JPS5549013A - Composite vibrator unit - Google Patents

Composite vibrator unit

Info

Publication number
JPS5549013A
JPS5549013A JP12294378A JP12294378A JPS5549013A JP S5549013 A JPS5549013 A JP S5549013A JP 12294378 A JP12294378 A JP 12294378A JP 12294378 A JP12294378 A JP 12294378A JP S5549013 A JPS5549013 A JP S5549013A
Authority
JP
Japan
Prior art keywords
frame
sealing
vibrators
cover
middle frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12294378A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP12294378A priority Critical patent/JPS5549013A/en
Publication of JPS5549013A publication Critical patent/JPS5549013A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Abstract

PURPOSE:To make it possible to pack elements in the same container with excellent space efficiency, and also to manufacture a unit which is miniature and thin at low cost, by stacking plate materials. CONSTITUTION:This unit consists of two vibrators 1 and 2, covers 3 and 4, and middle frames 5 and 6. After crystals are worked into thin films of 50-100mu for vibrators 1 and 2, frame 7 serving as part of a container and tuning-fork type vibrator part 8 are formed by photo-processing. To form covers 3 and 4 next, a transparent material such as glass is etched to a fixed size in the same photo process as the crystal. Middle frames 5 and 6 are rectangular frames of a glass material like covers 3 and 4; sealing thin film 14 on the frame is formed on one surface of cover 3, and sealing thin film 15 is on one surface of middle frame 5. To pack them, cover 4, middle frame 6, vibrators 2 and 1, and middle frame 5 are sequentially stacked and sealing members such as glass powder sandwiched in respective clearances (A solder plate is sandwiched between middle frame 5 and cover 3.) is heated for sealing.
JP12294378A 1978-10-04 1978-10-04 Composite vibrator unit Pending JPS5549013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12294378A JPS5549013A (en) 1978-10-04 1978-10-04 Composite vibrator unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12294378A JPS5549013A (en) 1978-10-04 1978-10-04 Composite vibrator unit

Publications (1)

Publication Number Publication Date
JPS5549013A true JPS5549013A (en) 1980-04-08

Family

ID=14848446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12294378A Pending JPS5549013A (en) 1978-10-04 1978-10-04 Composite vibrator unit

Country Status (1)

Country Link
JP (1) JPS5549013A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445256A (en) * 1979-07-05 1984-05-01 Dryan-Fordahl Technologies S.A. Method of manufacturing piezoelectric resonator components
US4750246A (en) * 1984-10-29 1988-06-14 Hughes Aircraft Company Method of making compensated crystal oscillator
US5373269A (en) * 1989-06-14 1994-12-13 Murata Manufacturing Co., Ltd. Piezoelectric resonator device of tuning fork type including a spacer member
US5420472A (en) * 1992-06-11 1995-05-30 Motorola, Inc. Method and apparatus for thermal coefficient of expansion matched substrate attachment
US5449965A (en) * 1992-10-15 1995-09-12 Matsushita Electric Industrial Co., Ltd. Oscillator
US5531091A (en) * 1993-09-28 1996-07-02 Robert Bosch Gmbh Sensor with quartz tuning fork
US5541467A (en) * 1992-07-03 1996-07-30 Murata Manufacturing Co., Ltd. Vibrating unit
US5548179A (en) * 1994-10-17 1996-08-20 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component
US5621263A (en) * 1993-08-09 1997-04-15 Murata Manufacturing Co., Ltd. Piezoelectric resonance component
US5627425A (en) * 1992-07-03 1997-05-06 Murata Manufacturing Co., Ltd. Vibrating unit
US5635882A (en) * 1993-08-17 1997-06-03 Murata Manufacturing Co., Ltd. Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator
US5644274A (en) * 1993-08-17 1997-07-01 Murata Manufacturing Co., Ltd. Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator
US5701048A (en) * 1993-05-31 1997-12-23 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component
US7550902B2 (en) * 2003-06-03 2009-06-23 Murata Manufacturing Co., Ltd. Electronic component device

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445256A (en) * 1979-07-05 1984-05-01 Dryan-Fordahl Technologies S.A. Method of manufacturing piezoelectric resonator components
US4750246A (en) * 1984-10-29 1988-06-14 Hughes Aircraft Company Method of making compensated crystal oscillator
US5373269A (en) * 1989-06-14 1994-12-13 Murata Manufacturing Co., Ltd. Piezoelectric resonator device of tuning fork type including a spacer member
US5420472A (en) * 1992-06-11 1995-05-30 Motorola, Inc. Method and apparatus for thermal coefficient of expansion matched substrate attachment
US5541467A (en) * 1992-07-03 1996-07-30 Murata Manufacturing Co., Ltd. Vibrating unit
US5627425A (en) * 1992-07-03 1997-05-06 Murata Manufacturing Co., Ltd. Vibrating unit
US5449965A (en) * 1992-10-15 1995-09-12 Matsushita Electric Industrial Co., Ltd. Oscillator
US5701048A (en) * 1993-05-31 1997-12-23 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component
US5621263A (en) * 1993-08-09 1997-04-15 Murata Manufacturing Co., Ltd. Piezoelectric resonance component
US5635882A (en) * 1993-08-17 1997-06-03 Murata Manufacturing Co., Ltd. Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator
US5644274A (en) * 1993-08-17 1997-07-01 Murata Manufacturing Co., Ltd. Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator
US5648746A (en) * 1993-08-17 1997-07-15 Murata Manufacturing Co., Ltd. Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator
US5684436A (en) * 1993-08-17 1997-11-04 Murata Manufacturing Co., Ltd. Ladder-type filter with laterally coupled piezoelectric resonators
US5689220A (en) * 1993-08-17 1997-11-18 Murata Manufacturing Co., Ltd. Laterally coupled piezoelectric resonator ladder-type filter with at least one width expansion mode resonator
US5696472A (en) * 1993-08-17 1997-12-09 Murata Manufacturing Co., Ltd. Stacked ladder-type filter utilizing at least one shear mode piezoelectric resonator
US5531091A (en) * 1993-09-28 1996-07-02 Robert Bosch Gmbh Sensor with quartz tuning fork
US5548179A (en) * 1994-10-17 1996-08-20 Murata Manufacturing Co., Ltd. Chip-type piezoelectric resonance component
US7550902B2 (en) * 2003-06-03 2009-06-23 Murata Manufacturing Co., Ltd. Electronic component device

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