FR2564087B1 - Verre de borosilicate sans alcali pour photomasques et elements optiques de transmission de lumiere - Google Patents

Verre de borosilicate sans alcali pour photomasques et elements optiques de transmission de lumiere

Info

Publication number
FR2564087B1
FR2564087B1 FR8506911A FR8506911A FR2564087B1 FR 2564087 B1 FR2564087 B1 FR 2564087B1 FR 8506911 A FR8506911 A FR 8506911A FR 8506911 A FR8506911 A FR 8506911A FR 2564087 B1 FR2564087 B1 FR 2564087B1
Authority
FR
France
Prior art keywords
photomasks
light transmission
optical elements
borosilicate glass
alkali free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8506911A
Other languages
English (en)
Other versions
FR2564087A1 (fr
Inventor
Brian Franklin
Karl-Heinz Mader
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott Glass Technologies Inc
Original Assignee
Schott Glass Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Glass Technologies Inc filed Critical Schott Glass Technologies Inc
Publication of FR2564087A1 publication Critical patent/FR2564087A1/fr
Application granted granted Critical
Publication of FR2564087B1 publication Critical patent/FR2564087B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S501/00—Compositions: ceramic
    • Y10S501/90—Optical glass, e.g. silent on refractive index and/or ABBE number
    • Y10S501/903—Optical glass, e.g. silent on refractive index and/or ABBE number having refractive index less than 1.8 and ABBE number less than 70

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Formation Of Insulating Films (AREA)
FR8506911A 1984-05-08 1985-05-07 Verre de borosilicate sans alcali pour photomasques et elements optiques de transmission de lumiere Expired FR2564087B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/608,304 US4554259A (en) 1984-05-08 1984-05-08 Low expansion, alkali-free borosilicate glass suitable for photomask applications

Publications (2)

Publication Number Publication Date
FR2564087A1 FR2564087A1 (fr) 1985-11-15
FR2564087B1 true FR2564087B1 (fr) 1988-01-22

Family

ID=24435904

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8506911A Expired FR2564087B1 (fr) 1984-05-08 1985-05-07 Verre de borosilicate sans alcali pour photomasques et elements optiques de transmission de lumiere

Country Status (5)

Country Link
US (1) US4554259A (fr)
JP (1) JPS60239342A (fr)
DE (1) DE3516020C2 (fr)
FR (1) FR2564087B1 (fr)
GB (1) GB2158431B (fr)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042247A (ja) * 1983-08-16 1985-03-06 Asahi Glass Co Ltd 低膨張性ガラス
JPS62123041A (ja) * 1985-08-09 1987-06-04 Hoya Corp レ−ザ−ガラスから白金インクル−ジヨンを消去する方法
DD262653A1 (de) * 1987-06-15 1988-12-07 Jenaer Glaswerk Veb Photomaskenglas niedriger ausdehnung mit verbesserten hafteigenschaften
JP2634063B2 (ja) * 1988-06-22 1997-07-23 東芝硝子株式会社 固体撮像素子用カバーガラス
US5213916A (en) * 1990-10-30 1993-05-25 International Business Machines Corporation Method of making a gray level mask
GB9525111D0 (en) * 1995-12-08 1996-02-07 Pilkington Plc Glass and glass products
DE69701255T2 (de) * 1996-02-29 2000-08-10 Btg Int Ltd Durch reaktion zwischen organischen polysäuren und basen hergestellter zement
GB2310663A (en) * 1996-02-29 1997-09-03 British Tech Group Organic polyacid/base reaction cement
US6306926B1 (en) 1998-10-07 2001-10-23 3M Innovative Properties Company Radiopaque cationically polymerizable compositions comprising a radiopacifying filler, and method for polymerizing same
US6352763B1 (en) 1998-12-23 2002-03-05 3M Innovative Properties Company Curable slurry for forming ceramic microstructures on a substrate using a mold
US6247986B1 (en) 1998-12-23 2001-06-19 3M Innovative Properties Company Method for precise molding and alignment of structures on a substrate using a stretchable mold
US6306948B1 (en) 1999-10-26 2001-10-23 3M Innovative Properties Company Molding composition containing a debinding catalyst for making ceramic microstructures
US6821178B2 (en) 2000-06-08 2004-11-23 3M Innovative Properties Company Method of producing barrier ribs for plasma display panel substrates
US7033534B2 (en) * 2001-10-09 2006-04-25 3M Innovative Properties Company Method for forming microstructures on a substrate using a mold
US7176492B2 (en) * 2001-10-09 2007-02-13 3M Innovative Properties Company Method for forming ceramic microstructures on a substrate using a mold and articles formed by the method
US6642295B2 (en) * 2001-12-21 2003-11-04 Eastman Kodak Company Photoresist nanocomposite optical plastic article and method of making same
WO2007095115A1 (fr) 2006-02-10 2007-08-23 Corning Incorporated compositions de verre de forte stabilité thermique et chimique et procédés de fabrication DE CELLES-CI
US7995631B2 (en) * 2006-04-14 2011-08-09 Raytheon Company Solid-state laser with spatially-tailored active ion concentration using valence conversion with surface masking and method
CN101626993B (zh) * 2007-05-14 2013-03-20 日本电气硝子株式会社 窗用夹层玻璃及玻璃窗部件
WO2009078936A2 (fr) 2007-12-14 2009-06-25 Miasole Dispositifs photovoltaïques protégés contre l'environnement
US9782949B2 (en) 2008-05-30 2017-10-10 Corning Incorporated Glass laminated articles and layered articles
JP2011524270A (ja) * 2008-05-30 2011-09-01 コーニング インコーポレイテッド 光起電性ガラス積層物品および層状物品
US20120094084A1 (en) * 2010-10-15 2012-04-19 William Keith Fisher Chemically-strengthened glass laminates
TWI614227B (zh) 2012-02-29 2018-02-11 康寧公司 低ｃｔｅ之無鹼硼鋁矽酸鹽玻璃組成物及包含其之玻璃物件
WO2015023525A1 (fr) 2013-08-15 2015-02-19 Corning Incorporated Verre boroaluminosilicaté dopé aux alcalis et exempt d'alcalis
CN105980147B (zh) 2013-08-15 2020-07-24 康宁公司 中至高cte玻璃以及包含其的玻璃制品
JP6497407B2 (ja) * 2017-03-31 2019-04-10 Ａｇｃ株式会社 無アルカリガラス基板
US10188970B1 (en) * 2018-03-26 2019-01-29 Water Solutions, Inc. Rotary drum screen for thin stillage filtration
CN109748496B (zh) * 2019-01-29 2021-12-14 中国建筑材料科学研究总院有限公司 一种硼硅酸盐玻璃、防光晕输入窗玻璃及其制备方法和用途
JPWO2021015057A1 (fr) * 2019-07-25 2021-01-28
WO2021015059A1 (fr) * 2019-07-25 2021-01-28 Ａｇｃ株式会社 Élément stratifié

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326703A (en) * 1963-05-10 1967-06-20 Corning Glass Works Heat-absorbing glass
NL6609666A (fr) * 1966-07-09 1968-01-10
NL6709718A (fr) * 1967-07-13 1969-01-15
JPS4936803B1 (fr) * 1970-07-28 1974-10-03
JPS5827643B2 (ja) * 1979-07-13 1983-06-10 株式会社日立製作所 非直線抵抗体およびその製法
US4321317A (en) * 1980-04-28 1982-03-23 General Motors Corporation High resolution lithography system for microelectronic fabrication
US4476216A (en) * 1981-08-03 1984-10-09 Amdahl Corporation Method for high resolution lithography
JPS5832038A (ja) * 1981-08-14 1983-02-24 Hoya Corp フオトエツチングマスク用無アルカリガラス
US4411972A (en) * 1981-12-30 1983-10-25 International Business Machines Corporation Integrated circuit photomask
US4501819A (en) * 1982-12-23 1985-02-26 Kabushiki Kaisha Ohara Kogaku Garasu Seizosho Glass for a photomask
US4421593A (en) * 1983-04-11 1983-12-20 Rca Corporation Reverse etching of chromium

Also Published As

Publication number Publication date
DE3516020C2 (de) 1994-07-07
JPS60239342A (ja) 1985-11-28
US4554259A (en) 1985-11-19
FR2564087A1 (fr) 1985-11-15
JPH0146461B2 (fr) 1989-10-09
DE3516020A1 (de) 1985-11-14
GB2158431A (en) 1985-11-13
GB8511542D0 (en) 1985-06-12
GB2158431B (en) 1987-12-02

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Legal Events

Date Code Title Description
ST Notification of lapse