FR2706074B1 - Dispositif de commande du type actionneur à structure symétrique. - Google Patents

Dispositif de commande du type actionneur à structure symétrique.

Info

Publication number
FR2706074B1
FR2706074B1 FR9306753A FR9306753A FR2706074B1 FR 2706074 B1 FR2706074 B1 FR 2706074B1 FR 9306753 A FR9306753 A FR 9306753A FR 9306753 A FR9306753 A FR 9306753A FR 2706074 B1 FR2706074 B1 FR 2706074B1
Authority
FR
France
Prior art keywords
control device
symmetrical structure
actuator type
actuator
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9306753A
Other languages
English (en)
Other versions
FR2706074A1 (fr
Inventor
Lewiner Jacques
Perino Didier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR9306753A priority Critical patent/FR2706074B1/fr
Publication of FR2706074A1 publication Critical patent/FR2706074A1/fr
Application granted granted Critical
Publication of FR2706074B1 publication Critical patent/FR2706074B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H2059/009—Electrostatic relays; Electro-adhesion relays using permanently polarised dielectric layers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
FR9306753A 1993-06-02 1993-06-02 Dispositif de commande du type actionneur à structure symétrique. Expired - Fee Related FR2706074B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9306753A FR2706074B1 (fr) 1993-06-02 1993-06-02 Dispositif de commande du type actionneur à structure symétrique.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306753A FR2706074B1 (fr) 1993-06-02 1993-06-02 Dispositif de commande du type actionneur à structure symétrique.

Publications (2)

Publication Number Publication Date
FR2706074A1 FR2706074A1 (fr) 1994-12-09
FR2706074B1 true FR2706074B1 (fr) 1995-07-21

Family

ID=9447797

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9306753A Expired - Fee Related FR2706074B1 (fr) 1993-06-02 1993-06-02 Dispositif de commande du type actionneur à structure symétrique.

Country Status (1)

Country Link
FR (1) FR2706074B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29613790U1 (de) * 1996-08-09 1996-09-26 Festo Kg Mikroschalter
DE19807214A1 (de) * 1998-02-20 1999-09-16 Siemens Ag Mikromechanisches elektrostatisches Relais
FR2830004B1 (fr) * 2001-09-21 2005-01-14 Phs Mems Micro-actionneur de miroir
US7138893B2 (en) 2002-01-16 2006-11-21 Matsushita Electric Industrial Co., Ltd. Micro device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2386898A2 (fr) * 1977-04-05 1978-11-03 Anvar Perfectionnements aux dispositifs de commande du genre des relais
GB2095911B (en) * 1981-03-17 1985-02-13 Standard Telephones Cables Ltd Electrical switch device
DE4113190C1 (en) * 1991-04-23 1992-07-16 Rohde & Schwarz Gmbh & Co Kg, 8000 Muenchen, De Electrostatically actuated microswitch - has armature attached to base via torsional struts to allow pivoting for contacting electrodes
US5278368A (en) * 1991-06-24 1994-01-11 Matsushita Elec. Works, Ltd Electrostatic relay
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate

Also Published As

Publication number Publication date
FR2706074A1 (fr) 1994-12-09

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Legal Events

Date Code Title Description
ST Notification of lapse
RN Application for restoration
FC Favourable decision of inpi director general on an application for restauration.
ST Notification of lapse

Effective date: 20090228