FR2502390B1 - Element de contact electrique sur substrat isolant, methode de fabrication et commutateur electrostatique comprenant cet element - Google Patents

Element de contact electrique sur substrat isolant, methode de fabrication et commutateur electrostatique comprenant cet element

Info

Publication number
FR2502390B1
FR2502390B1 FR8204489A FR8204489A FR2502390B1 FR 2502390 B1 FR2502390 B1 FR 2502390B1 FR 8204489 A FR8204489 A FR 8204489A FR 8204489 A FR8204489 A FR 8204489A FR 2502390 B1 FR2502390 B1 FR 2502390B1
Authority
FR
France
Prior art keywords
manufacturing
same
electrical contact
insulating substrate
contact element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8204489A
Other languages
English (en)
Other versions
FR2502390A1 (fr
Inventor
John Christopher Greenwood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Micronas GmbH
ITT Inc
Original Assignee
Deutsche ITT Industries GmbH
ITT Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche ITT Industries GmbH, ITT Industries Inc filed Critical Deutsche ITT Industries GmbH
Publication of FR2502390A1 publication Critical patent/FR2502390A1/fr
Application granted granted Critical
Publication of FR2502390B1 publication Critical patent/FR2502390B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Contacts (AREA)
  • Manufacture Of Switches (AREA)
  • Micromachines (AREA)
FR8204489A 1981-03-17 1982-03-17 Element de contact electrique sur substrat isolant, methode de fabrication et commutateur electrostatique comprenant cet element Expired FR2502390B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8108280A GB2095911B (en) 1981-03-17 1981-03-17 Electrical switch device

Publications (2)

Publication Number Publication Date
FR2502390A1 FR2502390A1 (fr) 1982-09-24
FR2502390B1 true FR2502390B1 (fr) 1986-06-27

Family

ID=10520434

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8204489A Expired FR2502390B1 (fr) 1981-03-17 1982-03-17 Element de contact electrique sur substrat isolant, methode de fabrication et commutateur electrostatique comprenant cet element

Country Status (6)

Country Link
US (1) US4480162A (fr)
JP (1) JPS57197728A (fr)
CH (1) CH658541A5 (fr)
DE (1) DE3207920C2 (fr)
FR (1) FR2502390B1 (fr)
GB (1) GB2095911B (fr)

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GB2114810B (en) * 1982-02-11 1985-11-27 Itt Ind Ltd Electro mechanical position sensor
US4673777A (en) * 1986-06-09 1987-06-16 Motorola, Inc. Microbeam sensor contact damper
JP2745570B2 (ja) * 1988-10-05 1998-04-28 オムロン株式会社 静電式リレー
DE4008832C1 (en) * 1990-03-20 1991-07-18 Rohde & Schwarz Gmbh & Co Kg, 8000 Muenchen, De Microswitch operated by electrostatic force - has force electrode of resistance material between end contacts
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
DE4113190C1 (en) * 1991-04-23 1992-07-16 Rohde & Schwarz Gmbh & Co Kg, 8000 Muenchen, De Electrostatically actuated microswitch - has armature attached to base via torsional struts to allow pivoting for contacting electrodes
CA2072199C (fr) * 1991-06-24 1997-11-11 Fumihiro Kasano Relais electrostatique
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
DE4327142C2 (de) * 1992-02-19 1996-07-11 Siemens Ag Mikromechanisches elektrostatisches Relais
JP2714736B2 (ja) * 1992-06-01 1998-02-16 シャープ株式会社 マイクロリレー
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
US5666258A (en) * 1993-02-18 1997-09-09 Siemens Aktiengesellschaft Micromechanical relay having a hybrid drive
FR2706074B1 (fr) * 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à structure symétrique.
FR2706075B1 (fr) * 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à pièce mobile conservant son orientation au cours du mouvement.
DE4437261C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches elektrostatisches Relais
DE4437260C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches Relais
NO952190L (no) * 1995-06-02 1996-12-03 Lk As Styrbar mikroomskifter
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
JP2900861B2 (ja) * 1995-10-05 1999-06-02 オムロン株式会社 可動片ブロック
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
DE19653105C1 (de) * 1996-12-19 1998-04-23 Siemens Ag Elektromagnetisches Relais für hohe Wärmebelastung
US5898141A (en) * 1997-07-18 1999-04-27 Gilbarco, Inc. Selection switch panel for vending and dispensing equipment
US5934454A (en) * 1997-10-10 1999-08-10 International Business Machines Corporation Thin keyboard having multiple hinge members per keyswitch
US6075213A (en) * 1998-01-28 2000-06-13 Yamaha Corporation Drive unit structure for keyboard assemblies
US6153839A (en) * 1998-10-22 2000-11-28 Northeastern University Micromechanical switching devices
JP2000200533A (ja) 1999-01-07 2000-07-18 Nec Corp マイクロマシンスイッチ
US6236491B1 (en) 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
GB2353410B (en) * 1999-08-18 2002-04-17 Marconi Electronic Syst Ltd Electrical switches
US6275320B1 (en) 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
DE10118195C1 (de) 2001-04-11 2002-11-07 Siemens Ag Verwendung eines Schaltelements zum Schalten in einem Kernspintomographie-Gerät und Kernspintomographie-Gerät
FR2824679B1 (fr) * 2001-05-09 2003-10-03 Phs Mems Actionneur electrostatique
US6731492B2 (en) 2001-09-07 2004-05-04 Mcnc Research And Development Institute Overdrive structures for flexible electrostatic switch
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches
WO2003041133A2 (fr) * 2001-11-09 2003-05-15 Wispry, Inc. Commutateur de mems electrothermique a verrouillage automatique et procede associe
US6608268B1 (en) * 2002-02-05 2003-08-19 Memtronics, A Division Of Cogent Solutions, Inc. Proximity micro-electro-mechanical system
US7551048B2 (en) * 2002-08-08 2009-06-23 Fujitsu Component Limited Micro-relay and method of fabricating the same
US7202764B2 (en) * 2003-07-08 2007-04-10 International Business Machines Corporation Noble metal contacts for micro-electromechanical switches
US7362199B2 (en) * 2004-03-31 2008-04-22 Intel Corporation Collapsible contact switch
US7342473B2 (en) * 2004-04-07 2008-03-11 Schneider Electric Industries Sas Method and apparatus for reducing cantilever stress in magnetically actuated relays
DE102005054266B3 (de) * 2005-11-11 2007-05-31 Eads Deutschland Gmbh Schaltfeld
EP1798196B1 (fr) * 2005-12-15 2017-08-09 Infineon Technologies AG Dispositif multi-couche avec reduction des radiations UV pendant l'encapsulation
US8847890B2 (en) 2011-01-04 2014-09-30 Synaptics Incorporated Leveled touchsurface with planar translational responsiveness to vertical travel
US8912458B2 (en) 2011-01-04 2014-12-16 Synaptics Incorporated Touchsurface with level and planar translational travel responsiveness
US9218927B2 (en) 2012-08-06 2015-12-22 Synaptics Incorporated Touchsurface assembly with level and planar translational responsiveness via a buckling elastic component
WO2014025786A1 (fr) 2012-08-06 2014-02-13 Synaptics Incorporated Ensemble surface tactile utilisant une charnière activée magnétiquement
US9177733B2 (en) 2012-08-06 2015-11-03 Synaptics Incorporated Touchsurface assemblies with linkages
US9040851B2 (en) 2012-08-06 2015-05-26 Synaptics Incorporated Keycap assembly with an interactive spring mechanism
US9384919B2 (en) 2013-03-14 2016-07-05 Synaptics Incorporated Touchsurface assembly having key guides formed in a sheet metal component
US9213372B2 (en) 2013-04-19 2015-12-15 Synaptics Incorporated Retractable keyboard keys

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2942077A (en) * 1954-07-02 1960-06-21 Erdco Inc Electrostatic controls
US3509470A (en) * 1968-03-27 1970-04-28 Sylvania Electric Prod Electrostatic protection device
US3777093A (en) * 1972-05-25 1973-12-04 R Sterns Electromechanical relay
FR2294535A1 (fr) * 1974-12-10 1976-07-09 Lewiner Jacques Perfectionnements aux dispositifs de commande du genre des relais
US4112279A (en) * 1977-09-02 1978-09-05 Bell Telephone Laboratories, Incorporated Piezoelectric relay construction
GB1584914A (en) * 1978-03-02 1981-02-18 Standard Telephones Cables Ltd Semiconductor actuated switching devices
JPS5530113A (en) * 1978-08-22 1980-03-03 Nippon Telegraph & Telephone Electrostatically drive relay
JPS55109341A (en) * 1979-02-16 1980-08-22 Fujitsu Ltd Switching device
US4351988A (en) * 1980-12-08 1982-09-28 Ncr Corporation Keyboard switch assembly

Also Published As

Publication number Publication date
JPS57197728A (en) 1982-12-04
DE3207920A1 (de) 1982-10-14
US4480162A (en) 1984-10-30
GB2095911A (en) 1982-10-06
CH658541A5 (de) 1986-11-14
DE3207920C2 (de) 1984-02-09
FR2502390A1 (fr) 1982-09-24
GB2095911B (en) 1985-02-13

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Legal Events

Date Code Title Description
ST Notification of lapse