FR2468100A1 - Dispositif pour le controle automatique de photo-masques - Google Patents

Dispositif pour le controle automatique de photo-masques Download PDF

Info

Publication number
FR2468100A1
FR2468100A1 FR8021700A FR8021700A FR2468100A1 FR 2468100 A1 FR2468100 A1 FR 2468100A1 FR 8021700 A FR8021700 A FR 8021700A FR 8021700 A FR8021700 A FR 8021700A FR 2468100 A1 FR2468100 A1 FR 2468100A1
Authority
FR
France
Prior art keywords
line
axis
sensors
cache
lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8021700A
Other languages
English (en)
French (fr)
Other versions
FR2468100B1 (enExample
Inventor
Eberhard Degenkolbe
Manfred Heinze
Karl Ramlow
Jorg Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2468100A1 publication Critical patent/FR2468100A1/fr
Application granted granted Critical
Publication of FR2468100B1 publication Critical patent/FR2468100B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR8021700A 1979-10-16 1980-10-10 Dispositif pour le controle automatique de photo-masques Granted FR2468100A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD21623879A DD146500A1 (de) 1979-10-16 1979-10-16 Anordnung zur automatischen pruefung von photomasken

Publications (2)

Publication Number Publication Date
FR2468100A1 true FR2468100A1 (fr) 1981-04-30
FR2468100B1 FR2468100B1 (enExample) 1984-02-24

Family

ID=5520612

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8021700A Granted FR2468100A1 (fr) 1979-10-16 1980-10-10 Dispositif pour le controle automatique de photo-masques

Country Status (6)

Country Link
JP (1) JPS56142533A (enExample)
DD (1) DD146500A1 (enExample)
DE (1) DE3037467A1 (enExample)
FR (1) FR2468100A1 (enExample)
GB (1) GB2060876B (enExample)
SU (1) SU1142733A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3274015D1 (en) * 1981-07-14 1986-12-04 Hitachi Ltd Pattern detection system
JPS58204346A (ja) * 1982-05-24 1983-11-29 Nippon Jido Seigyo Kk パタ−ンの欠陥検査装置
JP3069417B2 (ja) * 1991-11-21 2000-07-24 シャープ株式会社 位相シフトマスクの検査方法
WO2005026706A1 (en) * 2003-09-04 2005-03-24 Applied Materials Israel, Ltd. Method for high efficiency multipass article inspection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2653590A1 (de) * 1975-11-26 1977-06-08 Nippon Jidoseigyo Ltd Vorrichtung zum ermitteln von fehlern in flaechenhaften mustern, insbesondere in photomasken
DE2830871B2 (de) * 1977-07-15 1979-11-15 Nippon Jidoseigyo, Ltd., Kawasaki (Japan) Vorrichtung zum Ermitteln von Fehlern in flächenhaften Mustern

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2653590A1 (de) * 1975-11-26 1977-06-08 Nippon Jidoseigyo Ltd Vorrichtung zum ermitteln von fehlern in flaechenhaften mustern, insbesondere in photomasken
DE2830871B2 (de) * 1977-07-15 1979-11-15 Nippon Jidoseigyo, Ltd., Kawasaki (Japan) Vorrichtung zum Ermitteln von Fehlern in flächenhaften Mustern

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
RCA TECHNICAL NOTES, no. 1221, 1978 P.V. GOEDERTIER "Inspection system for LSI structures" *

Also Published As

Publication number Publication date
GB2060876A (en) 1981-05-07
DE3037467A1 (de) 1981-04-30
FR2468100B1 (enExample) 1984-02-24
DD146500A1 (de) 1981-02-11
SU1142733A1 (ru) 1985-02-28
JPS56142533A (en) 1981-11-06
GB2060876B (en) 1983-12-21

Similar Documents

Publication Publication Date Title
EP0015173B1 (fr) Système optique d'alignement de deux motifs et photorépéteur utilisant un tel système
EP0063980B1 (fr) Appareil de projection à dispositif de mise au point
KR0141496B1 (ko) 포토마스크의 결함검출 방법 및 장치
US3658420A (en) Photomask inspection by spatial filtering
EP0113633A1 (fr) Procédé et dispositif d'alignement optique de motifs dans deux plans rapprochés dans un appareil d'exposition comprenant une source de rayonnement divergent
EP0015789B1 (fr) Dispositif optique de projection en photorépétition
CN110662020A (zh) 一种基于自准直原理的传函测试系统及方法
CH643618A5 (fr) Machine de chantier ferroviaire.
EP0662211B1 (fr) Procede et ensemble de mesure pour mesurer les dimensions d'un objet
FR2647912A1 (fr) Dispositif optique a reseau pour le controle, en transmission, par detection de phase, d'un quelconque systeme optique, en particulier d'une lentille ophtalmique
FR2468100A1 (fr) Dispositif pour le controle automatique de photo-masques
EP0721136A1 (fr) Dispositif de mesure colorimétrique d'un écran d'affichage
FR2472208A1 (fr) Systeme optique d'alignement de deux motifs et photorepeteur mettant en oeuvre un tel systeme
CN114199527B (zh) 渐变型滤光片的od值检测方法、系统及存储介质
EP0402191B1 (fr) Procédé et dispositif de mesure de largeur de traits à balayage optique
US7042577B1 (en) Architectures for high-resolution photomask phase metrology
JPS63200042A (ja) パタ−ン欠陥検査方法及び装置
FR3011089A1 (fr) Telescope comportant des moyens internes de reglage au plan focal
CH643619A5 (fr) Machine de chantier ferroviaire.
FR2612628A1 (fr) Dispositif de mesure par interferometrie laser
JP2002139309A (ja) 光学特性測定装置、膜厚測定装置、研磨終点判定装置及び研磨装置
FR2501372A1 (fr) Focometre
EP0083268B1 (fr) Procédé de réglage automatique de la netteté d'images projetées sur un écran et dispositifs pour la mise en oeuvre dudit procédé
FR2708739A1 (fr) Procédé et dispositif permettant de faciliter l'étalonnage angulaire d'un appareil utilisé pour le réglage des phares d'un véhicule.
SU728060A1 (ru) Фотоэлектрический дефектоскоп дл контрол поверхностей тел вращени

Legal Events

Date Code Title Description
ST Notification of lapse