FR2665262B1 - Appareil d'analyse automatique a echantillon mobile. - Google Patents

Appareil d'analyse automatique a echantillon mobile.

Info

Publication number
FR2665262B1
FR2665262B1 FR919109108A FR9109108A FR2665262B1 FR 2665262 B1 FR2665262 B1 FR 2665262B1 FR 919109108 A FR919109108 A FR 919109108A FR 9109108 A FR9109108 A FR 9109108A FR 2665262 B1 FR2665262 B1 FR 2665262B1
Authority
FR
France
Prior art keywords
analysis apparatus
automatic analysis
mobile sample
sample
mobile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR919109108A
Other languages
English (en)
Other versions
FR2665262A1 (fr
Inventor
Komi Hideto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of FR2665262A1 publication Critical patent/FR2665262A1/fr
Application granted granted Critical
Publication of FR2665262B1 publication Critical patent/FR2665262B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR919109108A 1990-07-26 1991-07-18 Appareil d'analyse automatique a echantillon mobile. Expired - Fee Related FR2665262B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2200278A JPH0487148A (ja) 1990-07-26 1990-07-26 試料移動経路指定自動分析装置

Publications (2)

Publication Number Publication Date
FR2665262A1 FR2665262A1 (fr) 1992-01-31
FR2665262B1 true FR2665262B1 (fr) 1993-01-08

Family

ID=16421661

Family Applications (1)

Application Number Title Priority Date Filing Date
FR919109108A Expired - Fee Related FR2665262B1 (fr) 1990-07-26 1991-07-18 Appareil d'analyse automatique a echantillon mobile.

Country Status (3)

Country Link
US (1) US5192866A (fr)
JP (1) JPH0487148A (fr)
FR (1) FR2665262B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0712755A (ja) * 1993-06-23 1995-01-17 Res Dev Corp Of Japan 電子線装置の調整方法および装置
JP3231516B2 (ja) * 1993-10-12 2001-11-26 セイコーインスツルメンツ株式会社 電子線マイクロアナライザ
US6118123A (en) * 1997-02-05 2000-09-12 Jeol Ltd. Electron probe microanalyzer
JPH1196958A (ja) * 1997-09-19 1999-04-09 Hitachi Ltd 分析電子顕微鏡
FR2806527B1 (fr) * 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
JP2006292682A (ja) * 2005-04-14 2006-10-26 Mitsubishi Electric Corp Ｃａｄ／ｃａｍ装置及び電子ビーム照射装置
DE102009041993B4 (de) * 2009-09-18 2020-02-13 Carl Zeiss Microscopy Gmbh Beobachtungs- und Analysegerät
JP5589366B2 (ja) 2009-11-27 2014-09-17 ソニー株式会社 情報処理装置、情報処理方法及びそのプログラム
JP5047318B2 (ja) * 2010-03-05 2012-10-10 株式会社日立ハイテクノロジーズ 電子顕微鏡画像と光学画像を重ねて表示する方法
US20230178331A1 (en) * 2020-03-26 2023-06-08 Hitachi High-Tech Corporation Charged Particle Beam Device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1560722A (en) * 1975-04-23 1980-02-06 Jeol Ltd Scanning electron microscope
US4494004A (en) * 1980-11-28 1985-01-15 International Business Machines Corporation Electron beam system
GB2130433B (en) * 1982-03-05 1986-02-05 Jeol Ltd Scanning electron microscope with as optical microscope
JPS5940243A (ja) * 1982-08-31 1984-03-05 Shimadzu Corp 走査型分析装置
JPS6177243A (ja) * 1984-09-20 1986-04-19 Jeol Ltd 面分析可能な走査電子顕微鏡
JPS61243648A (ja) * 1985-04-19 1986-10-29 Hitachi Ltd 透過形電子顕微鏡の分析点制御装置
JPS60258838A (ja) * 1985-04-19 1985-12-20 Hitachi Ltd 任意領域の固体表面分析装置
JPS62277724A (ja) * 1986-05-27 1987-12-02 Fujitsu Ltd 電子ビ−ム露光装置
US4857731A (en) * 1987-04-17 1989-08-15 Jeol Ltd. Instrument for analyzing specimen
JP2830875B2 (ja) * 1987-06-19 1998-12-02 株式会社島津製作所 Ｅｐｍａの測定データ表示方法
JPH01143129A (ja) * 1987-11-28 1989-06-05 Shimadzu Corp マッピング装置
JPH02119036A (ja) * 1988-10-28 1990-05-07 Jeol Ltd 荷電粒子線分析装置

Also Published As

Publication number Publication date
US5192866A (en) 1993-03-09
FR2665262A1 (fr) 1992-01-31
JPH0487148A (ja) 1992-03-19

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Legal Events

Date Code Title Description
ST Notification of lapse