FR2454614A1 - Transducteur de force a resonateur de quartz miniature - Google Patents

Transducteur de force a resonateur de quartz miniature

Info

Publication number
FR2454614A1
FR2454614A1 FR8008643A FR8008643A FR2454614A1 FR 2454614 A1 FR2454614 A1 FR 2454614A1 FR 8008643 A FR8008643 A FR 8008643A FR 8008643 A FR8008643 A FR 8008643A FR 2454614 A1 FR2454614 A1 FR 2454614A1
Authority
FR
France
Prior art keywords
parts
length
width
force transducer
terminal parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8008643A
Other languages
English (en)
Other versions
FR2454614B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Department of Energy
Original Assignee
US Department of Energy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Department of Energy filed Critical US Department of Energy
Publication of FR2454614A1 publication Critical patent/FR2454614A1/fr
Application granted granted Critical
Publication of FR2454614B1 publication Critical patent/FR2454614B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/04—Piezoelectric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

L'INVENTION CONCERNE UN TRANSDUCTEUR DE FORCE A QUARTZ. LE TRANSDUCTEUR 10 COMPREND DEUX PARTIES TERMINALES 12 NON VIBRANTES QUI TRANSMETTENT DES FORCES DE FACON EGALE A DES PARTIES BARRES 14 INTERMEDIAIRES RELIEES ENTRE ELLES. CES PARTIES BARRES SONT SOLIDAIRES DES PARTIES TERMINALES ET SEPAREES L'UNE DE L'AUTRE PAR UNE FENTE 16. LE CRISTAL DE QUARTZ EST UN CRISTAL PIEZO-ELECTRIQUE RECTANGULAIRE MINCE D'EPAISSEUR T, DE LONGUEUR L ENVIRON EGALE A 100T, DE LARGEUR W ENVIRON EGALE A 10T, LA FENTE AYANT UNE LONGUEUR L D'ENVIRON 0,6L ET UNE LARGEUR W QUI N'EST PAS SUPERIEURE A T, LES PARTIES TERMINALES AYANT UNE LONGUEUR L ENVIRON EGALE A 2W, ET CHACUNE DES PARTIES BARRES AYANT UNE LONGUEUR L A PEU PRES EGALE A L ET UNE LARGEUR W SUPERIEURE A 2,5T. UN MOYEN 18 PORTE PAR LES PARTIES BARRES SERT A FAIRE ENTRER CELLES-CI EN VIBRATION A DES FREQUENCES PROPORTIONNELLES AUX FORCES APPLIQUEES AUX PARTIES TERMINALES. LE RESONATEUR DE L'INVENTION PRESENTE UN FACTEUR DE QUALITE MECANIQUE Q TRES ELEVE, PAR EXEMPLE D'ENVIRON 100000.
FR8008643A 1979-04-20 1980-04-17 Transducteur de force a resonateur de quartz miniature Granted FR2454614A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/031,810 US4215570A (en) 1979-04-20 1979-04-20 Miniature quartz resonator force transducer

Publications (2)

Publication Number Publication Date
FR2454614A1 true FR2454614A1 (fr) 1980-11-14
FR2454614B1 FR2454614B1 (fr) 1984-01-27

Family

ID=21861520

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8008643A Granted FR2454614A1 (fr) 1979-04-20 1980-04-17 Transducteur de force a resonateur de quartz miniature

Country Status (8)

Country Link
US (1) US4215570A (fr)
JP (1) JPS55142222A (fr)
CA (1) CA1137213A (fr)
CH (1) CH651667A5 (fr)
DE (1) DE3013185A1 (fr)
FR (1) FR2454614A1 (fr)
GB (1) GB2050692B (fr)
IT (1) IT1141921B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696728A1 (fr) 1994-08-10 1996-02-14 Sagem S.A. Transducteur force-fréquence à poutres vibrantes
FR2887990A1 (fr) * 2005-07-04 2007-01-05 Sagem Defense Securite Capteur inertiel a courant perturbateur reduit par reduction de la largeur et de l'ecartement des pistes dans les zones critiques

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US4321500A (en) * 1979-12-17 1982-03-23 Paroscientific, Inc. Longitudinal isolation system for flexurally vibrating force transducers
US4406966A (en) * 1980-01-28 1983-09-27 Paroscientific, Inc. Isolating and temperature compensating system for resonators
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
US4384495A (en) * 1980-11-17 1983-05-24 Quartex, Inc. Mounting system for applying forces to load-sensitive resonators
FR2509856A1 (fr) * 1981-07-20 1983-01-21 Crouzet Sa Capteur de pression differentielle
US4445065A (en) * 1981-09-14 1984-04-24 The Singer Company Non-prismal beam resonator
US4446394A (en) * 1981-09-14 1984-05-01 The Singer Company Linearizing mechanism for a vibrating beam force transducer
JPS58208632A (ja) * 1982-05-28 1983-12-05 Toyo Commun Equip Co Ltd 閉端音叉型感圧素子
FR2529670A1 (fr) * 1982-07-01 1984-01-06 Asulab Sa Element sensible pour capteur de contraintes et capteur en faisant application
US4479385A (en) * 1982-09-23 1984-10-30 The United States Of America As Represented By The Department Of Energy Double resonator cantilever accelerometer
US4526247A (en) * 1983-01-18 1985-07-02 Ohaus Scale Corporation Weighing scale transducer
ATE78368T1 (de) * 1983-04-01 1992-08-15 Quartex Inc Doppelstabresonator-kraftwandler mit beschraenkter longitudinal-pumpwirkung.
US4479391A (en) * 1983-04-04 1984-10-30 Quartex, Inc. Resonator force transducer assembly
US4469979A (en) * 1983-05-27 1984-09-04 Statek Corporation Microresonator of double-ended tuning fork configuration
US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity
GB2141231B (en) * 1983-06-07 1986-08-06 Gen Electric Co Plc Force sensors
JPS6010122A (ja) * 1983-06-30 1985-01-19 Shinko Denshi Kk 荷重変換機構
GB8325861D0 (en) * 1983-09-28 1983-11-02 Syrinx Presicion Instr Ltd Force transducer
US4678905A (en) * 1984-05-18 1987-07-07 Luxtron Corporation Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements
US4897541A (en) * 1984-05-18 1990-01-30 Luxtron Corporation Sensors for detecting electromagnetic parameters utilizing resonating elements
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
FR2574209B1 (fr) * 1984-12-04 1987-01-30 Onera (Off Nat Aerospatiale) Resonateur a lame vibrante
US4629262A (en) * 1985-06-24 1986-12-16 Sperry Corporation Position sensor for magnetic suspension and pointing system
FR2588657B1 (fr) * 1985-10-10 1988-08-12 Asulab Sa Capteur de force comprenant un resonateur dont la frequence varie en fonction de la force appliquee
JPS63501244A (ja) * 1985-10-21 1988-05-12 サンドストランド・デ−タ・コントロ−ル・インコ−ポレ−テッド 同期ｆｍデジタル検波器
EP0313570B1 (fr) * 1986-07-01 1992-02-26 Sensor International Capteur de force du type a vibrations
US4856350A (en) * 1987-10-22 1989-08-15 Hanson Richard A Force sensing device and method
US4878385A (en) * 1988-02-02 1989-11-07 Fisher Controls International, Inc. Differential pressure sensing apparatus
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
US4929860A (en) * 1988-05-17 1990-05-29 Sundstrand Data Control, Inc. Electrode configuration for vibrating beam transducers
US4872343A (en) * 1988-08-10 1989-10-10 Sundstrand Data Control, Inc. Matched pairs of force transducers
FR2640045B1 (fr) * 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US4881408A (en) * 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer
US5005413A (en) * 1989-02-27 1991-04-09 Sundstrand Data Control, Inc. Accelerometer with coplanar push-pull force transducers
US4879914A (en) * 1989-02-27 1989-11-14 Sundstrand Data Control, Inc. Unitary push-pull force transducer
US4912990A (en) * 1989-02-27 1990-04-03 Sundstrand Data Control, Inc. Magnetically driven vibrating beam force transducer
US4901586A (en) * 1989-02-27 1990-02-20 Sundstrand Data Control, Inc. Electrostatically driven dual vibrating beam force transducer
US5165279A (en) * 1989-07-06 1992-11-24 Sundstrand Corporation Monolithic accelerometer with flexurally mounted force transducer
IT1235963B (it) * 1989-12-13 1992-12-09 Fiatgeotech Dispositivo per il controllo dell'assetto di un attrezzo trainato da un macchina agricola
CH680094A5 (fr) * 1990-04-06 1992-06-15 Fischer Ag Georg
US5135312A (en) * 1990-07-20 1992-08-04 Sundstrand Data Control, Inc. Temperature transducer
US5156460A (en) * 1990-11-05 1992-10-20 Sundstrand Corporation Crystal temperature transducer
US5391844A (en) * 1992-04-03 1995-02-21 Weigh-Tronix Inc Load cell
US5313023A (en) * 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5442146A (en) * 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
US5336854A (en) * 1992-04-03 1994-08-09 Weigh-Tronix, Inc. Electronic force sensing load cell
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5450762A (en) * 1992-12-17 1995-09-19 Alliedsignal Inc. Reactionless single beam vibrating force sensor
US5578759A (en) * 1995-07-31 1996-11-26 Quartzdyne, Inc. Pressure sensor with enhanced sensitivity
US5962786A (en) * 1995-09-26 1999-10-05 Onera (Office National D'eudes Et De Recheres Aerospatiales) Monolithic accelerometric transducer
US5948981A (en) * 1996-05-21 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometer
US6745627B1 (en) 1996-05-21 2004-06-08 Honeywell International Inc. Electrostatic drive for accelerometer
US5739431A (en) * 1996-06-13 1998-04-14 Alliedsignal, Inc. Miniature magnetometer-accelerometer
EP0943903B1 (fr) 1997-09-08 2004-11-24 Ngk Insulators, Ltd. Detecteur de masse et procede de detection de masse
US5948982A (en) * 1998-02-23 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometers and methods of forming vibrating beam accelerometers
JP3335122B2 (ja) 1998-05-06 2002-10-15 松下電器産業株式会社 角速度センサ
JP2000180250A (ja) * 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
FR2785112B1 (fr) * 1998-10-21 2001-04-13 Dassault Electronique Balise embarquee, en particulier pour la gestion de flottes de vehicules
FR2805344B1 (fr) * 2000-02-22 2002-04-05 Onera (Off Nat Aerospatiale) Transducteur de force a vibration de flexion
DE10008752B4 (de) * 2000-02-24 2005-07-28 Deutsches Zentrum für Luft- und Raumfahrt e.V. Piezoelektrischer Aktor
US6450032B1 (en) 2000-03-14 2002-09-17 Pressure Systems, Inc. Vibrating beam force sensor having improved producibility
US6497152B2 (en) 2001-02-23 2002-12-24 Paroscientific, Inc. Method for eliminating output discontinuities in digital pressure transducers and digital pressure transducer employing same
US6595054B2 (en) 2001-05-14 2003-07-22 Paroscientific, Inc. Digital angular rate and acceleration sensor
US20040016307A1 (en) * 2002-07-24 2004-01-29 Albert William C. Vibration isolation mechanism for a vibrating beam force sensor
US6826960B2 (en) 2002-08-07 2004-12-07 Quartz Sensors, Inc. Triaxial acceleration sensor
US20050061081A1 (en) * 2003-09-22 2005-03-24 Butler Andrew G. Dual wire differential strain based sensor
US7178401B2 (en) * 2005-04-14 2007-02-20 General Electric Company Three axis accelerometer with variable axis sensitivity
US7819011B2 (en) * 2005-08-23 2010-10-26 Georgia Tech Research Corporation High-Q longitudinal block resonators with annexed platforms for mass sensing applications
JP2007163244A (ja) * 2005-12-13 2007-06-28 Epson Toyocom Corp 加速度センサ素子、加速度センサ
US7444883B2 (en) * 2005-12-22 2008-11-04 Honeywell International Inc. Vibrating beam force transducer
US7498728B2 (en) 2006-06-21 2009-03-03 Pressure Systems, Inc. Vibrating beam force sensor of improved ruggedness and mountability
JP2009258085A (ja) 2008-03-25 2009-11-05 Epson Toyocom Corp 圧力センサおよびその製造方法
JP2010019826A (ja) * 2008-03-25 2010-01-28 Epson Toyocom Corp 圧力センサ
JP2010019828A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー用ダイアフラムおよび圧力センサー
JP2010019829A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP2010019827A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
JP5347397B2 (ja) * 2008-09-16 2013-11-20 セイコーエプソン株式会社 双音叉型振動片
JP4756394B2 (ja) * 2009-03-04 2011-08-24 セイコーエプソン株式会社 圧力センサー
US8143768B2 (en) * 2009-06-26 2012-03-27 Hanson Richard A Miniature mechanical resonator device
US9038263B2 (en) 2011-01-13 2015-05-26 Delaware Capital Formation, Inc. Thickness shear mode resonator sensors and methods of forming a plurality of resonator sensors
JP6252241B2 (ja) 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
US11119115B2 (en) 2018-08-27 2021-09-14 Honeywell International Inc. Vibrating beam accelerometer
CN110095210B (zh) * 2019-05-27 2020-11-17 西安交通大学 一种用于微纳尺度材料的硅基石英mems谐振式扭矩传感器
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FR3120688B1 (fr) 2021-03-10 2023-02-10 Office National Detudes Rech Aerospatiales Gyrometre vibrant a structure plane
FR3120700B1 (fr) 2021-03-10 2023-02-10 Office National Detudes Rech Aerospatiales Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres

Citations (6)

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Publication number Priority date Publication date Assignee Title
US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
US3479536A (en) * 1967-03-14 1969-11-18 Singer General Precision Piezoelectric force transducer
FR2013631A1 (fr) * 1968-07-24 1970-04-03 Sauter Kg August
US3672220A (en) * 1970-02-12 1972-06-27 Solartron Electronic Group Force-transducers
FR2178269A5 (fr) * 1971-03-09 1973-11-09 Statek Corp
GB1364203A (en) * 1972-01-31 1974-08-21 Matsushita Electric Ind Co Ltd Resonator devices

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JPS5856404B2 (ja) * 1978-11-29 1983-12-14 横河電機株式会社 水晶トランスデュサ

Patent Citations (6)

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US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
US3479536A (en) * 1967-03-14 1969-11-18 Singer General Precision Piezoelectric force transducer
FR2013631A1 (fr) * 1968-07-24 1970-04-03 Sauter Kg August
US3672220A (en) * 1970-02-12 1972-06-27 Solartron Electronic Group Force-transducers
FR2178269A5 (fr) * 1971-03-09 1973-11-09 Statek Corp
GB1364203A (en) * 1972-01-31 1974-08-21 Matsushita Electric Ind Co Ltd Resonator devices

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696728A1 (fr) 1994-08-10 1996-02-14 Sagem S.A. Transducteur force-fréquence à poutres vibrantes
FR2887990A1 (fr) * 2005-07-04 2007-01-05 Sagem Defense Securite Capteur inertiel a courant perturbateur reduit par reduction de la largeur et de l'ecartement des pistes dans les zones critiques
EP1742069A2 (fr) * 2005-07-04 2007-01-10 SAGEM Défense Sécurité Capteur inertiel a courant perturbateur reduit par reduction de la largeur et de l'ecartement des pistes dans les zones critiques
US7628070B2 (en) 2005-07-04 2009-12-08 Sagem Defense Securite Inertial sensor with disturbing current reduced by reducing the width and the spacing of tracks in critical zones
EP1742069A3 (fr) * 2005-07-04 2010-01-20 SAGEM Défense Sécurité Capteur inertiel a courant perturbateur reduit par reduction de la largeur et de l'ecartement des pistes dans les zones critiques

Also Published As

Publication number Publication date
DE3013185A1 (de) 1980-10-30
CH651667A5 (de) 1985-09-30
CA1137213A (fr) 1982-12-07
JPS6367642B2 (fr) 1988-12-27
GB2050692B (en) 1983-04-27
IT8021470A0 (it) 1980-04-17
DE3013185C2 (fr) 1989-03-09
GB2050692A (en) 1981-01-07
US4215570A (en) 1980-08-05
FR2454614B1 (fr) 1984-01-27
IT1141921B (it) 1986-10-08
JPS55142222A (en) 1980-11-06

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