissage et procede de polissage Expired - Lifetime FR2750354B1 (fr)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FR9608076A FR2750354B1 (fr) 1996-06-28 1996-06-28 Support de disque de polissage et procede de polissage
AT97401394T ATE182829T1 (de) 1996-06-28 1997-06-18 Polierscheibe-träger und polierverfahren
DK97401394T DK0816018T3 (da) 1996-06-28 1997-06-18 Polerskivebærer og fremgangsmåde til polering
EP97401394A EP0816018B1 (fr) 1996-06-28 1997-06-18 Support de disque de polissage et procédé de polissage
DE69700374A DE69700374D1 (de) 1996-06-28 1997-06-18 Polierscheibe-Träger und Polierverfahren
ES97401394T ES2136460T3 (es) 1996-06-28 1997-06-18 Soporte de disco de pulido y procedimiento de pulido.
DE69700374T DE69700374T4 (de) 1996-06-28 1997-06-18 Polierscheibe-Träger und Polierverfahren
CA002208430A CA2208430A1 (fr) 1996-06-28 1997-06-19 Support de disque de polissage et procede de polissage
ZA975747A ZA975747B (en) 1996-06-28 1997-06-27 Polishing disc support and polishing process
JP9187357A JPH1076471A (ja) 1996-06-28 1997-06-27 研磨ディスク支持体及び研磨方法
US08/885,421 US6048261A (en) 1996-06-28 1997-06-30 Polishing disc support and polishing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9608076A FR2750354B1 (fr) 1996-06-28 1996-06-28 Support de disque de polissage et procede de polissage

Publications (2)

Publication Number Publication Date
FR2750354A1 FR2750354A1 (fr) 1998-01-02
FR2750354B1 true FR2750354B1 (fr) 1998-08-07

Family

ID=9493524

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9608076A Expired - Lifetime FR2750354B1 (fr) 1996-06-28 1996-06-28 Support de disque de polissage et procede de polissage

Country Status (10)

Country Link
US (1) US6048261A (fr)
EP (1) EP0816018B1 (fr)
JP (1) JPH1076471A (fr)
AT (1) ATE182829T1 (fr)
CA (1) CA2208430A1 (fr)
DE (2) DE69700374D1 (fr)
DK (1) DK0816018T3 (fr)
ES (1) ES2136460T3 (fr)
FR (1) FR2750354B1 (fr)
ZA (1) ZA975747B (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20106228U1 (de) 2001-04-09 2001-06-28 Jobra Metall Gmbh Trägerteller für Lamellenschleifscheiben
EP2439019A3 (fr) * 2010-10-05 2014-06-18 Black & Decker Inc. Disque abrasif universel

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2747343A (en) * 1954-09-02 1956-05-29 Contur Abrasive Company Inc Abrasive articles and the like and holders therefor
DE2013896A1 (en) * 1970-03-23 1971-10-14 Alkor Werk, Karl Lissmann KG, 8000 München Semiconductor lapping machine
JPH01193166A (ja) * 1988-01-28 1989-08-03 Showa Denko Kk 半導体ウェハ鏡面研磨用パッド
US5564965A (en) * 1993-12-14 1996-10-15 Shin-Etsu Handotai Co., Ltd. Polishing member and wafer polishing apparatus
DE69430762D1 (de) * 1994-05-10 2002-07-11 Asahi Chemical Ind Herstellungsverfahren eines Fluorharz Schaums
JPH09321001A (ja) * 1996-05-31 1997-12-12 Komatsu Electron Metals Co Ltd 半導体ウェハの研磨方法
JP2738392B1 (ja) * 1996-11-05 1998-04-08 日本電気株式会社 半導体装置の研磨装置及び研磨方法

Also Published As

Publication number Publication date
DK0816018T3 (da) 1999-12-06
ES2136460T3 (es) 1999-11-16
EP0816018B1 (fr) 1999-08-04
ATE182829T1 (de) 1999-08-15
JPH1076471A (ja) 1998-03-24
FR2750354A1 (fr) 1998-01-02
US6048261A (en) 2000-04-11
DE69700374T2 (de) 1999-11-25
CA2208430A1 (fr) 1997-12-28
ZA975747B (en) 1998-12-28
DE69700374D1 (de) 1999-09-09
DE69700374T4 (de) 2000-04-06
EP0816018A1 (fr) 1998-01-07

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