FR2460565B1 - Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication - Google Patents

Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication

Info

Publication number
FR2460565B1
FR2460565B1 FR7921599A FR7921599A FR2460565B1 FR 2460565 B1 FR2460565 B1 FR 2460565B1 FR 7921599 A FR7921599 A FR 7921599A FR 7921599 A FR7921599 A FR 7921599A FR 2460565 B1 FR2460565 B1 FR 2460565B1
Authority
FR
France
Prior art keywords
manufacturing
electronic components
piezoelectric resonator
resonator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7921599A
Other languages
English (en)
Other versions
FR2460565A1 (fr
Inventor
Raymond Huguenin
Gottfried Kuechli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DRYAN FORDAHL Tech SA
Original Assignee
DRYAN FORDAHL Tech SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DRYAN FORDAHL Tech SA filed Critical DRYAN FORDAHL Tech SA
Publication of FR2460565A1 publication Critical patent/FR2460565A1/fr
Application granted granted Critical
Publication of FR2460565B1 publication Critical patent/FR2460565B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FR7921599A 1979-07-05 1979-08-22 Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication Expired FR2460565B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH628379A CH626479A5 (fr) 1979-07-05 1979-07-05

Publications (2)

Publication Number Publication Date
FR2460565A1 FR2460565A1 (fr) 1981-01-23
FR2460565B1 true FR2460565B1 (fr) 1987-05-22

Family

ID=4307109

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7921599A Expired FR2460565B1 (fr) 1979-07-05 1979-08-22 Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication

Country Status (8)

Country Link
US (1) US4445256A (fr)
JP (1) JPS5610723A (fr)
CA (1) CA1152586A (fr)
CH (1) CH626479A5 (fr)
DE (1) DE3025477A1 (fr)
FR (1) FR2460565B1 (fr)
GB (1) GB2056764B (fr)
IT (1) IT1150027B (fr)

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DE3038261A1 (de) * 1980-10-10 1982-04-29 Standard Elektrik Lorenz Ag, 7000 Stuttgart Baueinheit mit piezoelektrischen resonatoren
JPS58172008A (ja) * 1982-04-02 1983-10-08 Toyo Commun Equip Co Ltd 圧電振動子の構造及びその製造方法
GB2125211A (en) * 1982-08-03 1984-02-29 Standard Telephones Cables Ltd Mechanical support of piezoelectric devices
EP0113999B1 (fr) * 1982-12-22 1987-09-09 Nec Corporation Procédé de fabrication d'un élément à effet électrostrictif
JPS6082831U (ja) * 1983-11-10 1985-06-08 松下電器産業株式会社 圧電磁器振動子
JPS60264108A (ja) * 1984-06-12 1985-12-27 Toko Inc 圧電濾波器の製造方法
US5001169A (en) * 1984-10-24 1991-03-19 Collagen Corporation Inductive collagen-based bone repair preparations
US4750246A (en) * 1984-10-29 1988-06-14 Hughes Aircraft Company Method of making compensated crystal oscillator
US4639631A (en) * 1985-07-01 1987-01-27 Motorola, Inc. Electrostatically sealed piezoelectric device
GB2202989B (en) * 1987-04-02 1991-01-09 Stc Plc Crystal resonnator
US4866683A (en) * 1988-05-24 1989-09-12 Honeywell, Inc. Integrated acoustic receiver or projector
JPH02228114A (ja) * 1989-03-01 1990-09-11 Seiko Electronic Components Ltd 水晶振動子ユニット
JPH0422566Y2 (fr) * 1989-04-20 1992-05-25
US5016255A (en) * 1989-08-07 1991-05-14 Omnipoint Data Company, Incorporated Asymmetric spread spectrum correlator
US5022047A (en) * 1989-08-07 1991-06-04 Omnipoint Data Corporation Spread spectrum correlator
US5499265A (en) * 1989-08-07 1996-03-12 Omnipoint Data Company, Incorporated Spread spectrum correlator
JPH0379531U (fr) * 1989-12-06 1991-08-14
WO1992002094A1 (fr) * 1990-07-23 1992-02-06 Omnipoint Corporation Procede et appareil de detection de phase utilisant un correlateur d'ondes acoustiques de surface
US5081642A (en) * 1990-08-06 1992-01-14 Omnipoint Data Company, Incorporated Reciprocal saw correlator method and apparatus
CA2094710C (fr) * 1990-10-23 1998-12-01 Robert Clyde Dixon Methode et appareil pour etablir des communications a etalement du spectre
US5402413A (en) * 1991-04-08 1995-03-28 Omnipoint Corporation Three-cell wireless communication system
AU2140092A (en) * 1991-05-13 1992-12-30 Omnipoint Corporation Dual mode transmitter and receiver
US5285469A (en) * 1991-06-03 1994-02-08 Omnipoint Data Corporation Spread spectrum wireless telephone system
US5339051A (en) * 1991-12-09 1994-08-16 Sandia Corporation Micro-machined resonator oscillator
US5198716A (en) * 1991-12-09 1993-03-30 The United States Of America As Represented By The United States Department Of Energy Micro-machined resonator
EP0617864B1 (fr) * 1991-12-16 2002-02-27 XIRCOM Wireless, Inc. Systeme de publication de donnes a etalement de spectre
JP2976262B2 (ja) * 1992-09-25 1999-11-10 株式会社村田製作所 電子部品の製造方法
JPH06132769A (ja) * 1992-10-19 1994-05-13 Murata Mfg Co Ltd 圧電共振子及びその製造方法
EP0596522A1 (fr) * 1992-11-06 1994-05-11 AVANCE TECHNOLOGY, Inc. Résonateur à cristal à haute fréquence
US5410789A (en) * 1992-11-13 1995-05-02 Murata Manufacturing Co., Ltd. Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein
US5355389A (en) * 1993-01-13 1994-10-11 Omnipoint Corporation Reciprocal mode saw correlator method and apparatus
US5839178A (en) * 1993-02-01 1998-11-24 Murata Manufacturing Co., Ltd. Method of making a energy-trapped type piezoelectric resonator
JPH07106905A (ja) * 1993-10-06 1995-04-21 Matsushita Electric Ind Co Ltd 発振子
JPH09512677A (ja) * 1994-05-02 1997-12-16 シーメンス マツシタ コンポーネンツ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ウント コンパニ コマンデイート ゲゼルシヤフト 電子デバイスのカプセル化装置
JP3531971B2 (ja) * 1994-05-16 2004-05-31 フィガロ技研株式会社 ガスまたは湿度を検出するセンサとその製造方法
US5784403A (en) * 1995-02-03 1998-07-21 Omnipoint Corporation Spread spectrum correlation using saw device
US7003857B1 (en) * 1995-11-24 2006-02-28 Seiko Epson Corporation Method of producing an ink-jet printing head
US5920145A (en) * 1996-09-09 1999-07-06 Mcdonnell Douglas Corporation Method and structure for embedding piezoelectric transducers in thermoplastic composites
US6976295B2 (en) * 1997-07-29 2005-12-20 Seiko Epson Corporation Method of manufacturing a piezoelectric device
US6960870B2 (en) * 1997-07-29 2005-11-01 Seiko Epson Corporation Piezo-electric resonator and manufacturing method thereof
JP3511929B2 (ja) * 1999-01-25 2004-03-29 株式会社村田製作所 電子部品の製造方法、圧電共振部品の製造方法、電子部品及び圧電共振部品
JP2001352769A (ja) * 2000-04-05 2001-12-21 Seiko Instruments Inc 圧電アクチュエータの製造方法及び圧電アクチュエータ
US6653762B2 (en) * 2000-04-19 2003-11-25 Murata Manufacturing Co., Ltd. Piezoelectric type electric acoustic converter
JP3903842B2 (ja) * 2001-07-03 2007-04-11 株式会社村田製作所 圧電共振子、フィルタおよび電子通信機器
US9484522B2 (en) 2013-03-13 2016-11-01 Microgen Systems, Inc. Piezoelectric energy harvester device with curved sidewalls, system, and methods of use and making
EP2973765A4 (fr) * 2013-03-13 2016-11-16 Microgen Systems Inc Récupérateur d'énergie en porte-à-faux piézoélectrique microélectromécanique à pile piézoélectrique double symétrique
EP2971761A4 (fr) 2013-03-13 2016-08-31 Microgen Systems Inc Dispositif de collecte d'énergie piézoélectrique comportant une structure de butée
US9728707B2 (en) 2014-02-05 2017-08-08 Microgen Systems, Inc. Packaged piezoelectric energy harvester device with a compliant stopper structure, system, and methods of use and making
US9502635B2 (en) * 2014-03-07 2016-11-22 Microgen Systems, Inc. Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices
US9419546B2 (en) 2014-04-24 2016-08-16 Microgen Systems, Inc. Piezoelectric energy harvester device with frequency offset vibrational harvesters

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US3634787A (en) * 1968-01-23 1972-01-11 Westinghouse Electric Corp Electromechanical tuning apparatus particularly for microelectronic components
US3766616A (en) * 1972-03-22 1973-10-23 Statek Corp Microresonator packaging and tuning
JPS5081491A (fr) * 1973-11-20 1975-07-02
CH581906A5 (fr) * 1974-05-06 1976-11-15 Suisse Horlogerie
JPS5260090A (en) * 1975-11-12 1977-05-18 Citizen Watch Co Ltd Thin and small type piezo electric vibrator
JPS5291675A (en) * 1976-01-29 1977-08-02 Seiko Instr & Electronics Ltd Vibrator unit
JPS5298495A (en) * 1976-02-13 1977-08-18 Seiko Instr & Electronics Ltd Manufacture of box-type crystal vibrator unit
JPS53131792A (en) * 1977-04-22 1978-11-16 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS53149788A (en) * 1977-06-01 1978-12-27 Seiko Instr & Electronics Ltd Piezo-electric vibrator and its manufacture
JPS5421295A (en) * 1977-07-19 1979-02-17 Matsushima Kogyo Kk Crystal oscillator
US4130628A (en) * 1977-08-22 1978-12-19 Pittsburgh Environmental And Energy Systems, Inc. Process for removing SO2 and NOx from gases
JPS5434272A (en) * 1977-08-23 1979-03-13 Seiko Instr & Electronics Ltd Electronic wristwatch
DE2750038A1 (de) * 1977-11-09 1979-05-10 Hauni Werke Koerber & Co Kg Verfahren und anordnung zum steuern des perforierens von zigaretten oder anderen stabfoermigen rauchartikeln
JPS5925486B2 (ja) * 1977-11-15 1984-06-18 シチズン時計株式会社 圧電振動子の容器
JPS54118191A (en) * 1978-03-07 1979-09-13 Matsushima Kogyo Co Ltd Crystal oscillator
JPS5513553A (en) * 1978-07-14 1980-01-30 Matsushima Kogyo Co Ltd Crystal vibrator
JPS5549013A (en) * 1978-10-04 1980-04-08 Seiko Instr & Electronics Ltd Composite vibrator unit
JPS5549012A (en) * 1978-10-04 1980-04-08 Seiko Instr & Electronics Ltd Composite vibrator unit
FR2441960A1 (fr) * 1978-11-16 1980-06-13 Suisse Horlogerie Resonateur piezoelectrique travaillant en cisaillement d'epaisseur
FR2441959A1 (fr) * 1978-11-16 1980-06-13 Suisse Horlogerie Resonateur piezoelectrique a diapason

Also Published As

Publication number Publication date
DE3025477A1 (de) 1981-01-22
IT8023198A1 (it) 1982-01-02
CH626479A5 (fr) 1981-11-13
US4445256A (en) 1984-05-01
CA1152586A (fr) 1983-08-23
FR2460565A1 (fr) 1981-01-23
JPS5610723A (en) 1981-02-03
GB2056764B (en) 1983-03-30
GB2056764A (en) 1981-03-18
IT8023198A0 (it) 1980-07-02
IT1150027B (it) 1986-12-10

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Legal Events

Date Code Title Description
TP Transmission of property
TP Transmission of property
ST Notification of lapse