ES2136460T3 - Soporte de disco de pulido y procedimiento de pulido. - Google Patents
Soporte de disco de pulido y procedimiento de pulido.Info
- Publication number
- ES2136460T3 ES2136460T3 ES97401394T ES97401394T ES2136460T3 ES 2136460 T3 ES2136460 T3 ES 2136460T3 ES 97401394 T ES97401394 T ES 97401394T ES 97401394 T ES97401394 T ES 97401394T ES 2136460 T3 ES2136460 T3 ES 2136460T3
- Authority
- ES
- Spain
- Prior art keywords
- layer
- polishing
- disc
- disc support
- procedure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
ESTE SOPORTE DE DISCO DE PULIDO ESTA CONSTITUIDO POR UN CUERPO (1) QUE TIENE UN AGUJERO DE CENTRADO (4) EN EL CENTRO DE UNA DE LAS CARAS Y UN AGUJERO DE ARRASTRE (5) DESCENTRADO EN ESTA MISMA CARA. UN REVESTIMIENTO (6) DE MATERIAL MAS TIERNO QUE EL DEL CUERPO (1) SE APLICA SOBRE LA OTRA CARA (3).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9608076A FR2750354B1 (fr) | 1996-06-28 | 1996-06-28 | Support de disque de polissage et procede de polissage |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2136460T3 true ES2136460T3 (es) | 1999-11-16 |
Family
ID=9493524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES97401394T Expired - Lifetime ES2136460T3 (es) | 1996-06-28 | 1997-06-18 | Soporte de disco de pulido y procedimiento de pulido. |
Country Status (10)
Country | Link |
---|---|
US (1) | US6048261A (es) |
EP (1) | EP0816018B1 (es) |
JP (1) | JPH1076471A (es) |
AT (1) | ATE182829T1 (es) |
CA (1) | CA2208430A1 (es) |
DE (2) | DE69700374D1 (es) |
DK (1) | DK0816018T3 (es) |
ES (1) | ES2136460T3 (es) |
FR (1) | FR2750354B1 (es) |
ZA (1) | ZA975747B (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE20106228U1 (de) | 2001-04-09 | 2001-06-28 | Jobra Metall Gmbh | Trägerteller für Lamellenschleifscheiben |
EP2439019A3 (en) * | 2010-10-05 | 2014-06-18 | Black & Decker Inc. | Universal Abrasive Disc |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2747343A (en) * | 1954-09-02 | 1956-05-29 | Contur Abrasive Company Inc | Abrasive articles and the like and holders therefor |
DE2013896A1 (en) * | 1970-03-23 | 1971-10-14 | Alkor Werk, Karl Lissmann KG, 8000 München | Semiconductor lapping machine |
JPH01193166A (ja) * | 1988-01-28 | 1989-08-03 | Showa Denko Kk | 半導体ウェハ鏡面研磨用パッド |
US5564965A (en) * | 1993-12-14 | 1996-10-15 | Shin-Etsu Handotai Co., Ltd. | Polishing member and wafer polishing apparatus |
DE69430762D1 (de) * | 1994-05-10 | 2002-07-11 | Asahi Chemical Ind | Herstellungsverfahren eines Fluorharz Schaums |
JPH09321001A (ja) * | 1996-05-31 | 1997-12-12 | Komatsu Electron Metals Co Ltd | 半導体ウェハの研磨方法 |
JP2738392B1 (ja) * | 1996-11-05 | 1998-04-08 | 日本電気株式会社 | 半導体装置の研磨装置及び研磨方法 |
-
1996
- 1996-06-28 FR FR9608076A patent/FR2750354B1/fr not_active Expired - Lifetime
-
1997
- 1997-06-18 AT AT97401394T patent/ATE182829T1/de not_active IP Right Cessation
- 1997-06-18 DE DE69700374A patent/DE69700374D1/de not_active Expired - Lifetime
- 1997-06-18 DK DK97401394T patent/DK0816018T3/da active
- 1997-06-18 ES ES97401394T patent/ES2136460T3/es not_active Expired - Lifetime
- 1997-06-18 DE DE69700374T patent/DE69700374T4/de not_active Expired - Lifetime
- 1997-06-18 EP EP97401394A patent/EP0816018B1/fr not_active Expired - Lifetime
- 1997-06-19 CA CA002208430A patent/CA2208430A1/fr not_active Abandoned
- 1997-06-27 JP JP9187357A patent/JPH1076471A/ja active Pending
- 1997-06-27 ZA ZA975747A patent/ZA975747B/xx unknown
- 1997-06-30 US US08/885,421 patent/US6048261A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DK0816018T3 (da) | 1999-12-06 |
FR2750354B1 (fr) | 1998-08-07 |
EP0816018B1 (fr) | 1999-08-04 |
ATE182829T1 (de) | 1999-08-15 |
JPH1076471A (ja) | 1998-03-24 |
FR2750354A1 (fr) | 1998-01-02 |
US6048261A (en) | 2000-04-11 |
DE69700374T2 (de) | 1999-11-25 |
CA2208430A1 (fr) | 1997-12-28 |
ZA975747B (en) | 1998-12-28 |
DE69700374D1 (de) | 1999-09-09 |
DE69700374T4 (de) | 2000-04-06 |
EP0816018A1 (fr) | 1998-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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