FR2430986A1 - Procede de fabrication, par pulverisation cathodique, de disques reflecteurs d'infrarouge - Google Patents

Procede de fabrication, par pulverisation cathodique, de disques reflecteurs d'infrarouge

Info

Publication number
FR2430986A1
FR2430986A1 FR7918291A FR7918291A FR2430986A1 FR 2430986 A1 FR2430986 A1 FR 2430986A1 FR 7918291 A FR7918291 A FR 7918291A FR 7918291 A FR7918291 A FR 7918291A FR 2430986 A1 FR2430986 A1 FR 2430986A1
Authority
FR
France
Prior art keywords
mfr
oxide
target
precious metal
successive layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7918291A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2430986A1 publication Critical patent/FR2430986A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613—Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
    • F21V7/28—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/04—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for filtering out infrared radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Procédé de dépôt de couches minces utilisant une atmosphère composée d'un gaz noble et d'une certaine proportion d'oxygène, aussi bien pour les couches de métaux nobles que pour les couches diélectriques en oxydes métalliques.
FR7918291A 1978-07-13 1979-07-13 Procede de fabrication, par pulverisation cathodique, de disques reflecteurs d'infrarouge Withdrawn FR2430986A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782830723 DE2830723A1 (de) 1978-07-13 1978-07-13 Verfahren zur herstellung von infrarotreflektierenden scheiben durch katodenzerstaeubung

Publications (1)

Publication Number Publication Date
FR2430986A1 true FR2430986A1 (fr) 1980-02-08

Family

ID=6044238

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7918291A Withdrawn FR2430986A1 (fr) 1978-07-13 1979-07-13 Procede de fabrication, par pulverisation cathodique, de disques reflecteurs d'infrarouge

Country Status (3)

Country Link
BE (1) BE877692A (fr)
DE (1) DE2830723A1 (fr)
FR (1) FR2430986A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983001250A1 (fr) * 1980-03-28 1983-04-14 Saint Gobain Vitrage Vitrage a spectres de transmission et de reflexion selectifs
EP0183052A2 (fr) * 1984-10-29 1986-06-04 Ppg Industries, Inc. Couches d'oxydes d'alliages métalliques obtenues par pulvérisation
FR2738052A1 (fr) * 1995-08-23 1997-02-28 Bosch Gmbh Robert Projecteur pour vehicule automobile comportant un filtre infrarouge
US7846549B2 (en) 1998-06-08 2010-12-07 Agc Glass Europe Transparent substrate coated with a silver layer

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6241740A (ja) * 1985-08-19 1987-02-23 Nippon Sheet Glass Co Ltd 熱線反射ガラスの製造方法
DE3726803C1 (de) * 1987-08-12 1988-09-15 Heraeus Gmbh W C Licht- und Wetterechtheitspruefgeraet
DE3906374A1 (de) * 1989-03-01 1990-09-06 Leybold Ag Verfahren zum herstellen von scheiben mit hohem transmissionsverhalten im sichtbaren spektralbereich und mit hohem reflexionsverhalten fuer waermestrahlung
DE4211363A1 (de) * 1992-04-04 1993-10-07 Leybold Ag Verfahren zum Herstellen von Scheiben mit hohem Transmissionsverhalten im sichtbaren Spektralbereich und mit hohem Reflexionsverhalten für Wärmestrahlung sowie durch das Verfahren hergestellte Scheiben
DE19533053C1 (de) * 1995-09-07 1997-04-17 Ver Glaswerke Gmbh Verfahren zum Beschichten einer Glasscheibe mit einer wenigstens eine Silberschicht aufweisenden Mehrfachschicht
DE19548430C1 (de) * 1995-12-22 1996-12-19 Fraunhofer Ges Forschung Verfahren zur Herstellung wärmereflektierender Schichtsysteme auf transparenten Substraten
DE10039412A1 (de) * 2000-08-11 2002-02-21 Balzers Process Systems Gmbh Verfahren zur Herstellung eines Substrats mit einer transparenten, leitfähigen Beschichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2825687A (en) * 1952-04-04 1958-03-04 Nat Res Dev Transparent conducting films
DE1058805B (de) * 1952-04-04 1959-06-04 Nat Res Dev Verfahren zum Herstellen durchscheinender und elektrisch leitender Goldueberzuege
FR2218301A1 (en) * 1973-02-16 1974-09-13 Saint Gobain Semi-reflecting glaze with semi-conductor layer - of pref tin oxide, indium oxide or titanium nitride applied on film of gold, silver or copper

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2825687A (en) * 1952-04-04 1958-03-04 Nat Res Dev Transparent conducting films
DE1058805B (de) * 1952-04-04 1959-06-04 Nat Res Dev Verfahren zum Herstellen durchscheinender und elektrisch leitender Goldueberzuege
FR2218301A1 (en) * 1973-02-16 1974-09-13 Saint Gobain Semi-reflecting glaze with semi-conductor layer - of pref tin oxide, indium oxide or titanium nitride applied on film of gold, silver or copper

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983001250A1 (fr) * 1980-03-28 1983-04-14 Saint Gobain Vitrage Vitrage a spectres de transmission et de reflexion selectifs
EP0183052A2 (fr) * 1984-10-29 1986-06-04 Ppg Industries, Inc. Couches d'oxydes d'alliages métalliques obtenues par pulvérisation
EP0183052A3 (en) * 1984-10-29 1987-05-27 Ppg Industries, Inc. Sputtered films of metal alloy oxides
EP0343695A1 (fr) * 1984-10-29 1989-11-29 Ppg Industries, Inc. Couches d'oxydes d'alliages métalliques obtenues par pulvérisation
FR2738052A1 (fr) * 1995-08-23 1997-02-28 Bosch Gmbh Robert Projecteur pour vehicule automobile comportant un filtre infrarouge
US7846549B2 (en) 1998-06-08 2010-12-07 Agc Glass Europe Transparent substrate coated with a silver layer

Also Published As

Publication number Publication date
BE877692A (fr) 1979-11-05
DE2830723A1 (de) 1980-02-14

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Legal Events

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RE Withdrawal of published application