ATE182829T1 - Polierscheibe-träger und polierverfahren - Google Patents

Polierscheibe-träger und polierverfahren

Info

Publication number
ATE182829T1
ATE182829T1 AT97401394T AT97401394T ATE182829T1 AT E182829 T1 ATE182829 T1 AT E182829T1 AT 97401394 T AT97401394 T AT 97401394T AT 97401394 T AT97401394 T AT 97401394T AT E182829 T1 ATE182829 T1 AT E182829T1
Authority
AT
Austria
Prior art keywords
layer
polishing
disc
softer
disc carrier
Prior art date
Application number
AT97401394T
Other languages
English (en)
Inventor
Georges Henri Broido
Original Assignee
Lam Plan Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Plan Sa filed Critical Lam Plan Sa
Application granted granted Critical
Publication of ATE182829T1 publication Critical patent/ATE182829T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
AT97401394T 1996-06-28 1997-06-18 Polierscheibe-träger und polierverfahren ATE182829T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9608076A FR2750354B1 (fr) 1996-06-28 1996-06-28 Support de disque de polissage et procede de polissage

Publications (1)

Publication Number Publication Date
ATE182829T1 true ATE182829T1 (de) 1999-08-15

Family

ID=9493524

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97401394T ATE182829T1 (de) 1996-06-28 1997-06-18 Polierscheibe-träger und polierverfahren

Country Status (10)

Country Link
US (1) US6048261A (de)
EP (1) EP0816018B1 (de)
JP (1) JPH1076471A (de)
AT (1) ATE182829T1 (de)
CA (1) CA2208430A1 (de)
DE (2) DE69700374D1 (de)
DK (1) DK0816018T3 (de)
ES (1) ES2136460T3 (de)
FR (1) FR2750354B1 (de)
ZA (1) ZA975747B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20106228U1 (de) 2001-04-09 2001-06-28 Jobra Metall Gmbh Trägerteller für Lamellenschleifscheiben
EP2939788A1 (de) * 2010-10-05 2015-11-04 Black & Decker Inc. Universal-schleifscheibe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2747343A (en) * 1954-09-02 1956-05-29 Contur Abrasive Company Inc Abrasive articles and the like and holders therefor
DE2013896A1 (en) * 1970-03-23 1971-10-14 Alkor Werk, Karl Lissmann KG, 8000 München Semiconductor lapping machine
JPH01193166A (ja) * 1988-01-28 1989-08-03 Showa Denko Kk 半導体ウェハ鏡面研磨用パッド
US5564965A (en) * 1993-12-14 1996-10-15 Shin-Etsu Handotai Co., Ltd. Polishing member and wafer polishing apparatus
DE69430762D1 (de) * 1994-05-10 2002-07-11 Asahi Chemical Ind Herstellungsverfahren eines Fluorharz Schaums
JPH09321001A (ja) * 1996-05-31 1997-12-12 Komatsu Electron Metals Co Ltd 半導体ウェハの研磨方法
JP2738392B1 (ja) * 1996-11-05 1998-04-08 日本電気株式会社 半導体装置の研磨装置及び研磨方法

Also Published As

Publication number Publication date
DK0816018T3 (da) 1999-12-06
EP0816018B1 (de) 1999-08-04
FR2750354B1 (fr) 1998-08-07
CA2208430A1 (fr) 1997-12-28
DE69700374T4 (de) 2000-04-06
FR2750354A1 (fr) 1998-01-02
DE69700374T2 (de) 1999-11-25
ES2136460T3 (es) 1999-11-16
ZA975747B (en) 1998-12-28
JPH1076471A (ja) 1998-03-24
DE69700374D1 (de) 1999-09-09
EP0816018A1 (de) 1998-01-07
US6048261A (en) 2000-04-11

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee