GB2060876B - Testing photomasks - Google Patents
Testing photomasksInfo
- Publication number
- GB2060876B GB2060876B GB8033396A GB8033396A GB2060876B GB 2060876 B GB2060876 B GB 2060876B GB 8033396 A GB8033396 A GB 8033396A GB 8033396 A GB8033396 A GB 8033396A GB 2060876 B GB2060876 B GB 2060876B
- Authority
- GB
- United Kingdom
- Prior art keywords
- photomasks
- testing
- testing photomasks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD21623879A DD146500A1 (en) | 1979-10-16 | 1979-10-16 | ARRANGEMENT FOR AUTOMATIC TESTING OF PHOTOMASKS |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2060876A GB2060876A (en) | 1981-05-07 |
GB2060876B true GB2060876B (en) | 1983-12-21 |
Family
ID=5520612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8033396A Expired GB2060876B (en) | 1979-10-16 | 1980-10-16 | Testing photomasks |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS56142533A (en) |
DD (1) | DD146500A1 (en) |
DE (1) | DE3037467A1 (en) |
FR (1) | FR2468100A1 (en) |
GB (1) | GB2060876B (en) |
SU (1) | SU1142733A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3274015D1 (en) * | 1981-07-14 | 1986-12-04 | Hitachi Ltd | Pattern detection system |
JPS58204346A (en) * | 1982-05-24 | 1983-11-29 | Nippon Jido Seigyo Kk | Defect inspection device for pattern |
JP3069417B2 (en) * | 1991-11-21 | 2000-07-24 | シャープ株式会社 | Inspection method of phase shift mask |
WO2005026706A1 (en) * | 2003-09-04 | 2005-03-24 | Applied Materials Israel, Ltd. | Method for high efficiency multipass article inspection |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5265671A (en) * | 1975-11-26 | 1977-05-31 | Nippon Jidoseigyo Ltd | Apparatus for testing defects in pattern |
JPS5419664A (en) * | 1977-07-15 | 1979-02-14 | Nippon Jidoseigyo Ltd | Device for inspecting fault of pattern |
-
1979
- 1979-10-16 DD DD21623879A patent/DD146500A1/en not_active IP Right Cessation
-
1980
- 1980-09-22 SU SU807771388A patent/SU1142733A1/en active
- 1980-10-03 DE DE19803037467 patent/DE3037467A1/en not_active Withdrawn
- 1980-10-10 FR FR8021700A patent/FR2468100A1/en active Granted
- 1980-10-16 GB GB8033396A patent/GB2060876B/en not_active Expired
- 1980-10-16 JP JP14373880A patent/JPS56142533A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2468100B1 (en) | 1984-02-24 |
DD146500A1 (en) | 1981-02-11 |
SU1142733A1 (en) | 1985-02-28 |
FR2468100A1 (en) | 1981-04-30 |
GB2060876A (en) | 1981-05-07 |
DE3037467A1 (en) | 1981-04-30 |
JPS56142533A (en) | 1981-11-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |