FR2423065A1 - Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede - Google Patents

Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede

Info

Publication number
FR2423065A1
FR2423065A1 FR7909199A FR7909199A FR2423065A1 FR 2423065 A1 FR2423065 A1 FR 2423065A1 FR 7909199 A FR7909199 A FR 7909199A FR 7909199 A FR7909199 A FR 7909199A FR 2423065 A1 FR2423065 A1 FR 2423065A1
Authority
FR
France
Prior art keywords
electrodes
fuel cells
implementing
manufacturing
mixtures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7909199A
Other languages
English (en)
Other versions
FR2423065B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Memorial Institute Inc
Original Assignee
Battelle Memorial Institute Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH390378A external-priority patent/CH630493A5/fr
Priority claimed from CH177079A external-priority patent/CH631834A5/fr
Application filed by Battelle Memorial Institute Inc filed Critical Battelle Memorial Institute Inc
Publication of FR2423065A1 publication Critical patent/FR2423065A1/fr
Application granted granted Critical
Publication of FR2423065B1 publication Critical patent/FR2423065B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H01M4/8871—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/091—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of at least one catalytic element and at least one catalytic compound; consisting of two or more catalytic elements or catalytic compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8647—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites
    • H01M4/8657—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites layered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Composite Materials (AREA)
  • Inert Electrodes (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention a pour objet un procédé de fabrication d'électrodes pour piles à combustibles fonctionnant à température élevée. Selon l'invention, on dépose par pulvérisation cathodique, sur un substrat 4 en électrolyte solide des mélanges actifs, d'oxydes et de métaux, le controle des vitesses relatives de dépôt des divers constituants de ces masses actives étant obtenu en réglant individuellement des champs magnétiques indépendants agissant sur chacun de ces constituants soumis à la pulvérisation par des électro-aimants 5. L'invention permet d'obtenir un degré très élevé d'homogénéité dans les couches et de reproductibilité des compositions des mélanges.
FR7909199A 1978-04-12 1979-04-11 Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede Granted FR2423065A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH390378A CH630493A5 (en) 1978-04-12 1978-04-12 Method of manufacturing electrodes for fuel cells, device for implementing the method and electrode obtained
CH177079A CH631834A5 (en) 1979-02-22 1979-02-22 Sets of pairs of electrodes for fuel cells

Publications (2)

Publication Number Publication Date
FR2423065A1 true FR2423065A1 (fr) 1979-11-09
FR2423065B1 FR2423065B1 (fr) 1983-12-09

Family

ID=25688604

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7909199A Granted FR2423065A1 (fr) 1978-04-12 1979-04-11 Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede

Country Status (8)

Country Link
US (1) US4275126A (fr)
JP (1) JPS54137642A (fr)
CA (1) CA1134902A (fr)
DE (1) DE2915705A1 (fr)
FR (1) FR2423065A1 (fr)
GB (1) GB2018833B (fr)
IT (1) IT1113873B (fr)
NL (1) NL7902846A (fr)

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EP0090067B2 (fr) 1982-03-31 1991-03-20 Ibm Deutschland Gmbh Réacteur pour la gravure ionique réactive et procédé de gravure
JPS58171569A (ja) * 1982-03-31 1983-10-08 Hidetoshi Tsuchiya スパッタリング方法
US4537674A (en) * 1982-07-19 1985-08-27 Energy Conversion Devices, Inc. Electrolytic cell anode
US4545883A (en) * 1982-07-19 1985-10-08 Energy Conversion Devices, Inc. Electrolytic cell cathode
US4459341A (en) * 1983-02-02 1984-07-10 The United States Of America As Represented By The United States Department Of Energy High temperature solid electrolyte fuel cell with ceramic electrodes
US4544461A (en) * 1983-03-28 1985-10-01 Energy Conversion Devices, Inc. Hydrogen sulfide decomposition cell and catalytic materials therefor
US4606806A (en) * 1984-05-17 1986-08-19 Varian Associates, Inc. Magnetron sputter device having planar and curved targets
US4761218A (en) * 1984-05-17 1988-08-02 Varian Associates, Inc. Sputter coating source having plural target rings
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber
DE3532286A1 (de) * 1985-09-11 1987-04-16 Dobos Karoly Dr Anordnung von gasdiffusionselektroden und verfahren fuer die herstellung von gasdiffusionselektroden
WO1987002715A1 (fr) * 1985-10-29 1987-05-07 Commonwealth Scientific And Industrial Research Or Electrodes composites destinees a etre utilisees dans des dispositifs electrolytiques solides
US4702971A (en) * 1986-05-28 1987-10-27 Westinghouse Electric Corp. Sulfur tolerant composite cermet electrodes for solid oxide electrochemical cells
US4971674A (en) * 1986-08-06 1990-11-20 Ube Industries, Ltd. Magnetron sputtering method and apparatus
JPH079061B2 (ja) * 1986-08-06 1995-02-01 宇部興産株式会社 プラズマ制御マグネトロンスパッタリング法及び装置
ATE71990T1 (de) * 1987-07-01 1992-02-15 Messerschmitt Boelkow Blohm Einrichtung zur stromzufuehrung in die poroese anode einer bipolaren platte eines zellenstapels in filterpressenanordnung.
NO894159L (no) * 1989-03-22 1990-09-24 Westinghouse Electric Corp Brennstoffelektrode.
JPH0375392A (ja) * 1989-08-18 1991-03-29 Asahi Chem Ind Co Ltd 水素発生用電極
DE4002951A1 (de) * 1990-02-01 1991-08-08 Medicoat Ag Niederrohrdorf Festelektrolyt - brennstoffzelle und verfahren zu ihrer herstellung
JPH048551A (ja) * 1990-04-26 1992-01-13 Toyo Ink Mfg Co Ltd 感熱記録装置及びオペーク装置
US5427665A (en) * 1990-07-11 1995-06-27 Leybold Aktiengesellschaft Process and apparatus for reactive coating of a substrate
US5174875A (en) * 1990-08-29 1992-12-29 Materials Research Corporation Method of enhancing the performance of a magnetron sputtering target
DE4419167B4 (de) * 1994-06-01 2004-09-02 Leybold Optics Gmbh Vorrichtung zum Beschichten eines Substrates
DE19547700C2 (de) * 1995-12-20 1998-09-17 Forschungszentrum Juelich Gmbh Elektrodensubstrat für eine Brennstoffzelle
CN1129198C (zh) * 1997-02-03 2003-11-26 松下电器产业株式会社 碱性蓄电池的正极活性材料的制造方法
US5985115A (en) * 1997-04-11 1999-11-16 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
US6171721B1 (en) 1997-09-22 2001-01-09 California Institute Of Technology Sputter-deposited fuel cell membranes and electrodes
US5879827A (en) * 1997-10-10 1999-03-09 Minnesota Mining And Manufacturing Company Catalyst for membrane electrode assembly and method of making
US6342131B1 (en) 1998-04-17 2002-01-29 Kabushiki Kaisha Toshiba Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field
JP4840718B2 (ja) 2001-08-14 2011-12-21 日産自動車株式会社 固体酸化物形燃料電池
JP3581354B2 (ja) * 2002-03-27 2004-10-27 株式会社東芝 電界効果トランジスタ
US20040166397A1 (en) * 2002-11-08 2004-08-26 Valdez Thomas I. Cathode structure for direct methanol fuel cell
US7282291B2 (en) * 2002-11-25 2007-10-16 California Institute Of Technology Water free proton conducting membranes based on poly-4-vinylpyridinebisulfate for fuel cells
US20050092597A1 (en) * 2003-10-29 2005-05-05 O'neil James Method of forming thin-film electrodes
EP1772915B1 (fr) * 2004-06-15 2013-04-10 Mitsubishi Chemical Corporation Batterie secondaire a electrolyte non aqueux et sa cathode
CN100353597C (zh) * 2004-08-10 2007-12-05 长沙丰日电气集团有限公司 氢空气燃料电池催化膜制作方法
WO2007032858A1 (fr) * 2005-09-13 2007-03-22 Applied Materials, Inc. Chambre de pulverisation a magnetron de grande surface avec zones de pulverisation a commande independante
US20070056843A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones
US20070056850A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Large-area magnetron sputtering chamber with individually controlled sputtering zones
US20070056845A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Multiple zone sputtering target created through conductive and insulation bonding
US7588668B2 (en) * 2005-09-13 2009-09-15 Applied Materials, Inc. Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers
US20070158500A1 (en) * 2006-01-06 2007-07-12 Ion America Corporation Solid oxide fuel cell system for aircraft power, heat, water, and oxygen generation
US20120009504A1 (en) * 2009-01-20 2012-01-12 President And Fellows Of Harvard College Electrodes for fuel cells
CN113355643A (zh) * 2021-08-10 2021-09-07 北京思伟特新能源科技有限公司 一种采用磁控溅射法制备金属支撑单体的方法

Citations (15)

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Publication number Priority date Publication date Assignee Title
FR1460932A (fr) * 1964-10-30 1966-03-04 Gen Electric Corps composé et procédé pour son façonnage, notamment utilisable comme corps électrode-électrolyte
FR1458344A (fr) * 1964-08-20 1966-03-04 Cons Vacuum Corp Procédé et appareil de revêtement par électrophorèse
FR1459893A (fr) * 1964-08-22 1966-06-17 Balzers Hochvakuum Procédé de production des couches minces par dépôt à l'aide de pulvérisation
FR1454165A (fr) * 1964-11-07 1966-07-22 Philips Nv Cellule à combustible
US3377203A (en) * 1963-12-20 1968-04-09 Univ Ernst Moritz Arndt Method of producing fuel cells with solid electrolytes and ceramic oxide electrode layers
FR1528247A (fr) * 1966-06-22 1968-06-07 Gen Electric électrolyte à la zircone stabilisée et procédés pour sa préparation
FR2008427A1 (en) * 1968-05-13 1970-01-23 Westinghouse Electric Corp Thin film fuel cell with solid electrolyte
US3502562A (en) * 1967-04-19 1970-03-24 Corning Glass Works Multiple cathode sputtering fixture
CH515622A (fr) * 1969-10-22 1971-11-15 Raffinage Cie Francaise Ensemble électrode-électrolyte pour pile à combustible à électrolyte solide fonctionnant à haute température et procédé pour sa fabrication
FR2168124A1 (fr) * 1971-09-07 1973-08-24 Scholz Manfred
GB1334051A (en) * 1970-03-12 1973-10-17 Electrical Research Ass Sputtering
FR2324755A1 (fr) * 1975-09-19 1977-04-15 Anvar Dispositif de pulverisation cathodique de grande vitesse de depot
GB1482632A (en) * 1974-09-11 1977-08-10 Nordiko Ltd Method and apparatus for sputtering
FR2353144A1 (fr) * 1976-05-28 1977-12-23 Raffinage Cie Francaise Ensemble electrolyte-cathode pour pile a combustible
FR2358020A1 (fr) * 1976-07-07 1978-02-03 Philips Nv Dispositif pour la pulverisation cathodique et procede pour la pulverisation a l'aide d'un tel dispositif

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US3377203A (en) * 1963-12-20 1968-04-09 Univ Ernst Moritz Arndt Method of producing fuel cells with solid electrolytes and ceramic oxide electrode layers
FR1458344A (fr) * 1964-08-20 1966-03-04 Cons Vacuum Corp Procédé et appareil de revêtement par électrophorèse
FR1459893A (fr) * 1964-08-22 1966-06-17 Balzers Hochvakuum Procédé de production des couches minces par dépôt à l'aide de pulvérisation
FR1460932A (fr) * 1964-10-30 1966-03-04 Gen Electric Corps composé et procédé pour son façonnage, notamment utilisable comme corps électrode-électrolyte
FR1454165A (fr) * 1964-11-07 1966-07-22 Philips Nv Cellule à combustible
FR1528247A (fr) * 1966-06-22 1968-06-07 Gen Electric électrolyte à la zircone stabilisée et procédés pour sa préparation
US3502562A (en) * 1967-04-19 1970-03-24 Corning Glass Works Multiple cathode sputtering fixture
FR2008427A1 (en) * 1968-05-13 1970-01-23 Westinghouse Electric Corp Thin film fuel cell with solid electrolyte
CH515622A (fr) * 1969-10-22 1971-11-15 Raffinage Cie Francaise Ensemble électrode-électrolyte pour pile à combustible à électrolyte solide fonctionnant à haute température et procédé pour sa fabrication
GB1334051A (en) * 1970-03-12 1973-10-17 Electrical Research Ass Sputtering
FR2168124A1 (fr) * 1971-09-07 1973-08-24 Scholz Manfred
GB1482632A (en) * 1974-09-11 1977-08-10 Nordiko Ltd Method and apparatus for sputtering
FR2324755A1 (fr) * 1975-09-19 1977-04-15 Anvar Dispositif de pulverisation cathodique de grande vitesse de depot
FR2353144A1 (fr) * 1976-05-28 1977-12-23 Raffinage Cie Francaise Ensemble electrolyte-cathode pour pile a combustible
FR2358020A1 (fr) * 1976-07-07 1978-02-03 Philips Nv Dispositif pour la pulverisation cathodique et procede pour la pulverisation a l'aide d'un tel dispositif

Also Published As

Publication number Publication date
US4275126A (en) 1981-06-23
GB2018833B (en) 1983-01-26
GB2018833A (en) 1979-10-24
IT7921783A0 (it) 1979-04-11
JPS54137642A (en) 1979-10-25
NL7902846A (nl) 1979-10-16
FR2423065B1 (fr) 1983-12-09
DE2915705A1 (de) 1979-10-25
CA1134902A (fr) 1982-11-02
JPS618149B2 (fr) 1986-03-12
IT1113873B (it) 1986-01-27

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