FR2595469B1 - Capteur a couche epaisse, notamment capteur de pression - Google Patents

Capteur a couche epaisse, notamment capteur de pression

Info

Publication number
FR2595469B1
FR2595469B1 FR878703076A FR8703076A FR2595469B1 FR 2595469 B1 FR2595469 B1 FR 2595469B1 FR 878703076 A FR878703076 A FR 878703076A FR 8703076 A FR8703076 A FR 8703076A FR 2595469 B1 FR2595469 B1 FR 2595469B1
Authority
FR
France
Prior art keywords
sensor
thick layer
especially pressure
pressure sensor
layer sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR878703076A
Other languages
English (en)
Other versions
FR2595469A1 (fr
Inventor
Roberto Dell Acqua
Giuseppina Rossi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marelli Europe SpA
Original Assignee
Marelli Autronica SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marelli Autronica SpA filed Critical Marelli Autronica SpA
Publication of FR2595469A1 publication Critical patent/FR2595469A1/fr
Application granted granted Critical
Publication of FR2595469B1 publication Critical patent/FR2595469B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR878703076A 1986-03-10 1987-03-06 Capteur a couche epaisse, notamment capteur de pression Expired - Lifetime FR2595469B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8653090U IT206925Z2 (it) 1986-03-10 1986-03-10 Sensore a filo spesso in particolare sensore di pressione

Publications (2)

Publication Number Publication Date
FR2595469A1 FR2595469A1 (fr) 1987-09-11
FR2595469B1 true FR2595469B1 (fr) 1990-08-10

Family

ID=11279856

Family Applications (1)

Application Number Title Priority Date Filing Date
FR878703076A Expired - Lifetime FR2595469B1 (fr) 1986-03-10 1987-03-06 Capteur a couche epaisse, notamment capteur de pression

Country Status (12)

Country Link
US (1) US4775850A (fr)
JP (2) JPS62214327A (fr)
BE (1) BE1001667A5 (fr)
BR (1) BR6700550U (fr)
CH (1) CH669259A5 (fr)
DE (1) DE3707077A1 (fr)
ES (1) ES2004546A6 (fr)
FR (1) FR2595469B1 (fr)
GB (1) GB2187887B (fr)
IT (1) IT206925Z2 (fr)
NL (1) NL8700569A (fr)
PT (1) PT84431B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818189A1 (de) * 1988-05-28 1989-11-30 Bosch Gmbh Robert Sensor
DE3818191A1 (de) * 1988-05-28 1989-11-30 Bosch Gmbh Robert Sensor
JP2661967B2 (ja) * 1988-06-17 1997-10-08 マレリ・オートロニカ・ソシエタ・ペル・アチオニ 圧力変換器
JPH02272338A (ja) * 1989-04-14 1990-11-07 Matsushita Electric Ind Co Ltd 圧力センサおよびその製造方法
DE3918818B4 (de) * 1989-06-09 2006-03-30 Hartmann & Braun Ag Drucksensor
DE3919059A1 (de) * 1989-06-10 1991-01-03 Bosch Gmbh Robert Drucksensor zum erfassen von druckschwankungen einer druckquelle
GB2271185A (en) * 1992-09-30 1994-04-06 Ist Lab Ltd Load cell
US5522266A (en) * 1993-11-30 1996-06-04 Medex, Inc. Low cost pressure transducer particularly for medical applications
DE4404716A1 (de) * 1994-02-15 1995-08-17 Hottinger Messtechnik Baldwin Dehnungsmeßstreifen und Verfahren zur Herstellung eines Dehnungsmeßstreifens sowie Meßgrößenaufnehmer
GB2310288B (en) * 1996-02-17 1999-09-29 John Karl Atkinson A force sensitive device
DE29622321U1 (de) * 1996-12-21 1997-03-06 Medicap Medizintechnik Gmbh Einrichtung zur dosierten Gasversorgung von Anwendern
DE19843579C2 (de) * 1998-09-23 2003-12-18 Siemens Ag Mechanisch-elektrischer Wandler
US6378384B1 (en) 1999-08-04 2002-04-30 C-Cubed Limited Force sensing transducer and apparatus
EP1785706A1 (fr) * 2005-11-15 2007-05-16 IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. Procédé pour former un circuit électrique sur un substrat flexible

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2448629C3 (de) * 1974-10-11 1979-03-15 Siemens Ag, 1000 Berlin Und 8000 Muenchen Differenzdruck Meßzelle
US4104605A (en) * 1976-09-15 1978-08-01 General Electric Company Thin film strain gauge and method of fabrication
IT1101056B (it) * 1978-10-12 1985-09-28 Magneti Marelli Spa Dispositivo misuratore di pressione impiegante un estensimetro a resistori
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
JPS5562331A (en) * 1978-11-06 1980-05-10 Hitachi Ltd Absolute pressure reference type pressure sensor
JPS5598897A (en) * 1979-01-23 1980-07-28 Nippon Electric Co Multilayer circuit board
JPS55140112A (en) * 1979-04-19 1980-11-01 Tokyo Electric Co Ltd Weighing device employing load cell
DE2934073C2 (de) * 1979-08-23 1986-01-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Frequenzanaloger Vielfachsensor
JPS56107141A (en) * 1980-01-30 1981-08-25 Matsushita Electric Ind Co Ltd Pressure sensor
DE3008572C2 (de) * 1980-03-06 1982-05-27 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose
DE3015356A1 (de) * 1980-04-22 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Freitragende schichten sowie verfahren zur herstellung freitragender schichten, insbesondere fuer sensoren fuer brennkraftmaschinen
DE3125640A1 (de) * 1981-06-30 1983-01-13 Robert Bosch Gmbh, 7000 Stuttgart Sensor
US4410871A (en) * 1981-08-28 1983-10-18 Kulite Semiconductor Products Semiconductor transducers employing ion implantation terminal configurations
US4510671A (en) * 1981-08-31 1985-04-16 Kulite Semiconductor Products, Inc. Dielectrically isolated transducer employing single crystal strain gages
JPS5873940A (ja) * 1981-10-28 1983-05-04 Nec Corp ガス放電表示パネル
US4481497A (en) * 1982-10-27 1984-11-06 Kulite Semiconductor Products, Inc. Transducer structures employing ceramic substrates and diaphragms
JPS59141028A (ja) * 1983-01-31 1984-08-13 Nissan Motor Co Ltd 座金型圧力センサ
JPS59175511A (ja) * 1983-03-25 1984-10-04 オムロン株式会社 プリント基板上に誘電体被膜を形成する方法
DE3319605A1 (de) * 1983-05-30 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Sensor mit polykristallinen silicium-widerstaenden
DE3332880A1 (de) * 1983-09-12 1985-03-28 Robert Bosch Gmbh, 7000 Stuttgart Sensor
US4516430A (en) * 1983-12-05 1985-05-14 Kulite Semiconductor Products, Inc. Economical transducer apparatus for use in the medical field
JPS60128673A (ja) * 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置
JPS60178330A (ja) * 1984-02-24 1985-09-12 Aisin Seiki Co Ltd 圧力センサ
EP0179278A3 (fr) * 1984-10-25 1988-09-07 Robert Bosch Gmbh Capteur de pression
DE3440568A1 (de) * 1984-11-07 1986-05-15 Robert Bosch Gmbh, 7000 Stuttgart Hochdrucksensor

Also Published As

Publication number Publication date
GB2187887B (en) 1989-11-15
PT84431B (pt) 1989-10-04
ES2004546A6 (es) 1989-01-16
BE1001667A5 (fr) 1990-02-06
BR6700550U (pt) 1988-06-21
IT8653090V0 (it) 1986-03-10
US4775850A (en) 1988-10-04
GB8704380D0 (en) 1987-04-01
FR2595469A1 (fr) 1987-09-11
JPS62214327A (ja) 1987-09-21
DE3707077A1 (de) 1987-09-17
IT206925Z2 (it) 1987-10-19
NL8700569A (nl) 1987-10-01
PT84431A (en) 1987-04-01
CH669259A5 (it) 1989-02-28
JPH09494U (ja) 1997-09-19
GB2187887A (en) 1987-09-16

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